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Research Output 1999 2020

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Conference article
2015

Effects of morphology of buffer layers on ZnO/sapphire heteroepitaxial growth by RF magnetron sputtering

Ide, T., Matsushima, K., Shimizu, R., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2015, In : Materials Research Society Symposium Proceedings. 1741, January, p. 41-46 6 p.

Research output: Contribution to journalConference article

Aluminum Oxide
Buffer layers
Epitaxial growth
Sapphire
Magnetron sputtering
1 Citation (Scopus)

Fabrication of p-i-n solar cells utilizing ZnlnON by RF magnetron sputtering

Matsushima, K., Shimizu, R., Ide, T., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2015, In : Materials Research Society Symposium Proceedings. 1741, January, p. 53-57 5 p.

Research output: Contribution to journalConference article

Magnetron sputtering
Solar cells
magnetron sputtering
solar cells
Fabrication
2014

Contribution of H2 plasma etching to radial profile of amount of dust particles in a divertor simulator

Tateishi, M., Koga, K., Yamashita, D., Kamataki, K., Seo, H., Itagaki, N., Shiratani, M., Ashikawa, N., Masuzaki, S., Nishimura, K. & Sagara, A., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012009.

Research output: Contribution to journalConference article

plasma etching
simulators
dust
profiles
flakes
1 Citation (Scopus)

Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD

Toko, S., Hashimoto, Y., Kanemitu, Y., Torigoe, Y., Seo, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012008.

Research output: Contribution to journalConference article

vapor deposition
grids
plasma jets
hollow
direct current
4 Citations (Scopus)

Control of the area irradiated by the sheet-type plasma jet in atmospheric pressure

Kawasaki, T., Kawano, K., Mizoguchi, H., Yano, Y., Yamashita, K., Sakai, M., Uchida, G., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012016.

Research output: Contribution to journalConference article

plasma jets
atmospheric pressure
irradiation
sterilization effects
generators
3 Citations (Scopus)

Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method

Ichida, D., Uchida, G., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012002.

Research output: Contribution to journalConference article

magnetron sputtering
nanoparticles
frequency shift
gas mixtures
crystallinity
3 Citations (Scopus)

Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency

Hashimoto, Y., Toko, S., Yamashita, D., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012007.

Research output: Contribution to journalConference article

filters
film thickness
amorphous silicon
nanoparticles
hydrogen
1 Citation (Scopus)

Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence

Dong, X., Koga, K., Yamashita, D., Seo, H., Itagaki, N., Shiratani, M., Setsuhara, Y., Sekine, M. & Hori, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012010.

Research output: Contribution to journalConference article

magnetohydrodynamic flow
pressure dependence
flow velocity
spectroscopy
toluene
3 Citations (Scopus)

Formation of carbon nanoparticle using Ar+CH4 high pressure nanosecond discharges

Koga, K., Dong, X., Iwashita, S., Czarnetzki, U. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012020.

Research output: Contribution to journalConference article

nanoparticles
electrodes
carbon
glow discharges
transition pressure
9 Citations (Scopus)

Growth enhancement effects of radish sprouts: Atmospheric pressure plasma irradiation vs. heat shock

Sarinont, T., Amano, T., Kitazaki, S., Koga, K., Uchida, G., Shiratani, M. & Hayashi, N., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012017.

Research output: Contribution to journalConference article

atmospheric pressure
shock
heat
irradiation
augmentation
3 Citations (Scopus)

Plasma etching of single fine particle trapped in Ar plasma by optical tweezers

Ito, T., Koga, K., Yamashita, D., Kamataki, K., Itagaki, N., Uchida, G. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012014.

Research output: Contribution to journalConference article

trapped particles
plasma etching
plasma sheaths
interactions
infrared lasers
1 Citation (Scopus)

SiC nanoparticle composite anode for Li-Ion batteries

Shiratani, M., Kamataki, K., Uchida, G., Koga, K., Seo, H., Itagaki, N. & Ishihara, T., Jan 1 2014, In : Materials Research Society Symposium Proceedings. 1678

Research output: Contribution to journalConference article

electric batteries
Anodes
anodes
Nanoparticles
nanoparticles
2013

Growth control of ZnO nano-rod with various seeds and photovoltaic application

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2013, In : Journal of Physics: Conference Series. 441, 1, 012029.

Research output: Contribution to journalConference article

seeds
rods
electron transfer
baths
solar cells
2003
1 Citation (Scopus)

Anisotropic plasma chemical vapor deposition of copper films in trenches

Takenaka, K., Onishi, M., Takenshita, M., Kinoshita, T., Koga, K., Shiratani, M. & Watanabe, Y., Dec 1 2003, In : Materials Research Society Symposium - Proceedings. 766, p. 465-470 6 p.

Research output: Contribution to journalConference article

trench
Copper
Chemical vapor deposition
copper
Plasmas
19 Citations (Scopus)

Cluster-suppressed plasma CVD for deposition of high quality a-Si:H films

Shiratani, M., Koga, K. & Watanabe, Y., Mar 3 2003, In : Thin Solid Films. 427, 1-2, p. 1-5 5 p.

Research output: Contribution to journalConference article

Plasma CVD
vapor deposition
Silanes
very high frequencies
microstructure

Dust Formation due to Interaction between H2 Plasma and Carbon Wall

Koga, K., Uehara, R., Shiratani, M., Watanabe, Y. & Komori, A., Oct 17 2003, In : IEEE International Conference on Plasma Science. 1 p.

Research output: Contribution to journalConference article

dust
plasma
carbon
fiber composites
hydrogen plasma
2002
24 Citations (Scopus)

Nucleation and subsequent growth of clusters in reactive plasmas

Watanabe, Y., Shiratani, M. & Koga, K., Jan 1 2002, In : Plasma Sources Science and Technology. 11, 3 A

Research output: Contribution to journalConference article

nucleation
gas flow
reactors
gas temperature
dilution
2001
2 Citations (Scopus)
Plasma CVD
reactors
vapor deposition
Gases
Silanes
2000
1 Citation (Scopus)

Deposition of smooth thin Cu films in deep submicron trench by plasma CVD reactor with H atom source

Shiratani, M., Hong Jie Jin, J. J., Nakatake, Y., Koga, K., Kinoshita, T. & Watanabe, Y., Dec 1 2000, In : Materials Research Society Symposium - Proceedings. 612, p. D921-D926

Research output: Contribution to journalConference article

Plasma CVD
reactors
vapor deposition
Atoms
Irradiation

Methods of suppressing cluster growth in silane RF discharges

Shiratani, M., Maeda, S., Matsuoka, Y., Tanaka, K., Koga, K. & Watanabe, Y., Dec 1 2000, In : Materials Research Society Symposium - Proceedings. 609

Research output: Contribution to journalConference article

Silanes
silanes
Discharge (fluid mechanics)
Thermal gradients
Gases