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Research Output 1982 2019

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Conference article
2014
1 Citation (Scopus)

Investigation of Al-PMA effect on Al2O3/GeOX/Ge gate stack

Nagatomi, Y., Nagaoka, Y., Yamamoto, K., Wang, D. & Nakashima, H., Jan 1 2014, In : ECS Transactions. 64, 6, p. 261-266 6 p.

Research output: Contribution to journalConference article

Metallizing
Annealing
Interface states
Energy gap
Thin films
2006
2 Citations (Scopus)

Electrical characterization of thin SOI wafers using lateral MOS transient capacitance measurements

Wang, D., Ueda, A., Takada, H. & Nakashima, H., Apr 1 2006, In : Physica B: Condensed Matter. 376-377, 1, p. 411-415 5 p.

Research output: Contribution to journalConference article

Capacitance measurement
metal oxide semiconductors
capacitors
Capacitors
capacitance
1 Citation (Scopus)

Fe gettering by p+ layer in bifacial Si solar cell fabrication

Terakawa, T., Wang, D. & Nakashima, H., Apr 1 2006, In : Physica B: Condensed Matter. 376-377, 1, p. 231-235 5 p.

Research output: Contribution to journalConference article

Solar cells
Contamination
solar cells
contamination
Fabrication
2002

A thermal dynamical boron getter (pp+ getter) in Fe-contaminated mass production of the boron diffused n+pp+ BSF bifacial silicon solar cells

Joge, T., Araki, I., Uematsu, T., Nakashima, H. & Matsukuma, K., Dec 1 2002, In : Conference Record of the IEEE Photovoltaic Specialists Conference. p. 254-257 4 p.

Research output: Contribution to journalConference article

Silicon solar cells
boron
silicon
Boron
solar cells
2000
1 Citation (Scopus)

ECR plasma oxidation: Dependence on energy of argon ion

Matsuo, S., Yamamoto, M., Sadoh, T., Tsurushima, T., Gao, D. W., Furukawa, K. & Nakashima, H., Dec 1 2000, In : Materials Research Society Symposium - Proceedings. 585, p. 171-176 6 p.

Research output: Contribution to journalConference article

Electron cyclotron resonance
Argon
electron cyclotron resonance
argon
Ions
1 Citation (Scopus)

Room temperature deposition of silicon oxynitride films with low stress using sputtering-type electron cyclotron resonance plasmas

Gao, D., Furukawa, K., Nakashima, H., Gao, J., Wang, J. & Muraoka, K., Dec 11 2000, In : Materials Research Society Symposium - Proceedings. 594, p. 457-462 6 p.

Research output: Contribution to journalConference article

Electron cyclotron resonance
Silicon
silicon
Sputtering
Plasmas
Silicon oxides
silicon oxides
Oxide films
Sputtering
oxide films
1997
3 Citations (Scopus)

Gettering of Fe by aluminum in p-type Cz silicon

Ahn, S. H., Zhao, S., Smith, A. L., Chalfoun, L. L., Platero, M., Nakashima, H. & Kimerling, L. C., Jan 1 1997, In : Materials Research Society Symposium - Proceedings. 442, p. 169-174 6 p.

Research output: Contribution to journalConference article

Silicon
Aluminum
silicon
Precipitates
solubility
1995
2 Citations (Scopus)

Recombination-enhanced migration of interstitial iron in silicon

Nakashima, H., Sadoh, T. & Tsurushima, T., Dec 1 1995, In : Materials Science Forum. 196-201, pt 3, p. 1351-1356 6 p.

Research output: Contribution to journalConference article

Hole traps
Electron traps
Boron
Silicon
Electric space charge
1994
6 Citations (Scopus)

Deep levels of vanadium- and chromium-hydrogen complexes in silicon

Sadoh, T., Watanabe, M., Nakashima, H. & Tsurushima, T., Dec 1 1994, In : Materials Science Forum. 143-4, pt 2, p. 939-944 6 p.

Research output: Contribution to journalConference article

Vanadium
Chromium
Silicon
vanadium
Hydrogen
39 Citations (Scopus)

Diffusion and electrical properties of 3d transition-metal impurity series in silicon

Nakashima, H., Sadoh, T., Kitagawa, H. & Hashimoto, K., Dec 1 1994, In : Materials Science Forum. 143-4, pt 2, p. 761-766 6 p.

Research output: Contribution to journalConference article

Deep level transient spectroscopy
electrical property
transition element
Silicon
silicon
1992

A VLSI chip set for a large scale parallel inference machine: PIM/m

Machida, H., Ando, H., Yasuda, K., Furutani, K., Nakashima, H., Takeda, Y., Nakajima, K. & Nakaya, M., Dec 1 1992, In : Proceedings of the Custom Integrated Circuits Conference. 5727431.

Research output: Contribution to journalConference article

Cache memory
Logic programming
Computer programming languages
Program processors
Hardware