Research Output 1989 2020

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2012
5 Citations (Scopus)

Residual stress of hoop-Wound CFRP composites manufactured with simultaneous heating

Tabuchi, D., Sajima, T., Doi, T., Onikura, H., Ohnishi, O., Kurokawa, S. & Miura, T., 2012, In : Sensors and Materials. 24, 2, p. 99-111 13 p.

Research output: Contribution to journalArticle

hoops
carbon fiber reinforced plastics
Carbon fiber reinforced plastics
residual stress
Residual stresses
10 Citations (Scopus)

Study on fabrication of micrometer patterned ceramic sheet with micro powder imprinting (μPI) method

Xu, Y., Tsumori, F., Kang, H. G. & Miura, H., Jun 2012, In : Advanced Science Letters. 12, p. 170-173 4 p.

Research output: Contribution to journalArticle

imprinting
Ceramics
Powder
ceramics
Powders

The polishing technology for glass substrates using tribo-chemical reaction and electrical slurry control

Ikeda, H., Akagami, Y., Uneda, M., Ohnishi, O., Kurokawa, S. & Doi, T. K., Feb 29 2012, In : Journal of the Electrochemical Society. 159, 4

Research output: Contribution to journalArticle

Polishing
polishing
Chemical reactions
chemical reactions
Glass
3 Citations (Scopus)

Wear resistance of coating films on hob teeth (Intermittent cutting tests with a flytool)

Umezaki, Y., Funaki, Y., Kurokawa, S., Ohnishi, O. & Doi, T., Feb 27 2012, In : Journal of Advanced Mechanical Design, Systems and Manufacturing. 6, 2, p. 206-221 16 p.

Research output: Contribution to journalArticle

Wear resistance
Coatings
Wear of materials
Abrasion
Oxidation
2011
5 Citations (Scopus)

Analysis of chemical and mechanical factors in CMP processes for improving material removal rate

Tamai, K., Morinaga, H., Doi, T. K., Kurokawa, S. & Ohnishi, O., 2011, In : Journal of the Electrochemical Society. 158, 3

Research output: Contribution to journalArticle

Industrial Oils
machining
abrasives
friction
Abrasives
5 Citations (Scopus)

Application of MIM process for Nickel base superalloy

Ikeda, H., Iwahashi, T., Osada, T. & Miura, H., Jan 1 2011, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 1, p. 33-37 5 p.

Research output: Contribution to journalArticle

Metal molding
Nickel
Superalloys
Injection molding
Powders

Basic studies on tungsten-CMP slurry recycle

Funakoshi, T., Ojima, S., Ishii, K., Doi, T., Kurokawa, S. & Ohnishi, O., Jan 1 2011, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 77, 4, p. 388-393 6 p.

Research output: Contribution to journalArticle

Chemical mechanical polishing
Tungsten
Metals
Water
Processing
2 Citations (Scopus)

CMP characteristics and mechanisms of glass substrate by both conventional cerium oxide (CeO2) slurry and new manganese oxide slurry for replacing CeO2 abrasive

Yamazaki, T., Doi, T. K., Kurokawa, S., Ohnishi, O., Uneda, M., Umezaki, Y., Yamaguchi, Y. & Kishii, S., Jan 1 2011, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 77, 10, p. 960-965 6 p.

Research output: Contribution to journalArticle

Manganese oxide
Cerium
Abrasives
Glass
Oxides
4 Citations (Scopus)

Comparison of quartz and silicon as a master mold substrate for patterned media UV-NIL replica process

Hoga, M., Itoh, K., Ishikawa, M., Kuwahara, N., Fukuda, M., Toyama, N., Kurokawa, S. & Doi, T., Aug 1 2011, In : Microelectronic Engineering. 88, 8, p. 1975-1977 3 p.

Research output: Contribution to journalArticle

Nanoimprint lithography
Quartz
Hard disk storage
Silicon
replicas
2 Citations (Scopus)

Development of a Filament-winding machine based on internal heating by a high-temperature fluid for composite vessels

Tabuchi, D., Sajima, T., Doi, T., Onikura, H., Ohnishi, O., Kurokawa, S. & Miura, T., 2011, In : Sensors and Materials. 23, 6, p. 347-358 12 p.

