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Research Output 1999 2020

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Article
2014
34 Citations (Scopus)

Plasma induced long-term growth enhancement of Raphanus sativus L. using combinatorial atmospheric air dielectric barrier discharge plasmas

Kitazaki, S., Sarinont, T., Koga, K., Hayashi, N. & Shiratani, M., Jul 24 2014, In : Current Applied Physics. 14, SUPPL. 2, p. S149-S153

Research output: Contribution to journalArticle

Discharge (fluid mechanics)
plasma jets
Seed
seeds
Plasmas
12 Citations (Scopus)

Synthesis and characterization of ZnInON semiconductor: A ZnO-based compound with tunable band gap

Itagaki, N., Matsushima, K., Yamashita, D., Seo, H., Koga, K. & Shiratani, M., Sep 2014, In : Materials Research Express. 1, 3, 036405.

Research output: Contribution to journalArticle

Energy gap
Semiconductor materials
Quartz
Photosensitivity
Full width at half maximum
7 Citations (Scopus)

Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas

Shiratani, M., Koga, K., Kamataki, K., Iwashita, S., Uchida, G., Seo, H. & Itagaki, N., Jan 1 2014, In : Japanese journal of applied physics. 53, 1, 010201.

Research output: Contribution to journalArticle

Nanoparticles
Plasmas
nanoparticles
nanofabrication
Nanostructures
19 Citations (Scopus)

Visualization of the distribution of oxidizing substances in an atmospheric pressure plasma jet

Kawasaki, T., Kawano, K., Mizoguchi, H., Yano, Y., Yamashita, K., Sakai, M., Shimizu, T., Uchida, G., Koga, K. & Shiratani, M., Oct 1 2014, In : IEEE Transactions on Plasma Science. 42, 10, p. 2482-2483 2 p., 6827950.

Research output: Contribution to journalArticle

plasma jets
atmospheric pressure
reagents
distribution (property)
generators
2013
28 Citations (Scopus)

Analysis on the effect of polysulfide electrolyte composition for higher performance of Si quantum dot-sensitized solar cells

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Apr 15 2013, In : Electrochimica Acta. 95, p. 43-47 5 p.

Research output: Contribution to journalArticle

Polysulfides
Electrolytes
Semiconductor quantum dots
Redox reactions
Solar cells
3 Citations (Scopus)

Characteristics of crystalline silicon/Si quantum dot/poly(3,4- ethylenedioxythiophene) hybrid solar cells

Uchida, G., Wang, Y., Ichida, D., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Nov 1 2013, In : Japanese journal of applied physics. 52, 11 PART 2, 11NA05.

Research output: Contribution to journalArticle

Semiconductor quantum dots
Solar cells
solar cells
quantum dots
Crystalline materials
8 Citations (Scopus)

Characteristics of photocurrent generation in the near-ultraviolet region in Si quantum-dot sensitized solar cells

Uchida, G., Sato, M., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Oct 1 2013, In : Thin Solid Films. 544, p. 93-98 6 p.

Research output: Contribution to journalArticle

Photocurrents
Semiconductor quantum dots
photocurrents
Solar cells
solar cells
4 Citations (Scopus)

Correlation between volume fraction of silicon clusters in amorphous silicon films and optical emission properties of Si* and SiH*

Kim, Y., Hatozaki, K., Hashimoto, Y., Uchida, G., Kamataki, K., Itagaki, N., Seo, H., Koga, K. & Shiratani, M., Nov 1 2013, In : Japanese journal of applied physics. 52, 11 PART 2, 11NA07.

Research output: Contribution to journalArticle

silicon films
Amorphous silicon
amorphous silicon
light emission
Volume fraction
3 Citations (Scopus)

Discharge power dependence of carbon dust flux in a divertor simulator

Nishiyama, K., Morita, Y., Uchida, G., Yamashita, D., Kamataki, K., Seo, H., Itagaki, N., Koga, K., Shiratani, M., Ashikawa, N., Masuzaki, S., Nishimura, K., Sagara, A., Bornholdt, S. & Kersten, H., Jan 1 2013, In : Journal of Nuclear Materials. 438, SUPPL

Research output: Contribution to journalArticle

simulators
Dust
Carbon
Simulators
dust
6 Citations (Scopus)

Dust particle formation due to interaction between graphite and helicon deuterium plasmas

Iwashita, S., Nishiyama, K., Uchida, G., Seo, H., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2013, In : Fusion Engineering and Design. 88, 1, p. 28-32 5 p.

