Fingerprint The fingerprint is based on mining the text of the scientific documents related to the associated persons. Based on that an index of weighted terms is created, which defines the key subjects of research unit

Laser beam effects Engineering & Materials Science
Excimer lasers Engineering & Materials Science
Annealing Engineering & Materials Science
Lasers Engineering & Materials Science
laser annealing Physics & Astronomy
Doping (additives) Engineering & Materials Science
excimer lasers Physics & Astronomy
irradiation Physics & Astronomy

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Research Output 2012 2019

Laser Assisted Doping of Silicon Carbide Thin Films Grown by Pulsed Laser Deposition

Paneerselvam, E., Lakshmi Narayanan, V. K., Vasa, N. J., Higashihata, M., Nakamura, D., Ikenoue, H. & Ramachandra Rao, M. S., Jan 1 2019, In : Journal of Electronic Materials.

Research output: Contribution to journalArticle

Semiconductor doping
Magnesium Oxide
Spectroscopic analysis
Magnesia
spectroscopic analysis

Characterization of Excimer-Laser Doping of a Poly-Si Thin Film with a Phosphoric-Acid Coating for Thin-Film-Transistor Fabrication

Imokawa, K., Tanaka, N., Suwa, A., Nakamura, D., Sadoh, T., Goto, T. & Ikenoue, H., Aug 15 2018, AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings. Institute of Electrical and Electronics Engineers Inc., 8437343. (AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

phosphoric acid
Phosphoric acid
Excimer lasers
Thin film transistors
Polysilicon
1 Citation (Scopus)

Dopant behavior in heavily doped polycrystalline Ge1-xSnx layers prepared with pulsed laser annealing in water

Takahashi, K., Kurosawa, M., Ikenoue, H., Sakashita, M., Nakatsuka, O. & Zaima, S., Apr 1 2018, In : Japanese Journal of Applied Physics. 57, 4, 04FJ02.

Research output: Contribution to journalArticle

laser annealing
Pulsed lasers
pulsed lasers
Doping (additives)
Annealing