Research Output 1978 2019

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Conference article
2018

Morphology Evolution of ZnO Thin Films Deposited by Nitrogen Mediated Crystallization Method

Suhariadi, I., Shiratani, M. & Itagaki, N., Mar 30 2018, In : MATEC Web of Conferences. 159, 02031.

Research output: Contribution to journalConference article

Crystallization
Nitrogen
Thin films
Fractals
Surface morphology
2017
1 Citation (Scopus)

Characterization of Si thin films doped by wet-chemical laser processing

Suwa, A., Tanaka, N., Sadoh, T., Nakamura, D. & Ikenoue, H., Jan 1 2017, In : Digest of Technical Papers - SID International Symposium. 48, 1, p. 430-432 3 p.

Research output: Contribution to journalConference article

Chemical lasers
Doping (additives)
Thin films
Processing
Ion implantation
2015
1 Citation (Scopus)

Fabrication of p-i-n solar cells utilizing ZnlnON by RF magnetron sputtering

Matsushima, K., Shimizu, R., Ide, T., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2015, In : Materials Research Society Symposium Proceedings. 1741, January, p. 53-57 5 p.

Research output: Contribution to journalConference article

Magnetron sputtering
Solar cells
magnetron sputtering
solar cells
Fabrication
2014

Contribution of H2 plasma etching to radial profile of amount of dust particles in a divertor simulator

Tateishi, M., Koga, K., Yamashita, D., Kamataki, K., Seo, H., Itagaki, N., Shiratani, M., Ashikawa, N., Masuzaki, S., Nishimura, K. & Sagara, A., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012009.

Research output: Contribution to journalConference article

plasma etching
simulators
dust
profiles
flakes

Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD

Toko, S., Hashimoto, Y., Kanemitu, Y., Torigoe, Y., Seo, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012008.

Research output: Contribution to journalConference article

vapor deposition
grids
plasma jets
hollow
direct current
4 Citations (Scopus)

Control of the area irradiated by the sheet-type plasma jet in atmospheric pressure

Kawasaki, T., Kawano, K., Mizoguchi, H., Yano, Y., Yamashita, K., Sakai, M., Uchida, G., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012016.

Research output: Contribution to journalConference article

plasma jets
atmospheric pressure
irradiation
sterilization effects
generators
3 Citations (Scopus)

Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method

Ichida, D., Uchida, G., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012002.

Research output: Contribution to journalConference article

magnetron sputtering
nanoparticles
frequency shift
gas mixtures
crystallinity
2 Citations (Scopus)

Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency

Hashimoto, Y., Toko, S., Yamashita, D., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012007.

Research output: Contribution to journalConference article

filters
film thickness
amorphous silicon
nanoparticles
hydrogen
1 Citation (Scopus)

Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence

Dong, X., Koga, K., Yamashita, D., Seo, H., Itagaki, N., Shiratani, M., Setsuhara, Y., Sekine, M. & Hori, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012010.

Research output: Contribution to journalConference article

magnetohydrodynamic flow
pressure dependence
flow velocity
spectroscopy
toluene
3 Citations (Scopus)

Formation of carbon nanoparticle using Ar+CH4 high pressure nanosecond discharges

Koga, K., Dong, X., Iwashita, S., Czarnetzki, U. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012020.

Research output: Contribution to journalConference article

nanoparticles
electrodes
carbon
glow discharges
transition pressure
8 Citations (Scopus)

Growth enhancement effects of radish sprouts: Atmospheric pressure plasma irradiation vs. heat shock

Sarinont, T., Amano, T., Kitazaki, S., Koga, K., Uchida, G., Shiratani, M. & Hayashi, N., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012017.

Research output: Contribution to journalConference article

atmospheric pressure
shock
heat
irradiation
augmentation
3 Citations (Scopus)

Plasma etching of single fine particle trapped in Ar plasma by optical tweezers

Ito, T., Koga, K., Yamashita, D., Kamataki, K., Itagaki, N., Uchida, G. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012014.