Research output: Contribution to journalArticle

Helicons
Graphite
Deuterium
Beam plasma interactions
Particles (particulate matter)
3 Citations (Scopus)

Effects of DC substrate bias voltage on dust flux in the Large Helical Device

Koga, K., Nishiyama, K., Morita, Y., Uchida, G., Yamashita, D., Kamataki, K., Seo, H., Itagaki, N., Shiratani, M., Ashikawa, N., Masuzaki, S., Nishimura, K. & Sagara, A., Jan 1 2013, In : Journal of Nuclear Materials. 438, SUPPL

Research output: Contribution to journalArticle

Bias voltage
Dust
dust
direct current
Fluxes
10 Citations (Scopus)

Effects of hydrogen dilution on ZnO thin films fabricated via nitrogen-mediated crystallization

Suhariadi, I., Matsushima, K., Kuwahara, K., Oshikawa, K., Yamashita, D., Seo, H., Uchida, G., Kamataki, K., Koga, K., Shiratani, M., Bornholdt, S., Kersten, H., Wulff, H. & Itagaki, N., Jan 1 2013, In : Japanese journal of applied physics. 52, 1 PART2, 01AC08.

Research output: Contribution to journalArticle

Dilution
dilution
Crystallization
crystallization
Nitrogen

Effects of nanoparticle incorporation on properties of microcrystalline films deposited using multi-hollow discharge plasma CVD

Kim, Y., Matsunaga, T., Nakahara, K., Seo, H., Kamataki, K., Uchida, G., Itagaki, N., Koga, K. & Shiratani, M., Aug 15 2013, In : Surface and Coatings Technology. 228, SUPPL.1

Research output: Contribution to journalArticle

Plasma CVD
plasma jets
hollow
vapor deposition
Nanoparticles
12 Citations (Scopus)

Effects of nitrogen on crystal growth of sputter-deposited ZnO films for transparent conducting oxide

Suhariadi, I., Oshikawa, K., Kuwahara, K., Matsushima, K., Yamashita, D., Uchida, G., Koga, K., Shiratani, M. & Itagaki, N., Nov 1 2013, In : Japanese Journal of Applied Physics. 52, 11 PART 2, 11NB03.

Research output: Contribution to journalArticle

Crystal growth
crystal growth
Nitrogen
nitrogen
conduction
11 Citations (Scopus)

Epitaxial growth of ZnInON films with tunable band gap from 1.7 to 3.3 eV on ZnO templates

Matsushima, K., Hirose, T., Kuwahara, K., Yamashita, D., Uchida, G., Seo, H., Kamataki, K., Koga, K., Shiratani, M. & Itagaki, N., Nov 1 2013, In : Japanese Journal of Applied Physics. 52, 11 PART 2, 11NM06.

Research output: Contribution to journalArticle

Epitaxial growth
Energy gap
templates
Crystallization
Nitrogen
24 Citations (Scopus)

Extension of operation regimes and investigation of three-dimensional currentless plasmas in the Large Helical Device

