Research Output

  • 9 Conference contribution
  • 4 Article
  • 2 Conference article
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Conference contribution
2020

Surface flattening of poly-Si thin films by laser annealing and electrical properties of LTPS-TFTs

Hamano, F., Mizutani, A., Imokawa, K., Nakamura, D., Goto, T. & Ikenoue, H., Jan 1 2020, Laser-Based Micro- and Nanoprocessing XIV. Klotzbach, U., Watanabe, A. & Kling, R. (eds.). SPIE, 1126810. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 11268).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2019

High-concentration, low-temperature, and low-cost excimer laser doping for 4h-sic power device fabrication

Imokawa, K., Kikuchi, T., Okamoto, K., Nakamura, D., Ikeda, A., Asano, T. & Ikenoue, H., Jan 1 2019, Silicon Carbide and Related Materials, 2018. Gammon, P. M., Shah, V. A., McMahon, R. A., Jennings, M. R., Vavasour, O., Mawby, P. A. & Padfield, F. (eds.). Trans Tech Publications Ltd, p. 403-406 4 p. (Materials Science Forum; vol. 963 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Increasing laser-doping depth of al in 4H-SiC by using expanded-pulse excimer laser

Ikeda, A., Shimokawa, T., Ikenoue, H. & Asano, T., Jan 1 2019, Silicon Carbide and Related Materials, 2018. Gammon, P. M., Shah, V. A., McMahon, R. A., Jennings, M. R., Vavasour, O., Mawby, P. A. & Padfield, F. (eds.). Trans Tech Publications Ltd, p. 412-415 4 p. (Materials Science Forum; vol. 963 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Low-temperature, high-concentration laser doping of 4H-SiC for low contact resistance

Kikuchi, T., Imokawa, K., Ikeda, A., Nakamura, D., Asano, T. & Ikenoue, H., Jan 1 2019, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV. Makimura, T., Raciukaitis, G. & Molpeceres, C. (eds.). SPIE, 109050Z. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10905).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2018

Effect of stress on activation during the formation of np junction in co-implanted germanium

Rashid, N. N., Aziz, U. A., Aid, S. R., Akira, S., Ikenoue, H., Xie, F. & Centeno, A., Apr 2 2018, 2018 18th International Workshop on Junction Technology, IWJT 2018. Ru, G-P., Li, B-Z., Jiang, Y-L. & Qu, X-P. (eds.). Institute of Electrical and Electronics Engineers Inc., p. 1-3 3 p. (2018 18th International Workshop on Junction Technology, IWJT 2018; vol. 2018-January).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2017

Co-implantation germanium with laser thermal annealing for the formation of np junction

Rashid, N. N., Aziz, U. A., Aid, S. R., Centeno, A., Akira, S., Ikenoue, H. & Xie, F., Jun 30 2017, 17th International Workshop on Junction Technology, IWJT 2017. Institute of Electrical and Electronics Engineers Inc., p. 91-93 3 p. 7966525. (17th International Workshop on Junction Technology, IWJT 2017).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Comparison of theoretical and experimental analysis of P and Sn co-implantation in germanium

Rashid, N. N. M., Aziz, U. A., Aid, S. R., Centeno, A., Matsumoto, S., Xie, F., Suwa, A. & Ikenoue, H., Oct 12 2017, IEACon 2016 - 2016 IEEE Industrial Electronics and Applications Conference. Institute of Electrical and Electronics Engineers Inc., p. 389-392 4 p. 8067411. (IEACon 2016 - 2016 IEEE Industrial Electronics and Applications Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2016

Al doping from laser irradiated Al film deposited on 4H-SiC

Ikeda, A., Sumina, R., Ikenoue, H. & Asano, T., Jan 1 2016, Silicon Carbide and Related Materials 2015. Roccaforte, F., Giannazzo, F., La Via, F., Nipoti, R., Crippa, D. & Saggio, M. (eds.). Trans Tech Publications Ltd, p. 527-530 4 p. (Materials Science Forum; vol. 858).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
2015

Extremely enhanced diffusion of nitrogen in 4H-SiC observed in liquid-nitrogen immersion irradiation of excimer laser

Ikeda, A., Marui, D., Ikenoue, H. & Asano, T., Jan 1 2015, Silicon Carbide and Related Materials 2014. Chaussende, D. & Ferro, G. (eds.). Trans Tech Publications Ltd, p. 448-451 4 p. (Materials Science Forum; vol. 821-823).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)