Hayashi, T.,
Imamura, H.,
Nishiyama, K.,
Shintaku, H.,
Kotera, H.,
Miura, T. &
Yokokawa, R.,
Jan 1 2015,
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS). 2015-February,
February,
p. 476-479 4 p., 7050995.
Research output: Contribution to journal › Conference article › peer-review