Research Output 1989 2019

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Review article
2018
Semiconductor materials
Data storage equipment
2012

For making important contribution to progress and expansion on technology, academia, and industry

Hiyama, H., Kondo, S. & Kurokawa, S., Jan 1 2012, In : Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering. 78, 10, p. 833-835 3 p.

Research output: Contribution to journalReview article

Bearing pads
Chemical mechanical polishing
Semiconductor materials
Industry