Research output per year
Research output per year
Research output
- 1 Article
Search results
-
2021
Atomic layer deposition of aluminum (111) thin film by dimethylethylaminealane precursor
Okasha, S., Sekine, Y., Sasaki, S. & Harada, Y., Aug 31 2021, In: Thin Solid Films. 732, 138784.Research output: Contribution to journal › Article › peer-review
1 Citation (Scopus)