Kaneko, O., Yamada, H., Shigeru, I., Jakubowski, M., Kajita, S., Kitajima, S., Kobayashi, Koga, K., Morisaki, T., Morita, S., Mutoh, T., Sakakibara, S., Suzuki, Y., Takahashi, H., Tanaka, K., Toi, K., Yoshimura, Y., Akiyama, T., Asahi, Y., Ashikawa, N. & 145 others, Chikaraishi, H., Cooper, A., Darrow, D. S., Drapiko, E., Drewelow, P., Du, X., Ejiri, A., Emoto, M., Evans, T., Ezumi, N., Fujii, K., Fukuda, T., Funaba, H., Furukawa, M., Gates, D. A., Goto, M., Goto, T., Guttenfelder, W., Hamaguchi, S., Hasuo, M., Hino, T., Hirooka, Y., Ichiguchi, K., Ida, K., Idei, H., Ido, T., Igami, H., Ikeda, K., Imagawa, S., Imai, T., Isobe, M., Itagaki, M., Ito, T., Itoh, K., Itoh, S., Iwamoto, A., Kamiya, K., Kariya, T., Kasahara, H., Kasuya, N., Kato, D., Kato, T., Kawahata, K., Koike, F., Kubo, S., Kumazawa, R., Kuwahara, D., Lazerson, S., Lee, H., Masuzaki, S., Matsuoka, S., Matsuura, H., Matsuyama, A., Michael, C., Mikkelsen, D., Mitarai, O., Mito, T., Miyazawa, J., Motojima, G., Mukai, K., Murakami, A., Murakami, I., Murakami, S., Muroga, T., Muto, S., Nagaoka, K., Nagasaki, K., Nagayama, Y., Nakajima, N., Nakamura, H., Nakamura, Y., Nakanishi, H., Nakano, H., Nakano, T., Narihara, K., Narushima, Y., Nishimura, K., Nishimura, S., Nishiura, M., Nunami, Y. M., Obana, T., Ogawa, K., Ohdachi, S., Ohno, N., Ohyabu, N., Oishi, T., Okamoto, M., Okamoto, A., Osakabe, M., Oya, Y., Ozaki, T., Pablant, N., Peterson, B. J., Sagara, A., Saito, K., Sakamoto, R., Sakaue, H., Sasao, M., Sato, K., Sato, M., Sawada, K., Seki, R., Seki, T., Sergeev, V., Sharapov, S., Sharov, I., Shimizu, A., Shimozuma, T., Shiratani, M., Shoji, M., Sudo, S., Sugama, H., Suzuki, C., Takahata, K., Takeiri, Y., Takemura, Y., Takeuchi, M., Tamura, H., Tamura, N., Tanaka, H., Tanaka, T., Tingfeng, M., Todo, Y., Tokitani, M., Tokunaga, K., Tokuzawa, T., Tsuchiya, H., Tsumori, K., Ueda, Y., Vyacheslavov, L., Watanabe, K. Y., Watanabe, T., Watanabe, T. H., Wieland, B., Yamada, I., Yamada, S., Yamamoto, S., Yanagi, N., Yasuhara, R., Yokoyama, M., Yoshida, N., Yoshimura, S., Yoshinaga, T., Yoshinuma, M. & Komori, A., Oct 1 2013, In : Nuclear Fusion. 53, 10, 104015.

Research output: Contribution to journalArticle

ion temperature
pellets
injection
baffles
active control
2 Citations (Scopus)

Flux control of carbon nanoparticles generated due to interactions between hydrogen plasmas and graphite using DC-biased substrates

Koga, K., Tateishi, M., Nishiyama, K., Uchida, G., Kamataki, K., Yamashita, D., Seo, H., Itagaki, N., Shiratani, M., Ashikawa, N., Masuzaki, S., Nishimura, K. & Sagara, A., Nov 1 2013, In : Japanese journal of applied physics. 52, 11 PART 2, 11NA08.

Research output: Contribution to journalArticle

Beam plasma interactions
hydrogen plasma
Dust
Graphite
graphite
2 Citations (Scopus)

H2/N2 plasma etching rate of carbon films deposited by H-assisted plasma chemical vapor deposition

Urakawa, T., Torigoe, R., Matsuzaki, H., Yamashita, D., Uchida, G., Koga, K., Shiratani, M., Setsuhara, Y., Takeda, K., Sekine, M. & Hori, M., Jan 1 2013, In : Japanese journal of applied physics. 52, 1 PART2, 01AB01.

Research output: Contribution to journalArticle

Plasma etching
Carbon films
plasma etching
Chemical vapor deposition
vapor deposition
8 Citations (Scopus)

High amount cluster incorporation in initial Si film deposition by SiH 4 plasma chemical vapor deposition

Kim, Y., Hatozaki, K., Hashimoto, Y., Uchida, G., Kamataki, K., Itagaki, N., Seo, H., Koga, K. & Shiratani, M., Jan 1 2013, In : Japanese journal of applied physics. 52, 1 PART2, 01AD01.

Research output: Contribution to journalArticle

Chemical vapor deposition
Volume fraction
vapor deposition
Plasmas
Quartz crystal microbalances
8 Citations (Scopus)

Improvement of Si adhesion and reduction of electron recombination for Si quantum dot-sensitized solar cells

Seo, H., Wang, Y., Sato, M., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2013, In : Japanese Journal of Applied Physics. 52, 1 PART2, 01AD05.

Research output: Contribution to journalArticle

electron recombination
Semiconductor quantum dots
Solar cells
adhesion
Adhesion
7 Citations (Scopus)

Improvement on the electron transfer of dye-sensitized solar cell using vanadium doped TiO2

Seo, H., Wang, Y., Ichida, D., Uchida, G., Itagaki, N., Koga, K., Shiratani, M., Nam, S. H. & Boo, J. H., Nov 1 2013, In : Japanese journal of applied physics. 52, 11 PART 2, 11NM02.

Research output: Contribution to journalArticle

Vanadium
vanadium
electron transfer
solar cells
dyes
6 Citations (Scopus)

Mass density control of carbon films deposited by H-assisted plasma CVD method

Urakawa, T., Matsuzaki, H., Yamashita, D., Uchida, G., Koga, K., Shiratani, M., Setsuhara, Y., Sekine, M. & Hori, M., Aug 15 2013, In : Surface and Coatings Technology. 228, SUPPL.1

Research output: Contribution to journalArticle

Carbon films
Chemical vapor deposition
vapor deposition
Ions
Plasmas
11 Citations (Scopus)

Study on the fabrication of paint-type Si quantum dot-sensitized solar cells

Seo, H., Son, M. K., Kim, H. J., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Nov 11 2013, In : Japanese journal of applied physics. 52, 10 PART2, 10MB07.

Research output: Contribution to journalArticle

paints
Paint
Semiconductor quantum dots
Solar cells
solar cells
5 Citations (Scopus)

The improvement on the performance of quantum dot-sensitized solar cells with functionalized Si

Seo, H., Wang, Y., Sato, M., Uchida, G., Koga, K., Itagaki, N., Kamataki, K. & Shiratani, M., Nov 1 2013, In : Thin Solid Films. 546, p. 284-288 5 p.

Research output: Contribution to journalArticle

Semiconductor quantum dots
Solar cells
solar cells
quantum dots
Excitons
19 Citations (Scopus)
Semiconductor quantum dots
Surface treatment
Solar cells
Excitons
Electrolytes
13 Citations (Scopus)

Transport control of dust particles via the electrical asymmetry effect: Experiment, simulation and modelling

Iwashita, S., Schüngel, E., Schulze, J., Hartmann, P., Donkó, Z., Uchida, G., Koga, K., Shiratani, M. & Czarnetzki, U., Jun 19 2013, In : Journal of Physics D: Applied Physics. 46, 24, 245202.

Research output: Contribution to journalArticle

sheaths
Particles (particulate matter)
Dust
dust
asymmetry
2012
12 Citations (Scopus)

Combinatorial deposition of microcrystalline silicon films using multihollow discharge plasma chemical vapor deposition

Koga, K., Matsunaga, T., Kim, Y., Nakahara, K., Yamashita, D., Matsuzaki, H., Kamataki, K., Uchida, G., Itagaki, N. & Shiratani, M., Jan 1 2012, In : Japanese Journal of Applied Physics. 51, 1 PART 2, 01AD02.

Research output: Contribution to journalArticle

Microcrystalline silicon
silicon films
plasma jets
Chemical vapor deposition
vapor deposition
5 Citations (Scopus)

Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Kamataki, K., Koga, K., Uchida, G., Itagaki, N., Yamashita, D., Matsuzaki, H. & Shiratani, M., Nov 15 2012, In : Thin Solid Films. 523, p. 76-79 4 p.

Research output: Contribution to journalArticle

radio frequency discharge
Amplitude modulation
Plasmas
Electric potential
electric potential

Deposition of cluster-free b-doped hydrogenated amorphous silicon films using sih 4+b10h1 4 multi-hollow discharge plasma chemical vapor deposition

Koga, K., Nakahara, K., Kim, Y. W., Matsunaga, T., Yamashita, D., Matsuzaki, H., Uchida, G., Kamataki, K., Itagaki, N. & Shiratani, M., Jan 1 2012, In : Japanese Journal of Applied Physics. 51, 1 PART 2, 01AD03.

