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Fingerprint Dive into the research topics where Hiroshi Ikenoue is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

  • 7 Similar Profiles
Excimer lasers Engineering & Materials Science
Laser beam effects Engineering & Materials Science
Lasers Engineering & Materials Science
Doping (additives) Engineering & Materials Science
Annealing Engineering & Materials Science
excimer lasers Physics & Astronomy
laser annealing Physics & Astronomy
Thin film transistors Engineering & Materials Science

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Research Output 2009 2019

Formation of low resistance contacts to p-type 4H-SiC using al-film source laser doping

Okamoto, K., Kikuchi, T., Ikeda, A., Ikenoue, H. & Asano, T., Jan 1 2019, PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology. Ribeiro, P., Raposo, M. & Andrews, D. (eds.). SciTePress, p. 294-298 5 p. (PHOTOPTICS 2019 - Proceedings of the 7th International Conference on Photonics, Optics and Laser Technology).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

low resistance
lasers
electric contacts
contact resistance
excimer lasers

Formation of low resistance contacts to p-type 4H-SiC using laser doping with an Al thin-film dopant source

Okamoto, K., Kikuchi, T., Ikeda, A., Ikenoue, H. & Asano, T., Jan 1 2019, In : Japanese Journal of Applied Physics. 58, SD, SDDF13.

Research output: Contribution to journalArticle

Open Access
low resistance
Contact resistance
Light sources
contact resistance
Doping (additives)
2 Citations (Scopus)

Formation of low resistivity layers on singlecrystalline diamond by excimer laser irradiation

Abubakr, E., Zkria, A., Katamune, Y., Ohmagari, S., Imokawa, K., Ikenoue, H. & Yoshitake, T., May 1 2019, In : Diamond and Related Materials. 95, p. 166-173 8 p.

Research output: Contribution to journalArticle

Diamond
Excimer lasers
Laser beam effects
excimer lasers
Diamonds

Formation of nanoporous SiO2 films with super-low dielectric constant by F2 laser deposition

Miyano, R., Kikuchi, T., Imokawa, K., Nakamura, D. & Ikenoue, H., Jan 1 2019, Synthesis and Photonics of Nanoscale Materials XVI. Kabashin, A. V., Geohegan, D. B. & Dubowski, J. J. (eds.). SPIE, 109070S. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10907).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

laser deposition
Dielectric Constant
SiO2
Permittivity
Partial pressure

High-concentration, low-temperature, and low-cost excimer laser doping for 4h-sic power device fabrication

Imokawa, K., Kikuchi, T., Okamoto, K., Nakamura, D., Ikeda, A., Asano, T. & Ikenoue, H., Jan 1 2019, Silicon Carbide and Related Materials, 2018. Gammon, P. M., Shah, V. A., McMahon, R. A., Jennings, M. R., Vavasour, O., Mawby, P. A. & Padfield, F. (eds.). Trans Tech Publications Ltd, p. 403-406 4 p. (Materials Science Forum; vol. 963 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Excimer lasers
excimer lasers
Doping (additives)
Fabrication
fabrication