Research output: Contribution to journalConference article

trapped particles
plasma etching
plasma sheaths
interactions
infrared lasers
3 Citations (Scopus)

Preparation of Si nanoparticles by laser ablation in liquid and their application as photovoltaic material in quantum dot sensitized solar cell

Chewchinda, P., Hayashi, K., Ichida, D., Seo, H., Uchida, G., Shiratani, M., Odawara, O. & Wada, H., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012023.

Research output: Contribution to journalConference article

laser ablation
solar cells
quantum dots
nanoparticles
preparation
1 Citation (Scopus)

SiC nanoparticle composite anode for Li-Ion batteries

Shiratani, M., Kamataki, K., Uchida, G., Koga, K., Seo, H., Itagaki, N. & Ishihara, T., Jan 1 2014, In : Materials Research Society Symposium Proceedings. 1678

Research output: Contribution to journalConference article

electric batteries
Anodes
anodes
Nanoparticles
nanoparticles
2013

Growth control of ZnO nano-rod with various seeds and photovoltaic application

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2013, In : Journal of Physics: Conference Series. 441, 1, 012029.

Research output: Contribution to journalConference article

seeds
rods
electron transfer
baths
solar cells
7 Citations (Scopus)

Investigations on plasma-biomolecules interactions as fundamental process for plasma medicine

Takenaka, K., Cho, K., Setsuhara, Y., Shiratani, M., Sekine, M. & Hori, M., Jan 1 2013, In : Journal of Physics: Conference Series. 441, 1, 012001.

Research output: Contribution to journalConference article

plasma interactions
alanine
medicine
x ray spectroscopy
photons
2012
2 Citations (Scopus)

Self organization of FeGe/FeSi/FeGe layered structures on Ge and their electrical conduction properties

Matsukura, B., Hiraiwa, Y., Nakajima, T., Narumi, K., Sakai, S., Sadoh, T., Miyao, M. & Maeda, Y., Jan 1 2012, In : Physics Procedia. 23, p. 21-24 4 p.

Research output: Contribution to journalConference article

conduction
insulators
decomposition
temperature dependence
microstructure
2006

Low temperature crystallization of a-SiGe on insulating films for thin film transistor application

Miyao, M., Kanno, H., Tsunoda, I. & Sadoh, T., Dec 1 2006, In : ECS Transactions. 3, 7, p. 613-626 14 p.

Research output: Contribution to journalConference article

Thin film transistors
Crystallization
Crystal growth
Temperature
Semiconductor materials
2005
17 Citations (Scopus)

Pulsed laser crystallization of silicon-germanium films

Sameshima, T., Watakabe, H., Kanno, H., Sadoh, T. & Miyao, M., Sep 1 2005, In : Thin Solid Films. 487, 1-2, p. 67-71 5 p.

Research output: Contribution to journalConference article

Germanium
Silicon
Crystallization
Pulsed lasers
germanium
2004
1 Citation (Scopus)

Control of the electron temperature by varying the resonance zone width in ECR plasma

Itagaki, N., Muta, H., Ishii, N. & Kawai, Y., Jun 1 2004, In : Thin Solid Films. 457, 1, p. 59-63 5 p.

Research output: Contribution to journalConference article

Electron temperature
Microwaves
electron energy
Magnetic fields
Plasmas
2 Citations (Scopus)

Enhancement of metal-induced crystallization in Ge/Si/Ni/SiO2 layered structure

Kanno, H., Kenjo, A., Sadoh, T. & Miyao, M., Mar 22 2004, In : Thin Solid Films. 451-452, p. 324-327 4 p.

Research output: Contribution to journalConference article

Crystallization
Metals
Annealing
crystallization
Polysilicon

Formation of polycrystalline-silicon-germanium films by pulsed laser-induced rapid annealing

Watakabe, H., Sameshima, T., Kanno, H., Sadoh, T. & Miyao, M., Dec 1 2004, In : Proceedings of SPIE - The International Society for Optical Engineering. 5662, p. 428-431 4 p., 69.

