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Research Output 1982 2018

  • 500 Citations
  • 10 h-Index
  • 42 Article
  • 18 Conference contribution
  • 7 Conference article
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Conference contribution
2018

A 10 Hz Short-Pulse CO 2 Laser System for Extreme Ultraviolet Source

Amano, R., Dinh, T. H., Sasanuma, A., Arai, G., Fujii, Y., Takahashi, A., Nakamura, D., Okada, T., Miura, T. & Higashiguchi, T., Jan 1 2018, X-Ray Lasers 2016 - Proceedings of the 15th International Conference on X-Ray Lasers. Kawachi, T., Bulanov, S. V., Daido, H. & Kato, Y. (eds.). Springer Science and Business Media, LLC, p. 367-371 5 p. (Springer Proceedings in Physics; vol. 202).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

pulses
lasers
power amplifiers
repetition
pulse duration
2015

Development of short pulse CO2 laser for efficient rare earth plasma extreme ultraviolet sources

Amano, R., Dinh, T. H., Sasanuma, A., Arai, G., Fujii, Y., Nanto, K., Takahashi, A., Nakamura, D., Okada, T., Makimura, T., Miura, T., Endo, A., Mocek, T., Dunne, P., O'Sullivan, G. & Higashiguchi, T., Nov 9 2015, 2015 IEEE Photonics Conference, IPC 2015. Institute of Electrical and Electronics Engineers Inc., p. 78-79 2 p. 7323554. (2015 IEEE Photonics Conference, IPC 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rare earth elements
Rare earths
Laser pulses
Plasmas
2013

Ablation process of PMMA induced by irradiation with laser plasma EUV light

Sugiura, N., Torii, S., Makimura, T., Ichinosawa, Y., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H. & Murakami, K., Oct 18 2013, 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 6600550. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polymethyl Methacrylate
Ablation
laser plasmas
ablation
Irradiation

Micromachining of polydimethylsiloxane using EUV light

Fukami, S., Torii, S., Makimura, T., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H. & Murakami, K., Oct 18 2013, 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 6600551. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Micromachining
Polydimethylsiloxane
micromachining
Chemical modification
radiant flux density
1 Citation (Scopus)

Responses of organic and inorganic materials to intense EUV radiation from laser-produced plasmas

Makimura, T., Torii, S., Nakamura, D., Takahashi, A., Okada, T., Niino, H. & Murakami, K., Aug 1 2013, Damage to VUV, EUV, and X-Ray Optics IV; and EUV and X-Ray Optics: Synergy Between Laboratory and Space III. 877706. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8777).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser-produced Plasma
Laser produced plasmas
Micromachining
inorganic materials
organic materials
2011

Micromachining of polydimethylsiloxane induced by laser plasma EUV light

Torii, S., Makimura, T., Okazaki, K., Nakamura, D., Takahashi, A., Okada, T., Niino, H. & Murakami, K., Jul 25 2011, Damage to VUV, EUV, and X-Ray Optics III. 807714. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8077).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser Plasma
Micromachining
Polydimethylsiloxane
micromachining
laser plasmas
1 Citation (Scopus)

Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining

Makimura, T., Torii, S., Okazaki, K., Nakamura, D., Takahashi, A., Niino, H., Okada, T. & Murakami, K., Jul 25 2011, Damage to VUV, EUV, and X-Ray Optics III. 80770F. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8077).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser Plasma
Block Copolymers
Micromachining
Ablation
micromachining
2010

Sub-wavelength micromachining of silica glass by irradiation of infrared laser with Fresnel diffraction

Okazaki, K., Nakamura, D., Okada, T., Niino, H., Torii, S., Makimura, T., Murakami, K. & Takahashi, A., 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 1905-1908 4 p. 5686422

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Infrared lasers
Micromachining
Fused silica
Diffraction
Irradiation
2009

Diagnostics of ablation dynamics of tin micro-droplet for EUV lithography light source

