Research Output 1982 2020

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2003
2 Citations (Scopus)

Anomalous leakage current in silicon oxynitride thin films grown by microwave excited nitrogen plasma nitridation

Perera, R., Ikeda, A., Hattori, R. & Kuroki, Y., Oct 20 2003, p. 1084-1087. 4 p.

Research output: Contribution to conferencePaper

Nitrogen plasma
Nitridation
nitrogen plasma
oxynitrides
Silicon