Research output: Contribution to journalArticle

filament winding
high temperature fluids
Winding machines
Filament winding
carbon fiber reinforced plastics
Polishing
Abrasives
Electric fields
Glass
Substrates
1 Citation (Scopus)

Development of a laser-guided deep-hole evaluating system

Katsuki, A., Onikura, H., Sajima, T., Murakami, H., Doi, T., Sato, T., Nishi, H., Pietri, V. & Ali, M. H., Jan 1 2011, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 77, 10, p. 977-984 8 p.

Research output: Contribution to journalArticle

Units of measurement
Lasers
Skids
Prisms
Interferometers
Chemical mechanical polishing
polishing
Oxides
simulators
isolation
15 Citations (Scopus)

Development of a practical high-performance laser-guided deep-hole boring tool: Improvement in guiding strategy

Katsuki, A., Onikura, H., Sajima, T., Mohri, A., Moriyama, T., Hamano, Y. & Murakami, H., Apr 1 2011, In : Precision Engineering. 35, 2, p. 221-227 7 p.

Research output: Contribution to journalArticle

Boring tools
Lasers
Boring
Aluminum copper alloys
Piezoelectric actuators
1 Citation (Scopus)
Alloy steel
Gears
Fatigue of materials
Microstructure
Steel
16 Citations (Scopus)

Effects of resist thickness and viscoelasticity on the cavity filling capability in bilayer thermal embossing

Xu, Y., Tsumori, F., Toyooka, T., Kotera, H. & Miura, H., Jun 2011, In : Japanese Journal of Applied Physics. 50, 6 PART 2, 06GK11.

Research output: Contribution to journalArticle

embossing
viscoelasticity
Viscoelasticity
cavities
Polymethyl methacrylates
Gears
Helical gears
Bevel gears
Spur gears
Gear teeth
17 Citations (Scopus)

Fabrication of micro patterned ceramic structure by imprinting process

Xu, Y., Tsumori, F., Kang, H. G. & Miura, H., Nov 1 2011, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 11, p. 673-678 6 p.

Research output: Contribution to journalArticle

Sintering
Fabrication
Yttria stabilized zirconia
Solid oxide fuel cells (SOFC)
Powders
2 Citations (Scopus)

Fabrication of porous structured WC-Co alloy compacts by indirect laser forming

Kang, H., Ishii, T., Tsumori, F. & Miura, H., Jul 1 2011, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 7, p. 436-441 6 p.

Research output: Contribution to journalArticle

Fabrication
Lasers
Binders
Liquid phase sintering
Feedstocks
2 Citations (Scopus)

Fabrication of super-elastic Ti-10V-2Fe-3Al alloy compacts by MIM process

Sagara, K., Nishida, M., Kang, H., Tsumori, F., Miura, H. & Nakayama, H., Jun 1 2011, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 6, p. 361-366 6 p.

Research output: Contribution to journalArticle

Powders
Titanium alloys
Fabrication
Elasticity
Metal molding
4 Citations (Scopus)

Fatigue failure properties of injection molded superalloy compacts

Ikeda, H., Osada, T., Kang, H. G., Tsumori, F. & Miura, H., Nov 1 2011, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 11, p. 679-685 7 p.

Research output: Contribution to journalArticle

Superalloys
Powders
Metal molding
Fatigue of materials
Injection molding
3 Citations (Scopus)

Fatigue properties of Ti alloy compacts by metal injection molding - Part1

Noda, M., Osada, T., Tsumori, F. & Miura, H., Jun 1 2011, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 58, 6, p. 355-360 6 p.

Research output: Contribution to journalArticle

Metal molding
Titanium
Titanium alloys
Injection molding
Fatigue of materials

Improvement of CFRP pipe's burst strength with SPWC method

Miura, T., Tabuchi, D., Sajima, T., Ohnishi, O., Onikura, H., Doi, T. & Kurokawa, S., Jan 1 2011, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 77, 9, p. 856-860 5 p.