Research output: Contribution to journalArticle

silicon films
Amorphous silicon
plasma jets
amorphous silicon
Chemical vapor deposition
15 Citations (Scopus)

Effect of nitridation of si nanoparticles on the performance of quantum-dot sensitized solar cells

Uchida, G., Yamamoto, K., Sato, M., Kawashima, Y., Nakahara, K., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2012, In : Japanese Journal of Applied Physics. 51, 1 PART 2, 01AD01.

Research output: Contribution to journalArticle

Nitridation
Semiconductor quantum dots
Solar cells
solar cells
quantum dots
4 Citations (Scopus)

Effects of crystalline nanoparticle incorporation on growth, structure, and properties of microcrystalline silicon films deposited by plasma chemical vapor deposition

Kim, Y., Matsunaga, T., Nakahara, K., Uchida, G., Kamataki, K., Itagaki, N., Seo, H., Koga, K. & Shiratani, M., Nov 15 2012, In : Thin Solid Films. 523, p. 29-33 5 p.

Research output: Contribution to journalArticle

Microcrystalline silicon
silicon films
Chemical vapor deposition
vapor deposition
Nanoparticles
26 Citations (Scopus)
yeast
Yeast
plasma jets
Atmospheric pressure
atmospheric pressure
35 Citations (Scopus)
radio frequency discharge
low pressure
Irradiation
Plasmas
irradiation
26 Citations (Scopus)

High quality epitaxial ZnO films grown on solid-phase crystallized buffer layers

Kuwahara, K., Itagaki, N., Nakahara, K., Yamashita, D., Uchida, G., Kamataki, K., Koga, K. & Shiratani, M., May 1 2012, In : Thin Solid Films. 520, 14, p. 4674-4677 4 p.

Research output: Contribution to journalArticle

Epitaxial films
Buffer layers
solid phases
buffers
Aluminum Oxide
8 Citations (Scopus)
Light Scattering
Light scattering
Nanoparticles
light scattering
Plasma
9 Citations (Scopus)
Lung
Observation
copper indium diselenide
copper gallium diselenide
Control Groups
2011
8 Citations (Scopus)

Comparison between silicon thin films with and without incorporating crystalline silicon nanoparticles into the film

Koga, K., Matsunaga, T., Nakamura, W. M., Nakahara, K., Kawashima, Y., Uchida, G., Kamataki, K., Itagaki, N. & Shiratani, M., Aug 1 2011, In : Thin Solid Films. 519, 20, p. 6896-6898 3 p.

Research output: Contribution to journalArticle

Silicon
Nanoparticles
Crystalline materials
Thin films
nanoparticles
2 Citations (Scopus)

Deposition of cluster-free P-doped a-Si:H films using SiH4+PH3 multi-hollow discharge plasma CVD

Koga, K., Nakahara, K., Kim, Y. W., Kawashima, Y., Matsunaga, T., Sato, M., Yamashita, D., Matsuzaki, H., Uchida, G., Kamataki, K., Itagaki, N. & Shiratani, M., Oct 1 2011, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 8, 10, p. 3013-3016 4 p.

Research output: Contribution to journalArticle

plasma jets
hollow
vapor deposition
surface reactions
defects
53 Citations (Scopus)

Highly conducting and very thin ZnO: AI films with ZnO buffer layer fabricated by solid phase crystallization from amorphous phase

Itagaki, N., Kuwahara, K., Nakahara, K., Yamashita, D., Uchida, G., Koga, K. & Shiratani, M., Jan 2011, In : Applied Physics Express. 4, 1, 011101.

Research output: Contribution to journalArticle

Buffer layers
solid phases
buffers
Crystallization
crystallization
7 Citations (Scopus)

Hybrid sensitized solar cells using Si nanoparticles and ruthenium dye

Uchida, G., Kawashima, Y., Yamamoto, K., Sato, M., Nakahara, K., Matsunaga, T., Yamashita, D., Matsuzaki, H., Kamataki, K., Itagaki, N., Koga, K., Kondo, M. & Shiratani, M., Oct 1 2011, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 8, 10, p. 3021-3024 4 p.

Research output: Contribution to journalArticle

ruthenium
solar cells
dyes
nanoparticles
silicon
10 Citations (Scopus)

Impacts of amplitude modulation of RF discharge voltage on the growth of nanoparticles in reactive plasmas

Kamataki, K., Miyata, H., Koga, K., Uchida, G., Itagaki, N. & Shiratani, M., Oct 1 2011, In : Applied Physics Express. 4, 10, 105001.

