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Research Output 1999 2019

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Conference contribution
2018

Cross-correlation analysis of fluctuations of interactions between nanoparticles and low pressure reactive plasmas

Zhou, R., Mori, K., Ohtomo, H., Yamashita, D., Seo, H., Itagaki, N., Koga, K. & Shiratan, M., Jan 1 2018, THERMEC 2018. Chandra, T., Ionescu, M., Shabadi, R., Richard, C. & Jeandin, M. (eds.). Trans Tech Publications Ltd, p. 2104-2108 5 p. (Materials Science Forum; vol. 941 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Beam plasma interactions
cross correlation
low pressure
Nanoparticles
Plasmas

Effects of sputtering pressure on (Zno)x(inn)1-x crystal film growth at 450ºc

Itagaki, N., Takeuchi, K., Miyahara, N., Imoto, K., Seo, H., Koga, K. & Shiratani, M., Jan 1 2018, THERMEC 2018. Shabadi, R., Chandra, T., Ionescu, M., Jeandin, M. & Richard, C. (eds.). Trans Tech Publications Ltd, p. 2093-2098 6 p. (Materials Science Forum; vol. 941 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Film growth
Crystal growth
Sputtering
sputtering
crystals

Photoluminescence of (Zno)0.82(inn)0.18 films: Incident light angle dependence

Miyahara, N., Iwasaki, K., Yamashita, D., Nakamura, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2018, THERMEC 2018. Jeandin, M., Shabadi, R., Ionescu, M., Chandra, T. & Richard, C. (eds.). Trans Tech Publications Ltd, p. 2099-2103 5 p. (Materials Science Forum; vol. 941 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photoluminescence
photoluminescence
wurtzite
Energy gap
Crystals
2017
1 Citation (Scopus)

Fluctuation of position and energy of a fine particle in plasma nanofabrication

Shiratani, M., Soejima, M., Seo, H., Itagaki, N. & Koga, K., Jan 1 2017, THERMEC 2016. Ionescu, M., Mishra, B., Kozeschnik, E., Sommitsch, C., Chandra, T. & Mishra, B. (eds.). Trans Tech Publications Ltd, p. 1772-1777 6 p. (Materials Science Forum; vol. 879).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

nanofabrication
Nanotechnology
Electrostatic force
Plasmas
Optical tweezers

Synthesis of nanoparticles using low temperature plasmas and its application to solar cells and tracers in living body

Koga, K., Seo, H., Tanaka, A., Itagaki, N. & Shiratani, M., Jan 1 2017, Plasma Nano Science and Technology. Cvelbar, U. & Mascher, P. (eds.). 3 ed. Electrochemical Society Inc., Vol. 77. p. 17-24 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Solar cells
Nanoparticles
Plasmas
Temperature
Biotechnology
2016

Inter-particle potential fluctuation of two fine particles suspended in Ar plasmas

Soejima, M., Koga, K. & Shiratani, M., Nov 21 2016, 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., p. 671-673 3 p. 7751376

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma sheaths
Plasmas
plasma potentials
plasma sheaths
collisions
2015
1 Citation (Scopus)

Comparative study on the pulmonary toxicity of indium hydroxide, indium-tin oxide, and indium oxide following intratracheal instillations into the lungs of rats

Tanaka, A., Hirata, M., Matsumura, N., Koga, K., Shiratani, M. & Kiyohara, Y., Jan 1 2015, Plasma Processing and Diagnostics for Life Sciences. Fisher, E. R., Kong, M., Weltmann, K. D. & Shiratani, M. (eds.). Materials Research Society, p. 8-13 6 p. (Materials Research Society Symposium Proceedings; vol. 1723).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Indium
Tin oxides
toxicity
indium oxides
lungs
1 Citation (Scopus)

Effects of atmospheric air plasma irradiation to seeds of radish sprouts on chlorophyll and carotenoids concentrations in their leaves

Sarinont, T., Amano, T., Koga, K., Shiratani, M. & Hayashi, N., Jan 1 2015, Plasma Processing and Diagnostics for Life Sciences. Fisher, E. R., Kong, M., Weltmann, K. D. & Shiratani, M. (eds.). Materials Research Society, p. 23-27 5 p. (Materials Research Society Symposium Proceedings; vol. 1723).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

carotenoids
chlorophylls
Chlorophyll
Carotenoids
leaves
1 Citation (Scopus)

Multigeneration effects of plasma irradiation to seeds of arabidopsis thaliana and zinnia on their growth

Sarinont, T., Amano, T., Koga, K., Shiratani, M. & Hayashi, N., Jan 1 2015, Plasma Processing and Diagnostics for Life Sciences. Fisher, E. R., Kong, M., Weltmann, K. D. & Shiratani, M. (eds.). Materials Research Society, p. 34-38 5 p. (Materials Research Society Symposium Proceedings; vol. 1723).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Seed
seeds
Irradiation
Plasmas
irradiation

ZnO-based semiconductors with tunable band gap for solar sell applications

Itagaki, N., Matsushima, K., Yamashita, D., Seo, H., Koga, K. & Shiratani, M., Jan 1 2015, Oxide-Based Materials and Devices VI. Teherani, F. H., Look, D. C. & Rogers, D. J. (eds.). SPIE, Vol. 9364. 93640P

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Carrier lifetime
Band Gap
Semiconductors
Energy gap
Semiconductor materials
2014
2 Citations (Scopus)

Nanostructure control of Si and Ge quantum dots based solar cells using plasma processes

Shiratani, M., Uchida, G., Seo, H. W., Ichida, D., Koga, K., Itagaki, N. & Kamataki, K., 2014, THERMEC 2013. Trans Tech Publications Ltd, Vol. 783-786. p. 2022-2027 6 p. (Materials Science Forum; vol. 783-786).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Semiconductor quantum dots
Nanostructures
Solar cells
solar cells
quantum dots

Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization

Itagaki, N., Matsushima, K., Yamashita, D., Seo, H., Koga, K. & Shiratani, M., Jan 1 2014, Oxide-Based Materials and Devices V. SPIE, 89871A. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8987).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sputter deposition
Aluminum Oxide
Sapphire
Buffer layers
Crystallization
2012

Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition

Shiratani, M., Hatozaki, K., Hashimoto, Y., Kim, Y., Seo, H., Kamataki, K., Uchida, G., Itagaki, N. & Koga, K., Nov 28 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2012. p. 377-382 6 p. (Materials Research Society Symposium Proceedings; vol. 1426).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

filters
soaking
cells
Amorphous silicon
amorphous silicon
3 Citations (Scopus)

Effects of atmospheric pressure dielectric barrier discharge plasma irradiation on yeast growth

Kitazaki, S., Koga, K., Shiratani, M. & Hayashi, N., Dec 1 2012, Plasma Processing and Diagnostics for Life Sciences. p. 86-91 6 p. (Materials Research Society Symposium Proceedings; vol. 1469).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

yeast
Yeast
plasma jets
Atmospheric pressure
atmospheric pressure

Influence of atmospheric pressure torch plasma irradiation on plant growth

Akiyoshi, Y., Hayashi, N., Kitazaki, S., Koga, K. & Shiratani, M., Dec 1 2012, Plasma Processing and Diagnostics for Life Sciences. p. 92-97 6 p. (Materials Research Society Symposium Proceedings; vol. 1469).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma torches
plasma torches
Atmospheric pressure
atmospheric pressure
Irradiation
7 Citations (Scopus)

In-situ measurements of cluster volume fraction in silicon thin films using quartz crystal microbalances

Kim, Y., Hatozaki, K., Hashimoto, Y., Seo, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Nov 28 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2012. p. 307-311 5 p. (Materials Research Society Symposium Proceedings; vol. 1426).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Quartz crystal microbalances
Silicon
in situ measurement
quartz crystals
microbalances
3 Citations (Scopus)

Pulmonary toxicity of indium tin oxide and copper indium gallium diselenide

Tanaka, A., Hirata, M., Koga, K., Nakano, M., Omae, K. & Kiyohara, Y., Dec 1 2012, Plasma Processing and Diagnostics for Life Sciences. p. 125-136 12 p. (Materials Research Society Symposium Proceedings; vol. 1469).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Gallium
Indium
Tin oxides
toxicity
indium oxides
6 Citations (Scopus)

Rapid growth of radish sprouts using low pressure O2 radio frequency plasma irradiation

Kitazaki, S., Koga, K., Shiratani, M. & Hayashi, N., Dec 1 2012, Plasma Processing and Diagnostics for Life Sciences. p. 61-66 6 p. (Materials Research Society Symposium Proceedings; vol. 1469).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

radio frequencies
low pressure
Irradiation
Plasmas
irradiation
2 Citations (Scopus)

The optical analysis and application of size-controllable Si quantum dots fabricated by multi-hollow discharge plasma chemical vapor deposition

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Nov 28 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2012. p. 313-318 6 p. (Materials Research Society Symposium Proceedings; vol. 1426).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

plasma jets
Semiconductor quantum dots
Chemical vapor deposition
hollow
Solar cells
2011

Generation and surface modification of Si nano-particles using SiH 4/H2 and N2 multi-hollow discharges and their application to the third generation photovoltaics

Koga, K., Uchida, G., Yamamoto, K., Sato, M., Kawashima, Y., Kamataki, K., Itagaki, N. & Shiratani, M., Dec 29 2011, International Conference on Advances in Condensed and Nano Materials, ICACNM-2011. Vol. 1393. p. 27-30 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

hollow
silicon
plasma jets
excitons
composite materials
2010

Cluster-free B-doped a-Si:H films deposited using SiH4 + B 10H14 multi-hollow discharges

Nakahara, K., Kawashima, Y., Sato, M., Matsunaga, T., Yamamoto, K., Nakamura, W. M., Yamashita, D., Matsuzaki, H., Uchida, G., Itagaki, N., Koga, K. & Shiratani, M., Dec 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2216-2218 3 p. 5686686

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Deposition rates
Plasma CVD
Optical band gaps
Surface reactions
Flow of gases
1 Citation (Scopus)

Deposition of cluster-free P-doped A-Si:H films using a multi-hollow discharge plasma CVD method

Nakahara, K., Kawashima, Y., Sato, M., Matsunaga, T., Yamamoto, K., Nakamura, W. M., Yamashita, D., Matsuzaki, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Dec 20 2010, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. p. 3722-3725 4 p. 5616514

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma CVD
Deposition rates
Flow of gases
Flow rate
Defect density
1 Citation (Scopus)

Deposition profile control of carbon films on patterned substrates using a hydrogen-assisted plasma CVD method

Nomura, T., Koga, K., Shiratani, M., Setsuhara, Y., Sekine, M. & Hori, M., Aug 30 2010, Microelectromechanical Systems - Materials and Devices III. p. 203-207 5 p. (Materials Research Society Symposium Proceedings; vol. 1222).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma CVD
Carbon films
Hydrogen
vapor deposition
Atoms

Deposition profiles of microcrystalline silicon films using multi-hollow discharge plasma CVD

Matsunaga, T., Kawashima, Y., Koga, K., Nakahara, K., Nakamura, W. M., Uchida, G., Itagaki, N., Yamashita, D., Matsuzaki, H. & Shiratani, M., 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2219-2221 3 p. 5686679

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma CVD
Microcrystalline silicon
Crystalline materials
Silicon
Substrates
1 Citation (Scopus)

Effects of amplitude modulation of rf discharge voltage on growth of nano-particles in reactive plasmas

Kamataki, K., Miyata, H., Koga, K., Uchida, G., Itagaki, N., Yamashita, D., Matsuzaki, H. & Shiratani, M., 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 1943-1947 5 p. 5686456

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Amplitude modulation
Plasmas
Electric potential
Plasma CVD

Effects of Ar addition on breakdown voltage in a Si(CH3) 2(OCH3)2 RF discharge

Uchida, G., Nunomutra, S., Miyata, H., Iwashita, S., Yamashita, D., Matsuzaki, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Dec 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2199-2201 3 p. 5686704. (IEEE Region 10 Annual International Conference, Proceedings/TENCON).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Electric breakdown
Electron emission
Ions
Discharge (fluid mechanics)
Cathodes

Effects of hydrogen dilution on electron density in multi-hollow discharges with magnetic field for A-Si:H film deposition

Koga, K., Kawashima, Y., Nakahara, K., Matsunaga, T., Nakamura, W. M. & Shiratani, M., Dec 20 2010, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. p. 3718-3721 4 p. 5616502. (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Dilution
Carrier concentration
Magnetic fields
Hydrogen
Deposition rates
11 Citations (Scopus)

Growth stimulation of radish sprouts using discharge plasmas

Kitazaki, S., Yamashita, D., Matsuzaki, H., Uchida, G., Koga, K., Shiratani, M. & Hayashi, N., 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 1960-1963 4 p. 5686474

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasmas
Irradiation
Atmospheric pressure
Seed
Oxygen

High rate deposition of cluster-suppressed amorphous silicon films deposited using a multi-hollow discharge plasma CVD