Research output: Contribution to journalArticle

Carbon fiber reinforced plastics
Volume fraction
Pipe
Resins
Filament winding
2 Citations (Scopus)
Iron alloys
Gear teeth
Gears
Steel
Porosity
Microphones
Acoustic waves
Processing
Acoustic noise
Vibrations (mechanical)
2 Citations (Scopus)

Quantitative evaluation of slurry flow behavior using digital image processing

Uneda, M., Murata, S., Narise, T., Yamazaki, T., Ohnishi, O., Kurokawa, S., Ishikawa, K. I. & Doi, T., Dec 1 2011, In : Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C. 77, 782, p. 3891-3903 13 p.

Research output: Contribution to journalArticle

Lapping
Image processing
Correlation methods
Brittleness
Abrasives
3 Citations (Scopus)

Study on high-speed on-machine measurement of deep-hole accuracy

Katsuki, A., Onikura, H., Sajima, T., Murakami, H., Sato, T., Caetano, T., Ali, H. & Ohnishi, O., Jan 1 2011, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 77, 7, p. 681-687 7 p.

Research output: Contribution to journalArticle

Lathes
Boring machines (machine tools)
Drilling machines (machine tools)
Machining centers
Units of measurement
3 Citations (Scopus)

Tungsten film chemical mechanical polishing using MnO2 slurry

Kishii, S., Hatada, A., Arimoto, Y., Kurokawa, S. & Doi, T. K., Jul 1 2011, In : Japanese journal of applied physics. 50, 7 PART 1, 076502.

Research output: Contribution to journalArticle

Chemical mechanical polishing
abrasives
polishing
Abrasives
Tungsten

Wear-resistance of coating films on hob cutting teeth (Intermittent cutting tests with a flytool)

Umezaki, Y., Funaki, Y., Kurokawa, S., Ohnishi, O. & Doi, T., Dec 1 2011, In : Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C. 77, 779, p. 2863-2874 12 p.

Research output: Contribution to journalArticle

Wear resistance
Coatings
Wear of materials
Oxidation
Abrasion
2010
3 Citations (Scopus)
Gears
Linewidth
Lithography
1 Citation (Scopus)

Development of a system to measure micro hole form accuracy using an optical fiber probe (2nd report) - Evaluation of a prototype of the measuring system

Murakami, H., Katsuki, A., Onikura, H., Sajima, T., Kawagoishi, N. & Kondo, E., Jan 1 2010, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 76, 8, p. 950-954 5 p.

Research output: Contribution to journalArticle

Optical fibers
Surface roughness
Fibers
Floodlighting
Scanning
1 Citation (Scopus)
Iron alloys
Gear teeth
Gears
Steel
Porosity

Effect of powder type on the rolling contact fatigue strength of 4600 sintered alloy steels

Miura, H., Tsumori, F., Nakahara, Y., Tokuoka, T. & Nishioka, T., Jun 1 2010, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 57, 6, p. 419-423 5 p.

Research output: Contribution to journalArticle

Alloy steel
Powders
Gears
Steel
Microstructure
1 Citation (Scopus)

Evaluation and analysis of distortion during MIM process of titanium alloy materials

Miura, H., Shinozaki, R., Virdhian, S. & Osada, T., May 1 2010, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 57, 5, p. 352-356 5 p.

Research output: Contribution to journalArticle

Metal molding
Titanium alloys
Injection molding
Titanium
Powders

High-densification for ferrous soft magnetic powder by metal injection molding -2nd Report

Osada, T., Tanaka, Y., Miura, H., Tokuoka, T. & Nishioka, T., Jun 1 2010, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 57, 6, p. 387-393 7 p.

Research output: Contribution to journalArticle

Metal molding
Densification
Injection molding
Powders
Magnetic properties
3 Citations (Scopus)

Improvement of the contact fatigue strength by rolling of sintered ferrous alloy rolle -2nd Report

Miura, H., Tsumori, F., Hamamoto, S., Komoto, K. & Unami, S., Jun 1 2010, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 57, 6, p. 430-434 5 p.

Research output: Contribution to journalArticle

Iron alloys
Case hardening
Fatigue damage
Powder metallurgy
Porosity
1 Citation (Scopus)

Influence of wafer edge profile on STI-CMP process performance (examination based on surface pressure of wafer calculated by FEM analysis)

Fukuda, A., Fukuda, T., Hiyama, H., Tsujimura, M., Doi, T., Kurokawa, S. & Ohnishi, O., Jan 1 2010, In : Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C. 76, 766, p. 1610-1616 7 p.

Research output: Contribution to journalArticle

Chemical mechanical polishing
Finite element method
Semiconductor materials
Bellows
Specifications
Cytidine Monophosphate
Chemical mechanical polishing
abrasives
Silicon
Polishing
Cytidine Monophosphate
Chemical mechanical polishing
abrasives
Silicon
Polishing
4 Citations (Scopus)

Nitriding response of microminiature powder injection molded titanium

Osada, T. & Miura, H., Mar 1 2010, In : International Journal of Powder Metallurgy (Princeton, New Jersey). 46, 2, p. 39-44 6 p.

Research output: Contribution to journalArticle

Nitriding
Titanium
Powders
Sintering
Furnaces
2 Citations (Scopus)

Removal rate simulation of dissolution-type electrochemical mechanical polishing

Fukuda, A., Kodera, A., Toma, Y., Suzuki, T., Hiyama, H., Doi, T., Kurokawa, S. & Ohnishi, O., Jul 1 2010, In : Japanese journal of applied physics. 49, 7 PART 1, p. 767011-767018 8 p.

Research output: Contribution to journalArticle

Polishing
polishing
dissolving
Dissolution
apertures

Research on cleaning efficiency of high pressure micro jet - Influence of different shape nozzles in cleaning efficiency

Miyachi, K., Kurokawa, S., Kawashima, S., Akenaga, H., Seike, Y., Kobayashi, Y., Ohnishi, O. & Doi, T., Jan 1 2010, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 76, 8, p. 907-911 5 p.

Research output: Contribution to journalArticle

Cleaning
Nozzles
Liquids
Nozzle design
Spray nozzles
11 Citations (Scopus)

Silicon wafer cleaning using new liquid aerosol with controlled droplet velocity and size by rotary atomizer method

Seike, Y., Miyachi, K., Shibata, T., Kobayashi, Y., Kurokawa, S. & Doi, T., Jun 1 2010, In : Japanese journal of applied physics. 49, 6 PART 1, p. 667011-667016 6 p.

Research output: Contribution to journalArticle

atomizers
Atomizers
Silicon wafers
cleaning
Aerosols
Sintering
Metals
Lasers
Microstructure
Laser beam effects
1 Citation (Scopus)

Unwoven fabric pads non-destructive conditioning by high pressure micro jet in CMP process

Miyachi, K., Kurokawa, S., Doi, T., Seike, Y., Izumikawa, S., Akama, T. & Ohnishi, O., Jan 1 2010, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 76, 9, p. 1076-1081 6 p.

Research output: Contribution to journalArticle

Silicon wafers
Textiles
Surveying
Diamonds
Experiments
2009
Cleaning
Fluids
Liquids
Latexes
Particles (particulate matter)

Causal relation between ultrasonic vibration cutting and corrosion resistance

Onikura, H., Kanda, T., Ohnishi, O. & Sajima, T., Jan 1 2009, In : Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C. 75, 757, p. 2394-2398 5 p.

Research output: Contribution to journalArticle

Vibrations (mechanical)
Corrosion resistance
Ultrasonics
Corrosion
Residual stresses
Chemical mechanical polishing
Topography
Metals
Silicon
Copper
Polishing
Abrasives
Polyurethanes
Copper
Chemical mechanical polishing
1 Citation (Scopus)

Development of a micro hole measuring system using an optical fiber probe (1st report) - Optical analysis and accuracy evaluation

Murakami, H., Katsuki, A., Onikura, H., Sajima, T. & Kondo, E., Jan 1 2009, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 75, 12, p. 1476-1481 6 p.

Research output: Contribution to journalArticle

Optical fibers
Fibers
Floodlighting
Ray tracing
Optical systems