• 4205 Citations
  • 34 h-Index
1986 …2020

Research output per year

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2018

Effects of sputtering pressure on (Zno)x(inn)1-x crystal film growth at 450ºc

Itagaki, N., Takeuchi, K., Miyahara, N., Imoto, K., Seo, H., Koga, K. & Shiratani, M., Jan 1 2018, THERMEC 2018. Shabadi, R., Ionescu, M., Jeandin, M., Richard, C. & Chandra, T. (eds.). Trans Tech Publications Ltd, p. 2093-2098 6 p. (Materials Science Forum; vol. 941 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photoluminescence of (Zno)0.82(inn)0.18 films: Incident light angle dependence

Miyahara, N., Iwasaki, K., Yamashita, D., Nakamura, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2018, THERMEC 2018. Shabadi, R., Ionescu, M., Jeandin, M., Richard, C. & Chandra, T. (eds.). Trans Tech Publications Ltd, p. 2099-2103 5 p. (Materials Science Forum; vol. 941 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2017

Fluctuation of position and energy of a fine particle in plasma nanofabrication

Shiratani, M., Soejima, M., Seo, H., Itagaki, N. & Koga, K., Jan 1 2017, THERMEC 2016. Sommitsch, C., Ionescu, M., Mishra, B., Mishra, B., Kozeschnik, E. & Chandra, T. (eds.). Trans Tech Publications Ltd, p. 1772-1777 6 p. (Materials Science Forum; vol. 879).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Synthesis of nanoparticles using low temperature plasmas and its application to solar cells and tracers in living body

Koga, K., Seo, H., Tanaka, A., Itagaki, N. & Shiratani, M., Jan 1 2017, Plasma Nano Science and Technology. Cvelbar, U. & Mascher, P. (eds.). 3 ed. Electrochemical Society Inc., p. 17-24 8 p. (ECS Transactions; vol. 77, no. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2016

Inter-particle potential fluctuation of two fine particles suspended in Ar plasmas

Soejima, M., Koga, K. & Shiratani, M., Nov 21 2016, 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., p. 671-673 3 p. 7751376. (16th International Conference on Nanotechnology - IEEE NANO 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Relationship between electric properties and surface flatness of (ZnO)x(InN)1-x films on ZnO templates

Matsushima, K., Shiratani, M. & Itagaki, N., Nov 21 2016, 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., p. 674-675 2 p. 7751421. (16th International Conference on Nanotechnology - IEEE NANO 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
2015

Comparative study on the pulmonary toxicity of indium hydroxide, indium-tin oxide, and indium oxide following intratracheal instillations into the lungs of rats

Tanaka, A., Hirata, M., Matsumura, N., Koga, K., Shiratani, M. & Kiyohara, Y., Jan 1 2015, Plasma Processing and Diagnostics for Life Sciences. Fisher, E. R., Kong, M., Weltmann, K. D. & Shiratani, M. (eds.). Materials Research Society, p. 8-13 6 p. (Materials Research Society Symposium Proceedings; vol. 1723).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Effects of atmospheric air plasma irradiation to seeds of radish sprouts on chlorophyll and carotenoids concentrations in their leaves

Sarinont, T., Amano, T., Koga, K., Shiratani, M. & Hayashi, N., Jan 1 2015, Plasma Processing and Diagnostics for Life Sciences. Fisher, E. R., Kong, M., Weltmann, K. D. & Shiratani, M. (eds.). Materials Research Society, p. 23-27 5 p. (Materials Research Society Symposium Proceedings; vol. 1723).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Multigeneration effects of plasma irradiation to seeds of arabidopsis thaliana and zinnia on their growth

Sarinont, T., Amano, T., Koga, K., Shiratani, M. & Hayashi, N., Jan 1 2015, Plasma Processing and Diagnostics for Life Sciences. Fisher, E. R., Kong, M., Weltmann, K. D. & Shiratani, M. (eds.). Materials Research Society, p. 34-38 5 p. (Materials Research Society Symposium Proceedings; vol. 1723).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