Research output: Contribution to journalConference article

Germanium
Pulsed Laser
Pulsed lasers
Annealing
Polysilicon
1 Citation (Scopus)

Formation of SiGe/β-FeSi2 superstructures from amorphous Si/FeSiGe layers

Sadoh, T., Owatari, M., Murakami, Y., Kenjo, A., Yoshitake, T., Itakura, M., Enokida, T. & Miyao, M., Aug 2 2004, In : Thin Solid Films. 461, 1, p. 77-80 4 p.

Research output: Contribution to journalConference article

Annealing
annealing
agglomeration
Nanocrystals
nanocrystals
41 Citations (Scopus)

High-rate growth of microcrystalline silicon films using a high-density SiH4/H2 glow-discharge plasma

Niikura, C., Itagaki, N., Kondo, M., Kawai, Y. & Matsuda, A., Jun 1 2004, In : Thin Solid Films. 457, 1, p. 84-89 6 p.

Research output: Contribution to journalConference article

Microcrystalline silicon
Glow discharges
silicon films
glow discharges
Cathodes
2 Citations (Scopus)

Impurity conduction in ion beam synthesized β-FeSi2/Si

Murakami, Y., Tsukahara, Y., Kenjo, A., Sadoh, T., Maeda, Y. & Miyao, M., Aug 2 2004, In : Thin Solid Films. 461, 1, p. 198-201 4 p.

Research output: Contribution to journalConference article

Ion beams
ion beams
Impurities
conduction
impurities
6 Citations (Scopus)

Solid-phase crystallization of high-quality Si films on SiO2 by local Ge-insertion

Tsunoda, I., Nagatomo, K., Kenjo, A., Sadoh, T. & Miyao, M., Mar 22 2004, In : Thin Solid Films. 451-452, p. 489-492 4 p.

Research output: Contribution to journalConference article

Crystallization
solid phases
insertion
crystallization
Nucleation
7 Citations (Scopus)

Solid-phase crystallization of β-FeSi2 thin film in Fe/Si structure

Murakami, Y., Kenjo, A., Sadoh, T., Yoshitake, T. & Miyao, M., Aug 2 2004, In : Thin Solid Films. 461, 1, p. 68-71 4 p.

Research output: Contribution to journalConference article

Crystallization
solid phases
crystallization
Thin films
Lattice mismatch
7 Citations (Scopus)

Thin Solid Films: Preface

Maeda, Y. Y., Homewood, K. P., Suemasu, T., Sadoh, T., Udono, H. & Kenji, Y., Aug 2 2004, In : Thin Solid Films. 461, 1, 1 p.

Research output: Contribution to journalConference article

2003
1 Citation (Scopus)

Anisotropic plasma chemical vapor deposition of copper films in trenches

Takenaka, K., Onishi, M., Takenshita, M., Kinoshita, T., Koga, K., Shiratani, M. & Watanabe, Y., Dec 1 2003, In : Materials Research Society Symposium - Proceedings. 766, p. 465-470 6 p.

Research output: Contribution to journalConference article

trench
Copper
Chemical vapor deposition
copper
Plasmas
19 Citations (Scopus)

Cluster-suppressed plasma CVD for deposition of high quality a-Si:H films

Shiratani, M., Koga, K. & Watanabe, Y., Mar 3 2003, In : Thin Solid Films. 427, 1-2, p. 1-5 5 p.

Research output: Contribution to journalConference article

Plasma CVD
vapor deposition
Silanes
very high frequencies
microstructure
44 Citations (Scopus)

Electron-temperature dependence of nitrogen dissociation in 915 MHz ECR plasma

Itagaki, N., Iwata, S., Muta, K., Yonesu, A., Kawakami, S., Ishii, N. & Kawai, Y., Jul 1 2003, In : Thin Solid Films. 435, 1-2, p. 259-263 5 p.

