Research Output 1989 2019

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2010
10 Citations (Scopus)

Silicon wafer cleaning using new liquid aerosol with controlled droplet velocity and size by rotary atomizer method

Seike, Y., Miyachi, K., Shibata, T., Kobayashi, Y., Kurokawa, S. & Doi, T., Jun 1 2010, In : Japanese journal of applied physics. 49, 6 PART 1, p. 667011-667016 6 p.

Research output: Contribution to journalArticle

atomizers
Atomizers
Silicon wafers
cleaning
Aerosols
Sintering
Metals
Lasers
Microstructure
Laser beam effects
1 Citation (Scopus)

Unwoven fabric pads non-destructive conditioning by high pressure micro jet in CMP process

Miyachi, K., Kurokawa, S., Doi, T., Seike, Y., Izumikawa, S., Akama, T. & Ohnishi, O., Jan 1 2010, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 76, 9, p. 1076-1081 6 p.

Research output: Contribution to journalArticle

Silicon wafers
Textiles
Surveying
Diamonds
Experiments
2009
Cleaning
Fluids
Liquids
Latexes
Particles (particulate matter)

Causal relation between ultrasonic vibration cutting and corrosion resistance

Onikura, H., Kanda, T., Ohnishi, O. & Sajima, T., Jan 1 2009, In : Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C. 75, 757, p. 2394-2398 5 p.

Research output: Contribution to journalArticle

Vibrations (mechanical)
Corrosion resistance
Ultrasonics
Corrosion
Residual stresses
Chemical mechanical polishing
Topography
Metals
Silicon
Copper
Polishing
Abrasives
Polyurethanes
Copper
Chemical mechanical polishing
Polishing
Abrasives
Polyurethanes
Copper
Chemical mechanical polishing
Polishing
Abrasives
Polyurethanes
Copper
Chemical mechanical polishing
Polishing
Abrasives
Polyurethanes
Copper
Chemical mechanical polishing
Polishing
Abrasives
Polyurethanes
Copper
Chemical mechanical polishing
1 Citation (Scopus)

Development of a micro hole measuring system using an optical fiber probe (1st report) - Optical analysis and accuracy evaluation

Murakami, H., Katsuki, A., Onikura, H., Sajima, T. & Kondo, E., Jan 1 2009, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 75, 12, p. 1476-1481 6 p.

Research output: Contribution to journalArticle

Optical fibers
Fibers
Floodlighting
Ray tracing
Optical systems
6 Citations (Scopus)

Effect of particle size of powders on the micro metal injection molding process

Osada, T., Tominaga, M. & Miura, H., May 1 2009, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 56, 5, p. 264-267 4 p.

Research output: Contribution to journalArticle

Metal molding
Injection molding
Powders
Particle size
Feedstocks
2 Citations (Scopus)

Effects of rolling on the tooth root bending fatigue strength of sintered ferrous alloy gears

Miura, H., Osada, T., Suda, N., Komoto, K., Hamamoto, S. & Unami, S., Jun 1 2009, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 56, 6, p. 344-349 6 p.

Research output: Contribution to journalArticle

Iron alloys
Gears
Porosity
Hardness
Gear teeth
2 Citations (Scopus)

Evaluation of gear engagement accuracy by Transmission Error with sub-microradian resolution

Kurokawa, S., Ariura, Y., Matsukawa, Y. & Doi, T., 2009, In : International Journal of Surface Science and Engineering. 3, 3, p. 160-177 18 p.

Research output: Contribution to journalArticle

Gears
eccentricity
evaluation
coders
test equipment
Finite difference method
Powders
Particle interactions
1 Citation (Scopus)

High-densification for ferrous soft magnetic powder by metal injection molding

Osada, T., Tanaka, Y., Miura, H., Tokuoka, T. & Nishioka, T., May 1 2009, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 56, 5, p. 248-252 5 p.

Research output: Contribution to journalArticle

Metal molding
Densification
Injection molding
Powders
Magnetic properties
1 Citation (Scopus)

Improvement of the contact fatigue strength by rolling of sintered ferrous alloy roller-1st report

Miura, H., Osada, T., Hamamoto, S., Komoto, K., Tsuchihashi, N. & Unami, S., Jun 1 2009, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 56, 6, p. 325-329 5 p.

