Yamanishi, Y., Tanaka, R., Arakawa, Y. &
Nakatsu, Y.,
Feb 23 2017,
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc.,
p. 444-447 4 p. 7863438. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution