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Research Output 1999 2019

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Conference article
2015

Effects of morphology of buffer layers on ZnO/sapphire heteroepitaxial growth by RF magnetron sputtering

Ide, T., Matsushima, K., Shimizu, R., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2015, In : Materials Research Society Symposium Proceedings. 1741, January, p. 41-46 6 p.

Research output: Contribution to journalConference article

Aluminum Oxide
Buffer layers
Epitaxial growth
Sapphire
Magnetron sputtering
1 Citation (Scopus)

Fabrication of p-i-n solar cells utilizing ZnlnON by RF magnetron sputtering

Matsushima, K., Shimizu, R., Ide, T., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2015, In : Materials Research Society Symposium Proceedings. 1741, January, p. 53-57 5 p.

Research output: Contribution to journalConference article

Magnetron sputtering
Solar cells
magnetron sputtering
solar cells
Fabrication
2014

Contribution of H2 plasma etching to radial profile of amount of dust particles in a divertor simulator

Tateishi, M., Koga, K., Yamashita, D., Kamataki, K., Seo, H., Itagaki, N., Shiratani, M., Ashikawa, N., Masuzaki, S., Nishimura, K. & Sagara, A., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012009.

Research output: Contribution to journalConference article

plasma etching
simulators
dust
profiles
flakes
1 Citation (Scopus)

Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD

Toko, S., Hashimoto, Y., Kanemitu, Y., Torigoe, Y., Seo, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012008.

Research output: Contribution to journalConference article

vapor deposition
grids
plasma jets
hollow
direct current
4 Citations (Scopus)

Control of the area irradiated by the sheet-type plasma jet in atmospheric pressure

Kawasaki, T., Kawano, K., Mizoguchi, H., Yano, Y., Yamashita, K., Sakai, M., Uchida, G., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012016.

Research output: Contribution to journalConference article

plasma jets
atmospheric pressure
irradiation
sterilization effects
generators
3 Citations (Scopus)

Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method

Ichida, D., Uchida, G., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012002.

Research output: Contribution to journalConference article

magnetron sputtering
nanoparticles
frequency shift
gas mixtures
crystallinity
3 Citations (Scopus)

Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency

Hashimoto, Y., Toko, S., Yamashita, D., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012007.

Research output: Contribution to journalConference article

filters
film thickness
amorphous silicon
nanoparticles
hydrogen
1 Citation (Scopus)

Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence

Dong, X., Koga, K., Yamashita, D., Seo, H., Itagaki, N., Shiratani, M., Setsuhara, Y., Sekine, M. & Hori, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012010.

Research output: Contribution to journalConference article

magnetohydrodynamic flow
pressure dependence
flow velocity
spectroscopy
toluene
3 Citations (Scopus)

Formation of carbon nanoparticle using Ar+CH4 high pressure nanosecond discharges

Koga, K., Dong, X., Iwashita, S., Czarnetzki, U. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012020.

Research output: Contribution to journalConference article

nanoparticles
electrodes
carbon
glow discharges
transition pressure
8 Citations (Scopus)

Growth enhancement effects of radish sprouts: Atmospheric pressure plasma irradiation vs. heat shock

Sarinont, T., Amano, T., Kitazaki, S., Koga, K., Uchida, G., Shiratani, M. & Hayashi, N., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012017.

Research output: Contribution to journalConference article

atmospheric pressure
shock
heat
irradiation
augmentation
3 Citations (Scopus)

Plasma etching of single fine particle trapped in Ar plasma by optical tweezers

Ito, T., Koga, K., Yamashita, D., Kamataki, K., Itagaki, N., Uchida, G. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012014.

Research output: Contribution to journalConference article

trapped particles
plasma etching
plasma sheaths
interactions
infrared lasers
1 Citation (Scopus)

SiC nanoparticle composite anode for Li-Ion batteries

Shiratani, M., Kamataki, K., Uchida, G., Koga, K., Seo, H., Itagaki, N. & Ishihara, T., Jan 1 2014, In : Materials Research Society Symposium Proceedings. 1678

Research output: Contribution to journalConference article

electric batteries
Anodes
anodes
Nanoparticles
nanoparticles
2013

Growth control of ZnO nano-rod with various seeds and photovoltaic application

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2013, In : Journal of Physics: Conference Series. 441, 1, 012029.

Research output: Contribution to journalConference article

seeds
rods
electron transfer
baths
solar cells
2003
1 Citation (Scopus)

Anisotropic plasma chemical vapor deposition of copper films in trenches

Takenaka, K., Onishi, M., Takenshita, M., Kinoshita, T., Koga, K., Shiratani, M. & Watanabe, Y., Dec 1 2003, In : Materials Research Society Symposium - Proceedings. 766, p. 465-470 6 p.

Research output: Contribution to journalConference article

trench
Copper
Chemical vapor deposition
copper
Plasmas
19 Citations (Scopus)

Cluster-suppressed plasma CVD for deposition of high quality a-Si:H films

Shiratani, M., Koga, K. & Watanabe, Y., Mar 3 2003, In : Thin Solid Films. 427, 1-2, p. 1-5 5 p.

Research output: Contribution to journalConference article

Plasma CVD
vapor deposition
Silanes
very high frequencies
microstructure
2002
24 Citations (Scopus)

Nucleation and subsequent growth of clusters in reactive plasmas

Watanabe, Y., Shiratani, M. & Koga, K., Jan 1 2002, In : Plasma Sources Science and Technology. 11, 3 A

Research output: Contribution to journalConference article

nucleation
gas flow
reactors
gas temperature
dilution
2001
2 Citations (Scopus)
Plasma CVD
reactors
vapor deposition
Gases
Silanes
2000
1 Citation (Scopus)

Deposition of smooth thin Cu films in deep submicron trench by plasma CVD reactor with H atom source

Shiratani, M., Hong Jie Jin, J. J., Nakatake, Y., Koga, K., Kinoshita, T. & Watanabe, Y., Dec 1 2000, In : Materials Research Society Symposium - Proceedings. 612

Research output: Contribution to journalConference article

Plasma CVD
reactors
vapor deposition
Atoms
Irradiation

Methods of suppressing cluster growth in silane RF discharges

Shiratani, M., Maeda, S., Matsuoka, Y., Tanaka, K., Koga, K. & Watanabe, Y., Dec 1 2000, In : Materials Research Society Symposium - Proceedings. 609

Research output: Contribution to journalConference article

Silanes
silanes
Discharge (fluid mechanics)
Thermal gradients
Gases