Research output: Contribution to journalConference article

Electron temperature
Nitrogen
dissociation
electron energy
Plasmas
5 Citations (Scopus)

Enhanced solid-phase growth of β-FeSi2 by pre-amorphization

Murakami, Y., Tsunoda, I., Kido, H., Kenjo, A., Sadoh, T., Miyao, M. & Yoshitake, T., May 1 2003, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 206, p. 304-307 4 p.

Research output: Contribution to journalConference article

Amorphization
solid phases
Annealing
annealing
room temperature
3 Citations (Scopus)

Enhancement of bulk nucleation in a-Si1-xGex on SiO2 for low-temperature solid-phase crystallization

Sadoh, T., Tsunoda, I., Nagata, T., Kenjo, A. & Miyao, M., Mar 3 2003, In : Thin Solid Films. 427, 1-2, p. 96-100 5 p.

Research output: Contribution to journalConference article

Crystallization
solid phases
Nucleation
nucleation
crystallization
9 Citations (Scopus)

Etching characteristics of SiO2 irradiated with focused ion beam

Sadoh, T., Eguchi, H., Kenjo, A. & Miyao, M., May 1 2003, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 206, p. 478-481 4 p.

Research output: Contribution to journalConference article

Focused ion beams
Etching
ion beams
etching
dosage
8 Citations (Scopus)

Ion-beam irradiation effect on solid-phase growth of β-FeSi2

Murakami, Y., Kido, H., Kenjo, A., Sadoh, T., Yoshitake, T. & Miyao, M., Mar 1 2003, In : Physica E: Low-Dimensional Systems and Nanostructures. 16, 3-4, p. 505-508 4 p.

Research output: Contribution to journalConference article

Ion beams
solid phases
Amorphization
ion beams
Irradiation

Position control of nucleation in solid-phase crystallization of a-Si/SiO2 by Ge layer insertion

Sadoh, T., Nagatomo, K., Tsunoda, I., Kenjo, A. & Miyao, M., Dec 1 2003, In : Materials Research Society Symposium - Proceedings. 796, p. 39-43 5 p.

Research output: Contribution to journalConference article

Position control
Crystallization
solid phases
insertion
Nucleation

Relaxation process of ion irradiation defects in IV-semiconductors

Murakami, Y., Miyata, M., Kenjo, A., Sadoh, T. & Miyao, M., Sep 15 2003, In : Materials Science and Engineering B: Solid-State Materials for Advanced Technology. 102, 1-3, p. 362-365 4 p.

Research output: Contribution to journalConference article

Relaxation processes
Ion bombardment
ion irradiation
Semiconductor materials
dosage
2002

500°C formation of poly-Si1-xGex (x ≥ 0.5) on SiO2 by ion-beam stimulated solid phase crystallization

Tsunoda, I., Kanno, H., Kenjo, A., Sadoh, T. & Miyao, M., Dec 1 2002, In : Materials Research Society Symposium - Proceedings. 744, p. 501-505 5 p.

Research output: Contribution to journalConference article

Crystallization
stimulation
Ion beams
solid phases
ion beams

Metal-induced low-temperature crystallization of amorphous SiGe on insulating films

Miyao, M., Kanno, H., Tsunoda, I., Sadoh, T. & Kenjo, A., Dec 1 2002, In : Materials Research Society Symposium - Proceedings. 744, p. 55-59 5 p.