Research output: Contribution to journalArticle

Amplitude modulation
Nanoparticles
Plasmas
nanoparticles
Electric potential
24 Citations (Scopus)

Nano-factories in plasma: Present status and outlook

Shiratani, M., Koga, K., Iwashita, S., Uchida, G., Itagaki, N. & Kamataki, K., May 4 2011, In : Journal of Physics D: Applied Physics. 44, 17, 174038.

Research output: Contribution to journalArticle

industrial plants
Industrial plants
Plasmas
Substrates
agglomeration
16 Citations (Scopus)

Redox characteristics of thiol compounds using radicals produced by water vapor radio frequency discharge

Hayashi, N., Nakahigashi, A., Goto, M., Kitazaki, S., Koga, K. & Shiratani, M., Aug 1 2011, In : Japanese Journal of Applied Physics. 50, 8 PART 2, 08JF04.

Research output: Contribution to journalArticle

Cystines
radio frequency discharge
thiols
Water vapor
water vapor
14 Citations (Scopus)

Surface nitridation of silicon nano-particles using double multi-hollow discharge plasma CVD

Uchida, G., Yamamoto, K., Kawashima, Y., Sato, M., Nakahara, K., Kamataki, K., Itagaki, N., Koga, K., Kondo, M. & Shiratani, M., Oct 1 2011, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 8, 10, p. 3017-3020 4 p.

Research output: Contribution to journalArticle

plasma jets
hollow
vapor deposition
silicon
photoluminescence
2010
30 Citations (Scopus)

High rate deposition of highly stable a-Si:H films using multi-hollow discharges for thin films solar cells

Nakamura, W. M., Matsuzaki, H., Sato, H., Kawashima, Y., Koga, K. & Shiratani, M., Dec 25 2010, In : Surface and Coatings Technology. 205, SUPPL. 1

Research output: Contribution to journalArticle

Deposition rates
hollow
solar cells
thin films
Defect density
2009
7 Citations (Scopus)

P-type sp3-bonded BN/n-type Si heterodiode solar cell fabricated by laser-plasma synchronous CVD method

Komatsu, S., Sato, Y., Hirano, D., Nakamura, T., Koga, K., Yamamoto, A., Nagata, T., Chikyo, T., Watanabe, T., Takizawa, T., Nakamura, K., Hashimoto, T. & Shiratani, M., Nov 27 2009, In : Journal of Physics D: Applied Physics. 42, 22, 225107.

Research output: Contribution to journalArticle

Boron nitride
boron nitrides
laser plasmas
Chemical vapor deposition
Solar cells
2008
7 Citations (Scopus)

Discharge power dependence of Hα intensity and electron density of Ar + H2 discharges in H-assisted plasma CVD reactor

Umetsu, J., Koga, K., Inoue, K., Matsuzaki, H., Takenaka, K. & Shiratani, M., Aug 30 2008, In : Surface and Coatings Technology. 202, 22-23, p. 5659-5662 4 p.

Research output: Contribution to journalArticle

Plasma CVD
Carrier concentration
reactors
vapor deposition
Deposition rates
11 Citations (Scopus)

Nanoparticle coagulation in fractionally charged and charge fluctuating dusty plasmas

Nunomura, S., Shiratani, M., Koga, K., Kondo, M. & Watanabe, Y., Sep 8 2008, In : Physics of Plasmas. 15, 8, 080703.

Research output: Contribution to journalArticle

dusty plasmas
coagulation
nanoparticles
charging
phase diagrams
1 Citation (Scopus)

Optical emission spectroscopic study on H-assisted plasma for anisotropic deposition of Cu films

Umetsu, J., Inoue, K., Koga, K. & Shiratani, M., Mar 1 2008, In : Journal of Physics: Conference Series. 100, PART 6, 062007.

Research output: Contribution to journalArticle

light emission
gas flow
emission spectra
flow velocity
impurities
1 Citation (Scopus)

Rapid transport of nano-particles in amplitude modulated rf discharges for depositing porous ultra-low-k films

Iwashita, S., Morita, M., Koga, K. & Shiratani, M., Mar 1 2008, In : Journal of Physics: Conference Series. 100, PART 6, 062006.

Research output: Contribution to journalArticle

pulses
plasma jets
adhesives
permittivity
porosity