Research output: Contribution to journalArticle

Iron alloys
Porosity
Fatigue damage
Powder metallurgy
Hardness
1 Citation (Scopus)

Past and future of CMP Technology

Doi, T. & Kurokawa, S., Jan 1 2009, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 75, 1, p. 76-77 2 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Stress analysis of dielectrics using FEM for Analyzing the cause of cracking observed after W-CMP

Fukuda, A., Mochizuki, Y., Hiyama, H., Tsujimura, M., Doi, T. & Kurokawa, S., Aug 7 2009, In : Journal of the Electrochemical Society. 156, 9

Research output: Contribution to journalArticle

Chemical mechanical polishing
Stress analysis
Finite element method
Polishing
Oxides
Chemical mechanical polishing
Copper
Metals
Erosion
Tantalum
2008
2 Citations (Scopus)
leveling
Surface Roughness
surface roughness
Surface roughness
Three-dimensional
1 Citation (Scopus)
Optical systems
Semiconductor lasers
CCD cameras
Measurement errors
Charge coupled devices
3 Citations (Scopus)
Optical systems
Ring gages
Laser beams
4 Citations (Scopus)

Development of selective laser sintering for titanium alloy powder -3rd report

Miura, H., Osada, T., Ishibashi, H., Okawachi, K., Uemura, M., Fujita, M. & Arimoto, N., Oct 1 2008, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 55, 10, p. 738-742 5 p.

Research output: Contribution to journalArticle

Titanium alloys
Powders
Sintering
Lasers
Bone
16 Citations (Scopus)

Effects of irradiance of various wavelengths from light-emitting diodes on the growth of the harmful dinoflagellate Heterocapsa circularisquama and the diatom Skeletonema costatum

Oh, S. J., Kim, D. I., Sajima, T., Shimasaki, Y., Matsuyama, Y., Oshima, Y., Honjo, T. & Yang, H. S., Feb 1 2008, In : Fisheries science. 74, 1, p. 137-145 9 p.

Research output: Contribution to journalArticle

Skeletonema costatum
Bacillariophyceae
dinoflagellate
irradiance
wavelengths
9 Citations (Scopus)

Frictional characterization of chemical-mechanical polishing pad surface and diamond conditioner wear

Yamada, Y., Kawakubo, M., Hirai, O., Konishi, N., Kurokawa, S. & Doi, T., Aug 8 2008, In : Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers. 47, 8 PART 1, p. 6282-6287 6 p.

Research output: Contribution to journalArticle

Chemical mechanical polishing
polishing
Diamonds
diamonds
Wear of materials
16 Citations (Scopus)

Optimization of MIM process for Ti-6Al-7Nb alloy powder

Osada, T., Miura, H., Itoh, Y., Fujita, M. & Arimoto, N., Oct 1 2008, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 55, 10, p. 726-731 6 p.

Research output: Contribution to journalArticle

Powders
Metal molding
Mechanical properties
Vanadium
Biocompatible Materials
5 Citations (Scopus)

Study on factors in time-dependent dielectric breakdown degradation of Cu/low-k integration related to Cu chemical-mechanical polishing

Yamada, Y., Konishi, N., Noguchi, J., Jimbo, T., Kurokawa, S. & Doi, T., Jun 13 2008, In : Japanese journal of applied physics. 47, 6 PART 1, p. 4469-4474 6 p.

Research output: Contribution to journalArticle

Chemical mechanical polishing
Electric breakdown
polishing
breakdown
degradation
5 Citations (Scopus)

Tribological behavior of metal CMP and detection of process abnormality

Yamada, Y., Kawakubo, M., Hirai, O., Konishi, N., Kurokawa, S. & Doi, T., 2008, In : Journal of the Electrochemical Society. 155, 8

Research output: Contribution to journalArticle

Chemical mechanical polishing
abnormalities
polishing
Metals
metals
2007
Optical systems
Laser beams
Lenses
Experiments
Function evaluation
2006
2 Citations (Scopus)

Size effects of gas nitriding of injection molded Titanium parts

Osada, T., Tanaka, S., Nishiyabu, K. & Miura, H., Sep 1 2006, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 53, 9, p. 745-749 5 p.

Research output: Contribution to journalArticle

Metal molding
Nitriding
Titanium
Injection molding
Gases
2005
3 Citations (Scopus)
shot
topography
arcs
evaluation
profilometers

Quality improvement of the micro metal injection molded products

Osada, T. & Tanaka, S., Apr 1 2005, In : Fenmo Yejin Jishu/Powder Metallurgy Technology. 23, 2, p. 91-94 4 p.

Research output: Contribution to journalArticle

Metals
Injection molding
2004
4 Citations (Scopus)

Evaluation on the homogeneity of feedstock for micro size parts produced by MIM

Osada, T., Nishiyabu, K., Karasaki, Y., Tanaka, S. & Miura, H., Jan 1 2004, In : Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy. 51, 6, p. 435-440 6 p.

Research output: Contribution to journalArticle

Metal molding
Injection molding
Feedstocks
Pelletizing
Weighing
17 Citations (Scopus)

Strain monitoring of braided composites by using embedded fiber-optic strain sensors

Kosaka, T., Kurimoto, H., Osaka, K., Nakai, A., Osada, T., Hamada, H. & Fukuda, T., Dec 1 2004, In : Advanced Composite Materials: The Official Journal of the Japan Society of Composite Materials. 13, 3-4, p. 157-170 14 p.

Research output: Contribution to journalArticle

Fiber optics
Monitoring
Sensors
Composite materials
Fiber reinforced plastics
2003
56 Citations (Scopus)

Initial fracture behavior of satin woven fabric composites

Osada, T., Nakai, A. & Hamada, H., Jan 1 2003, In : Composite Structures. 61, 4, p. 333-339 7 p.

Research output: Contribution to journalArticle

Composite materials
Textiles
Aspect ratio
Cracks
Geometry
2001
40 Citations (Scopus)
Topography
derivation
manufacturing
topography
deviation

Fabrication of EB cured textile composites (I) - Effect of total dose on mechanical properties of plain woven fabric composites

Osada, T., Mizoguchi, M., Nakai, A., Hamada, H. & Ochi, M., Jan 1 2001, In : Journal of Fiber Science and Technology. 57, 11, p. 311-316 6 p.

Research output: Contribution to journalArticle

Electron beams
Textiles
Fabrication
Mechanical properties
Composite materials
7 Citations (Scopus)

Mechanical properties of flat braided composite with flexible interphase

Nakai, A., Ohtani, A., Ohki, T., Osada, T., Iwamoto, M., Hamada, H. & Takeda, N., Jan 1 2001, In : Composite Interfaces. 7, 5-6, p. 399-410 12 p.

Research output: Contribution to journalArticle

braided composites
mechanical properties
Mechanical properties
bundles
Fibers
7 Citations (Scopus)

Role of surface treatment in textile composites

Nakai, A., Osada, T., Hamada, H. & Takeda, N., Jan 1 2001, In : Composites Part A: Applied Science and Manufacturing. 32, 3-4, p. 487-498 12 p.

Research output: Contribution to journalArticle

Surface treatment
Textiles
Fibers
Composite materials
Textile processing
2000

3-dimensional profile measurement using virtual slit Moiré method by line laser

Yoshitomi, K., Onikura, H. & Sajima, T., Jan 1 2000, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 66, 3, p. 441-445 5 p.

Research output: Contribution to journalArticle

Machining
Lasers
Plastics molding
Image processing
Chemical analysis
6 Citations (Scopus)

Development of a high-performance laser-guided deep-hole boring tool: Optimal determination of reference origin for precise guiding

Katsuki, A., Onikura, H., Sajima, T., Takei, T. & Thiele, D., Jan 1 2000, In : Precision Engineering. 24, 1, p. 9-14 6 p.

Research output: Contribution to journalArticle

Boring tools
Boring
Lasers
Aluminum copper alloys
Jigs
1998

Automatic drill wear measurement using colour image processing and artificial neural network

Bopp, U., Sajima, T. & Onikura, H., Jan 1 1998, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 64, 7, p. 1040-1044 5 p.

Research output: Contribution to journalArticle

Color image processing
Wear of materials
Neural networks
Surface roughness
Drilling
1997
5 Citations (Scopus)

Automatic drill wear measurement using colour image processing and artificial neural network

Bopp, U., Sajima, T. & Onikura, H., Dec 1997, In : International Journal of the Japan Society for Precision Engineering. 31, 4, p. 287-292 6 p.

Research output: Contribution to journalArticle

Color image processing
Wear of materials
Neural networks
Surface roughness
Drilling
9 Citations (Scopus)

Development of a high-performance deep-hole laser-guided boring tool: Guiding characteristics

Katsuki, A., Onikura, H., Sajima, T. & Rikimaru, M., Jan 1 1997, In : CIRP Annals - Manufacturing Technology. 46, 1, p. 319-323 5 p.

Research output: Contribution to journalArticle

Boring tools
Lasers
Aluminum copper alloys
Boring
Piezoelectric actuators
13 Citations (Scopus)

Rolling of T-shaped profiled strip by the satellite mill

Utsunomiya, H., Saito, Y., Hayashi, T. & Sakai, T., Jan 1 1997, In : Journal of Materials Engineering and Performance. 6, 3, p. 319-325 7 p.

Research output: Contribution to journalArticle

Satellites
Elongation
Rolling mills
Aluminum
Buckling
1996
4 Citations (Scopus)

Development of a deep-hole laser-guided boring tool using piezoelectric translators

Katsuki, A., Onikura, H., Sajima, T., Yamashita, Y., Ide, N., Saisho, K. & Ikeda, K., Jan 1 1996, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 62, 7, p. 994-998 5 p.

Research output: Contribution to journalArticle

Boring tools
Lasers
Argon lasers
Aluminum copper alloys
Experiments