Research output: Contribution to journalConference article

Crystallization
Metals
dendrites
crystallization
metals
24 Citations (Scopus)

Nucleation and subsequent growth of clusters in reactive plasmas

Watanabe, Y., Shiratani, M. & Koga, K., Jan 1 2002, In : Plasma Sources Science and Technology. 11, 3 A

Research output: Contribution to journalConference article

nucleation
gas flow
reactors
gas temperature
dilution
2001
2 Citations (Scopus)
Plasma CVD
reactors
vapor deposition
Gases
Silanes
4 Citations (Scopus)

Dose rate dependence of ion-induced-damage in Si evaluated by spectroscopic ellipsometry

Murakami, Y., Yamauchi, H., Sadoh, T., Kenjo, A. & Miyao, M., Jan 1 2001, In : Solid State Phenomena. 78-79, p. 341-344 4 p.

Research output: Contribution to journalConference article

Spectroscopic ellipsometry
ellipsometry
Ions
damage
dosage
16 Citations (Scopus)

High density recording capability for advanced particulate media

Suzuki, T., Tanaka, T. & Ikemizu, K., Oct 1 2001, In : Journal of Magnetism and Magnetic Materials. 235, 1-3, p. 159-164 6 p.

Research output: Contribution to journalConference article

particulates
recording
Particle size
Ferrite
Thermodynamic stability
5 Citations (Scopus)

Investigation of ECR plasma uniformity from the point of view of production and confinement

Itagaki, N., Yoshizawa, T., Ueda, Y. & Kawai, Y., May 15 2001, In : Thin Solid Films. 386, 2, p. 152-159 8 p.

Research output: Contribution to journalConference article

Electron cyclotron resonance
electron cyclotron resonance
Plasmas
Refraction
refraction
2 Citations (Scopus)

MR measurement of sub-micron scale relief structures fabricated in GMR materials

Matsuyama, K., Nozaki, Y. & Misumi, T., Jul 1 2001, In : IEEE Transactions on Magnetics. 37, 4 I, p. 2114-2116 3 p.

Research output: Contribution to journalConference article

Magnetoresistance
Magnetization
magnetization
Magnetic devices
Sandwich structures
1 Citation (Scopus)

Sub-micron GMR sensors with vertically integrated hard magnet biasing applicable for high temperature operation

Matsuo, K., Matsuyama, K. & Nozaki, Y., Jul 1 2001, In : IEEE Transactions on Magnetics. 37, 4 I, p. 2001-2003 3 p.

Research output: Contribution to journalConference article

High temperature operations
Electron beam lithography
Magnets
Multilayers
Anisotropy
2000
1 Citation (Scopus)

Deposition of smooth thin Cu films in deep submicron trench by plasma CVD reactor with H atom source

Shiratani, M., Hong Jie Jin, J. J., Nakatake, Y., Koga, K., Kinoshita, T. & Watanabe, Y., Dec 1 2000, In : Materials Research Society Symposium - Proceedings. 612

Research output: Contribution to journalConference article

Plasma CVD
reactors
vapor deposition
Atoms
Irradiation
1 Citation (Scopus)

ECR plasma oxidation: Dependence on energy of argon ion

Matsuo, S., Yamamoto, M., Sadoh, T., Tsurushima, T., Gao, D. W., Furukawa, K. & Nakashima, H., Dec 1 2000, In : Materials Research Society Symposium - Proceedings. 585, p. 171-176 6 p.

Research output: Contribution to journalConference article

Electron cyclotron resonance
Argon
electron cyclotron resonance
argon
Ions

Methods of suppressing cluster growth in silane RF discharges

Shiratani, M., Maeda, S., Matsuoka, Y., Tanaka, K., Koga, K. & Watanabe, Y., Dec 1 2000, In : Materials Research Society Symposium - Proceedings. 609

Research output: Contribution to journalConference article

Silanes
silanes
Discharge (fluid mechanics)
Thermal gradients
Gases

Selective writing of sub-μm2 domain in spin valve strip with current coincident scheme

Matsuyama, K., Murashima, N., Higashidani, M. & Nozaki, Y., Sep 1 2000, In : IEEE Transactions on Magnetics. 36, 5 I, p. 2767-2769 3 p.

Research output: Contribution to journalConference article

strip
Nucleation
Induced currents
conductors
nucleation