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KOINE Project Division
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Profiles
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Research output
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Research output
Research output per year
2021
2021
2021
1
Article
Research output per year
Research output per year
1 results
Publication Year, Title
(descending)
Publication Year, Title
(ascending)
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Article
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2021
Atomic layer deposition of aluminum (111) thin film by dimethylethylaminealane precursor
Okasha, S.
,
Sekine, Y.
,
Sasaki, S.
&
Harada, Y.
,
Aug 31 2021
,
In:
Thin Solid Films.
732
, 138784.
Research output
:
Contribution to journal
›
Article
›
peer-review
Atomic layer deposition
100%
Atomic Layer Epitaxy
75%
atomic layer epitaxy
67%
Thin films
61%
Aluminum
50%
1
Citation (Scopus)