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Research Output 1999 2019

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Review article
2010
53 Citations (Scopus)

Review of pulmonary toxicity of indium compounds to animals and humans

Tanaka, A., Hirata, M., Kiyohara, Y., Nakano, M., Omae, K., Shiratani, M. & Koga, K., Mar 31 2010, In : Thin Solid Films. 518, 11, p. 2934-2936 3 p.

Research output: Contribution to journalReview article

Indium compounds
indium compounds
toxicity
Toxicity
animals
2005
17 Citations (Scopus)

Cluster-eliminating filter for depositing cluster-free a-Si:H films by plasma chemical vapor deposition

Koga, K., Kaguchi, N., Bando, K., Shiratani, M. & Watanabe, Y., Dec 12 2005, In : Review of Scientific Instruments. 76, 11, p. 1-4 4 p., 113501.

Research output: Contribution to journalReview article

Chemical vapor deposition
vapor deposition
Plasmas
filters
Hydrogen