Fingerprint The fingerprint is based on mining the text of the scientific documents related to the associated persons. Based on that an index of weighted terms is created, which defines the key subjects of research unit

Laser beam effects Engineering & Materials Science
Excimer lasers Engineering & Materials Science
Annealing Engineering & Materials Science
Lasers Engineering & Materials Science
Doping (additives) Engineering & Materials Science
laser annealing Physics & Astronomy
excimer lasers Physics & Astronomy
irradiation Physics & Astronomy

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Research Output 2012 2019

Formation of low resistance contacts to p-type 4H-SiC using al-film source laser doping

Okamoto, K., Kikuchi, T., Ikeda, A., Ikenoue, H. & Asano, T., Jan 1 2019, PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology. Ribeiro, P., Raposo, M. & Andrews, D. (eds.). SciTePress, p. 294-298 5 p. (PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

low resistance
electric contacts
contact resistance
excimer lasers

Formation of low resistivity layers on singlecrystalline diamond by excimer laser irradiation

Abubakr, E., Zkria, A., Katamune, Y., Ohmagari, S., Imokawa, K., Ikenoue, H. & Yoshitake, T., May 1 2019, In : Diamond and Related Materials. 95, p. 166-173 8 p.

Research output: Contribution to journalArticle

Excimer lasers
Laser beam effects
excimer lasers

Laser Assisted Doping of Silicon Carbide Thin Films Grown by Pulsed Laser Deposition

Paneerselvam, E., Lakshmi Narayanan, V. K., Vasa, N. J., Higashihata, M., Nakamura, D., Ikenoue, H. & Ramachandra Rao, M. S., Jun 15 2019, In : Journal of Electronic Materials. 48, 6, p. 3468-3478 11 p.

Research output: Contribution to journalArticle

Pulsed laser deposition
Silicon carbide
silicon carbides
pulsed laser deposition
Doping (additives)