Research output per year
Research output per year
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Dive into the research topics where Manufacturing Process is active. These topic labels come from the works of this organisation's members. Together they form a unique fingerprint.
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Research output
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Characteristic of SiC Slurry in Ultra Precision Lapping of Sapphire Substrates
Yin, T., Wang, Z. D., Doi, T., Kurokawa, S., Tan, Z., Ding, X. K. & Lin, H., Jun 2021, In: International Journal of Precision Engineering and Manufacturing. 22, 6, p. 1021-1029 9 p.Research output: Contribution to journal › Article › peer-review
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Effect of using high-pressure gas atmosphere with UV photocatalysis on the CMP characteristics of a 4H-SiC substrate
Yin, T., Zhao, P., Doi, T., Kurokawa, S. & Jiang, J., Feb 2021, In: ECS Journal of Solid State Science and Technology. 10, 2, 024010.Research output: Contribution to journal › Article › peer-review
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Spindle with built-in acoustic emission sensor to realize contact detection
Murakami, H., Katsuki, A., Sajima, T., Uchiyama, K., Houda, K. & Sugihara, Y., Jul 2021, In: Precision Engineering. 70, p. 26-33 8 p.Research output: Contribution to journal › Article › peer-review