Koga, K., Sato, H., Kawashima, Y., Nakamura, W. M. & Shiratani, M., Dec 24 2010, Photovoltaic Materials and Manufacturing Issues II. p. 217-222 6 p. (Materials Research Society Symposium Proceedings; vol. 1210).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma CVD
silicon films
Deposition rates
Amorphous silicon
Discharge (fluid mechanics)
1 Citation (Scopus)

Keynote speech I: Fluctuation control for plasma nanotechnologies

Shiratani, M., Koga, K., Uchida, G., Itagaki, N. & Kamataki, K., 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. 5685920

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanotechnology
Nanostructured materials
Plasmas
Fabrication
Nanostructures
3 Citations (Scopus)

Photoluminescence of Si nanoparticles synthesized using multi-hollow discharge plasma CVD

Kawashima, Y., Yamamoto, K., Sato, M., Matsunaga, T., Nakahara, K., Yamashita, D., Matsuzaki, H., Uchida, G., Koga, K., Shiratani, M. & Kondo, M., Dec 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2222-2224 3 p. 5686677. (IEEE Region 10 Annual International Conference, Proceedings/TENCON).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma CVD
Photoluminescence
Surface defects
Nanoparticles
Excitons
5 Citations (Scopus)

Redox characteristics of amino acids using low pressure water vapor RF plasma

Akiyoshi, Y., Nakahigashi, A., Hayashi, N., Kitazaki, S., Iwao, T., Koga, K. & Shiratani, M., 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 1957-1959 3 p. 5686467

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cystines
Water vapor
Amino acids
Plasmas
Redox reactions
2 Citations (Scopus)

Si quantum dot-sensitized solar cells using Si nanoparticles produced by plasma CVD

Kawashima, Y., Yamamoto, K., Sato, M., Nakahara, K., Matsunaga, T., Nakamura, W. M., Yamashita, D., Matsuzaki, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K., Shiratani, M. & Kondo, M., Dec 20 2010, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. p. 3347-3351 5 p. 5617205. (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma CVD
Semiconductor quantum dots
Solar cells
Nanoparticles
Current density
1 Citation (Scopus)

Substrate temperature dependence of feature profile of carbon films on substrate with submicron trenches

Nomura, T., Urakawa, T., Korenaga, Y., Yamashita, D., Matsuzaki, H., Koga, K., Shiratani, M., Setsuhara, Y., Sekine, M. & Hori, M., 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2213-2215 3 p. 5686688

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Carbon films
Plasma CVD
Substrates
Temperature
Deposition rates
2007
2 Citations (Scopus)

Incorporation of higher-order silane radicals into A-SI: H films of high stability against light exposure

Shiratani, M., Iwashita, S., Bando, K., Inoue, T. & Koga, K., 2007, Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4. Vol. 2. p. 1596-1599 4 p. 4059957

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Silanes
Gases
Plasma CVD
Discharge (fluid mechanics)
Deposits

Properties of nano-crystalline silicon films for top solar cells

Iwasita, S., Inoue, T., Koga, K., Shiratani, M., Nunomura, S. & Kondo, M., Dec 1 2007, Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4. p. 1664-1667 4 p. 4059975. (Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanocrystalline silicon
Solar cells
Crystalline materials
Plasma CVD
Defect density
2006

Plasma CVD for producing Si quantum dot films

Iwashita, S., Miyahara, H., Koga, K., Shiratani, M., Nunomura, S. & Kondo, M., 2006, Proceedings of the 22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. Vol. 2. p. 558-560 3 p. 4194943

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma CVD
Semiconductor quantum dots
Crystallites
Defect density
Optical band gaps
2005

Deposition of high-quality a-Si:H by suppressing growth of a-Si clusters in SiH4 plasmas

Watanabe, Y., Shiratani, M. & Koga, K., Oct 31 2005, NEW VISTAS IN DUSTY PLASMAS: Fourth International Conference on the Physics of Dusty Plasmas. p. 105-114 10 p. (AIP Conference Proceedings; vol. 799).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

reactors
silanes
gas flow
vapor deposition
degradation
2003

High-quality a-Si: H films deposited at 0.7 NM/S by cluster suppressed plasma CVD method

Shiratani, M., Koga, K., Harikai, A., Ogata, T. & Watanabe, Y., Dec 1 2003, Proceddings of the 3rd World Conference on Photovoltaic Energy Conversion. Kurokawa, K., Kazmerski, L. L., McNeils, B., Yamaguchi, M. & Wronski, C. (eds.). Vol. B. p. 1635-1638 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma CVD
Hydrogen
Compressive stress
Substrates
Temperature