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Fingerprint Dive into the research topics where Hiroshi Ikenoue is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 5 Similar Profiles
Laser beam effects Engineering & Materials Science
Excimer lasers Engineering & Materials Science
Lasers Engineering & Materials Science
Annealing Engineering & Materials Science
Doping (additives) Engineering & Materials Science
laser annealing Physics & Astronomy
excimer lasers Physics & Astronomy
Thin film transistors Engineering & Materials Science

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Research Output 2009 2019

Formation of low resistance contacts to p-type 4H-SiC using al-film source laser doping

Okamoto, K., Kikuchi, T., Ikeda, A., Ikenoue, H. & Asano, T., Jan 1 2019, PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology. Ribeiro, P., Raposo, M. & Andrews, D. (eds.). SciTePress, p. 294-298 5 p. (PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

low resistance
lasers
electric contacts
contact resistance
excimer lasers

Formation of low resistance contacts to p-type 4H-SiC using laser doping with an Al thin-film dopant source

Okamoto, K., Kikuchi, T., Ikeda, A., Ikenoue, H. & Asano, T., Jan 1 2019, In : Japanese Journal of Applied Physics. 58, SD, SDDF13.

Research output: Contribution to journalArticle

Open Access
low resistance
Contact resistance
Light sources
contact resistance
Doping (additives)
1 Citation (Scopus)

Formation of low resistivity layers on singlecrystalline diamond by excimer laser irradiation

Abubakr, E., Zkria, A., Katamune, Y., Ohmagari, S., Imokawa, K., Ikenoue, H. & Yoshitake, T., May 1 2019, In : Diamond and Related Materials. 95, p. 166-173 8 p.

Research output: Contribution to journalArticle

Diamond
Excimer lasers
Laser beam effects
excimer lasers
Diamonds

Formation of nanoporous SiO2 films with super-low dielectric constant by F2 laser deposition

Miyano, R., Kikuchi, T., Imokawa, K., Nakamura, D. & Ikenoue, H., Jan 1 2019, Synthesis and Photonics of Nanoscale Materials XVI. Geohegan, D. B., Dubowski, J. J. & Kabashin, A. V. (eds.). SPIE, 109070S. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10907).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

laser deposition
Dielectric Constant
SiO2
Permittivity
Partial pressure

Laser Assisted Doping of Silicon Carbide Thin Films Grown by Pulsed Laser Deposition

Paneerselvam, E., Lakshmi Narayanan, V. K., Vasa, N. J., Higashihata, M., Nakamura, D., Ikenoue, H. & Ramachandra Rao, M. S., Jun 15 2019, In : Journal of Electronic Materials. 48, 6, p. 3468-3478 11 p.

Research output: Contribution to journalArticle

Pulsed laser deposition
Silicon carbide
silicon carbides
pulsed laser deposition
Doping (additives)