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Research Output 1982 2018

  • 495 Citations
  • 10 h-Index
  • 41 Article
  • 18 Conference contribution
  • 7 Conference article
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Conference article
2009
4 Citations (Scopus)

Dynamics of debris from laser-irradiated Sn droplet for EUV lithography light source

Okazaki, K., Nakamura, D., Akiyama, T., Toya, K., Takahashi, A. & Okada, T., May 25 2009, In : Proceedings of SPIE - The International Society for Optical Engineering. 7201, 72010T.

Research output: Contribution to journalConference article

Extreme ultraviolet lithography
Extreme Ultraviolet Lithography
debris
Debris
Droplet
2008
5 Citations (Scopus)

Comparative study on EUV and debris emission from CO 2 and Nd: YAG laser-produced tin plasmas

Takahashi, A., Nakamura, D., Tamaru, K., Akiyama, T. & Okada, T., Jun 12 2008, In : Journal of Physics: Conference Series. 112, Part 4, 042059.

Research output: Contribution to journalConference article

debris
YAG lasers
tin
lithography
lasers
2004
3 Citations (Scopus)

Development of EUV light source by CO2 laser-produced plasma with nano-structured SnO2 targets

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., Dec 1 2004, In : Proceedings of SPIE - The International Society for Optical Engineering. 5662, p. 313-318 6 p., 49.

Research output: Contribution to journalConference article

Laser-produced Plasma
Laser produced plasmas
CO2 Laser
laser plasmas
Light sources
4 Citations (Scopus)

Development of EUV light source by CO2 laser-produced Xe plasma

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., Dec 1 2004, In : Proceedings of SPIE - The International Society for Optical Engineering. 5662, p. 361-366 6 p., 57.

Research output: Contribution to journalConference article

Laser-produced Plasma
Laser produced plasmas
CO2 Laser
Ultraviolet
ultraviolet radiation
11 Citations (Scopus)

Emission characteristics of EUV light source by CO2 laser-produced Xe and Sn plasma

Tanaka, H., Akinaga, K., Takahashi, A. & Okada, T., Dec 1 2004, In : Proceedings of SPIE - The International Society for Optical Engineering. 5448, PART 2, p. 737-748 12 p., 83.

Research output: Contribution to journalConference article

Laser produced plasmas
CO2 Laser
Ultraviolet
ultraviolet radiation
Light sources
2003

Spectral dynamics analysis of ultra-line-narrowed F2 laser

Kumazaki, T., Wakabayashi, O., Nohdomi, R., Ariga, T., Watanabe, H., Hotta, K., Mizoguchi, H., Tanaka, H., Takahashi, A. & Okada, T., Oct 1 2003, In : Proceedings of SPIE - The International Society for Optical Engineering. 5040 III, p. 1363-1370 8 p.

Research output: Contribution to journalConference article

Spectral Analysis
Dynamic Analysis
Dynamic analysis
Laser
Lasers
1991

Thomson scattering diagnostics of discharge plasmas in an excimer laser

Yamakoshi, H., Kato, M., Kubo, Y., Enokizono, H., Uchino, K., Muraoka, K., Takahashi, A. & Maeda, M., Jan 1 1991, In : Proceedings of SPIE - The International Society for Optical Engineering. 1397, pt 1, p. 119-122 4 p.

Research output: Contribution to journalConference article

Excimer Laser
Thomson scattering
Excimer lasers
excimer lasers
plasma jets