Nakamura, D., Okazaki, K., Akiyama, T., Toya, K., Takahashi, A., Okada, T., Yanagida, T., Ueno, Y., Sasaki, Y., Suganuma, T., Nakano, M., Komori, H., Sumitani, A. & Endo, A., Dec 10 2009, CLEO/Pacific Rim 2009 - 8th Pacific Rim Conference on Lasers and Electro-Optics. 5292242. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Extreme ultraviolet lithography
Tin
Ablation
ablation
Light sources

Diagnostics of ablation dynamics of Tin micro-Droplet for EUV lithography light source

Nakamura, D., Okazaki, K., Akiyama, T., Toya, K., Takahashi, A., Okada, T., Yanagida, T., Ueno, Y., Sasaki, Y., Suganuma, T., Nakano, M., Komori, H., Sumitani, A. & Endo, A., Dec 1 2009, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2009. (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Extreme ultraviolet lithography
Ablation
Tin
ablation
Light sources
2008

Debris generation from CO2 and Nd:YAG laser-produced tin plasmas for EUV light source

Nakamura, D., Tamaru, K., Akiyama, T., Takahashi, A. & Okada, T., Jun 17 2008, Photon Processing in Microelectronics and Photonics VII. 687909. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6879).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Extreme ultraviolet lithography
Extreme Ultraviolet Lithography
Nd:YAG Laser
Tin
debris
2007

Laser-imaging diagnostics of debris behavior from laser-produced tin plasma for EUV light sources

Nakamura, D., Tanaka, H., Hashimoto, Y., Tamaru, K., Takahashi, A. & Okada, T., May 18 2007, Photon Processing in Microelectronics and Photonics VI. 645808. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 6458).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tin
neutral atoms
debris
Debris
Ultraviolet

Laser-imaging of laser-produced tin plume behavior for EUV light source

Nakamura, D., Hashimoto, Y., Tamaru, K., Takahashi, A. & Okada, T., Dec 1 2007, 2007 Conference on Lasers and Electro-Optics - Pacific Rim, CLEO/PACIFIC RIM. 4391455. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tin
laser induced fluorescence
plumes
Light sources
tin

Laser-imaging of laser-produced tin plume behavior for EUV light source

Nakamura, D., Hashimoto, Y., Tamaru, K., Takahashi, A. & Okada, T., Jan 1 2007, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

laser induced fluorescence
Tin
plumes
Light sources
tin

Production of Sn-droplets as a target of laser-produced plasma for debris-free EUV light source

Tamaru, K., Nakamura, D., Takahashi, A. & Okada, T., Jan 1 2007, Conference on Lasers and Electro-Optics/Pacific Rim, CLEOPR 2007. Optical Society of America, (Optics InfoBase Conference Papers).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Laser produced plasmas
laser plasmas
debris
Debris
Light sources
2005

Development of visualization system of neutral particles generated from laser-produced plasma for EUV light source

Matsumoto, A., Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., Dec 1 2005, Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005. p. 1500-1501 2 p. 1569794. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

neutral particles
Rayleigh scattering
electromagnetic absorption
laser plasmas
ultraviolet radiation

Direct comparison of emission characteristics of extreme ultraviolet radiation from CO2 and Nd:YAG laser-produced plasmas with solid tin target

Tanaka, H., Matsumoto, A., Akinaga, K., Takahashi, A. & Okada, T., Dec 1 2005, International Quantum Electronics Conference 2005. p. 1151-1152 2 p. 1561042. (IQEC, International Quantum Electronics Conference Proceedings; vol. 2005).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

extreme ultraviolet radiation
laser plasmas
YAG lasers
tin
2001

Ar2 excimer emission from laser-heated plasma

Takahashi, A., Okada, T., Maeda, M., Uchino, K., Nishisaka, T., Sumitani, A. & Mizoguchi, H., 2001, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest. Vol. 1.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

excimers
laser plasmas
pumps
gases
laser beams