Fingerprint The fingerprint is based on mining the text of the scientific documents related to the associated persons. Based on that an index of weighted terms is created, which defines the key subjects of research unit

Laser beam effects Engineering & Materials Science
Annealing Engineering & Materials Science
Excimer lasers Engineering & Materials Science
laser annealing Physics & Astronomy
Lasers Engineering & Materials Science
Doping (additives) Engineering & Materials Science
excimer lasers Physics & Astronomy
irradiation Physics & Astronomy

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Research Output 2012 2018

Characterization of Excimer-Laser Doping of a Poly-Si Thin Film with a Phosphoric-Acid Coating for Thin-Film-Transistor Fabrication

Imokawa, K., Tanaka, N., Suwa, A., Nakamura, D., Sadoh, T., Goto, T. & Ikenoue, H., Aug 15 2018, AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings. Institute of Electrical and Electronics Engineers Inc., 8437343

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Semiconductor doping
Silicon Compounds
Thin film circuits
Flat panel displays
Polycrystalline materials

Dopant behavior in heavily doped polycrystalline Ge1-xSnx layers prepared with pulsed laser annealing in water

Takahashi, K., Kurosawa, M., Ikenoue, H., Sakashita, M., Nakatsuka, O. & Zaima, S., Apr 1 2018, In : Japanese Journal of Applied Physics. 57, 4, 04FJ02.

Research output: Contribution to journalArticle

laser annealing
Pulsed lasers
pulsed lasers
Doping (additives)
Annealing

Effect of stress on activation during the formation of np junction in co-implanted germanium

Rashid, N. N., Aziz, U. A., Aid, S. R., Akira, S., Ikenoue, H., Xie, F. & Centeno, A., Apr 2 2018, 2018 18th International Workshop on Junction Technology, IWJT 2018. Institute of Electrical and Electronics Engineers Inc., Vol. 2018-January. p. 1-3 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Germanium
germanium
Chemical activation
activation
Annealing