ZnO-based semiconductors with tunable band gap for solar sell applications

Itagaki, N., Matsushima, K., Yamashita, D., Seo, H., Koga, K. & Shiratani, M., Jan 1 2015, Oxide-Based Materials and Devices VI. Teherani, F. H., Look, D. C. & Rogers, D. J. (eds.). SPIE, Vol. 9364. 93640P

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2014

Development and progress in thin film Si photovoltaic technologies

Yoshida, I., Matsui, T., Sai, H., Suezaki, T., Nakao, S., Maejima, K., Katayama, H., Matsumoto, M., Sugiyama, S., Takeuchi, Y., Ushijima, M., Saito, K., Kondo, M., Tanaka, M., Nonomura, S., Shiratani, M., Konagai, M., Hirayama, M. & Niki, S., Oct 15 2014, 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014. Institute of Electrical and Electronics Engineers Inc., p. 2832-2835 4 p. 6925520. (2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Nanostructure control of Si and Ge quantum dots based solar cells using plasma processes

Shiratani, M., Uchida, G., Seo, H. W., Ichida, D., Koga, K., Itagaki, N. & Kamataki, K., Jan 1 2014, THERMEC 2013. Mishra, B., Ionescu, M. & Chandra, T. (eds.). Trans Tech Publications Ltd, p. 2022-2027 6 p. (Materials Science Forum; vol. 783-786).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization

Itagaki, N., Matsushima, K., Yamashita, D., Seo, H., Koga, K. & Shiratani, M., Jan 1 2014, Oxide-Based Materials and Devices V. SPIE, 89871A. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8987).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2012

Characteristics of stable a-Si:H Schottoky cells fabricated by suppressing cluster deposition

Shiratani, M., Hatozaki, K., Hashimoto, Y., Kim, Y., Seo, H., Kamataki, K., Uchida, G., Itagaki, N. & Koga, K., Nov 28 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2012. p. 377-382 6 p. (Materials Research Society Symposium Proceedings; vol. 1426).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Effects of atmospheric pressure dielectric barrier discharge plasma irradiation on yeast growth

Kitazaki, S., Koga, K., Shiratani, M. & Hayashi, N., Dec 1 2012, Plasma Processing and Diagnostics for Life Sciences. p. 86-91 6 p. (Materials Research Society Symposium Proceedings; vol. 1469).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Influence of atmospheric pressure torch plasma irradiation on plant growth

Akiyoshi, Y., Hayashi, N., Kitazaki, S., Koga, K. & Shiratani, M., Dec 1 2012, Plasma Processing and Diagnostics for Life Sciences. p. 92-97 6 p. (Materials Research Society Symposium Proceedings; vol. 1469).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

In-situ measurements of cluster volume fraction in silicon thin films using quartz crystal microbalances

Kim, Y., Hatozaki, K., Hashimoto, Y., Seo, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Nov 28 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2012. p. 307-311 5 p. (Materials Research Society Symposium Proceedings; vol. 1426).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Investigations on the energy balance of the substrate during ZnO magnetron sputtering

Bornholdt, S., Kuwahara, K., Itagaki, N., Wulff, H., Shiratani, M. & Kersten, H., Dec 1 2012, 39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics. p. 1038-1041 4 p. (39th EPS Conference on Plasma Physics 2012, EPS 2012 and the 16th International Congress on Plasma Physics; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Rapid growth of radish sprouts using low pressure O2 radio frequency plasma irradiation

Kitazaki, S., Koga, K., Shiratani, M. & Hayashi, N., Dec 1 2012, Plasma Processing and Diagnostics for Life Sciences. p. 61-66 6 p. (Materials Research Society Symposium Proceedings; vol. 1469).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

The optical analysis and application of size-controllable Si quantum dots fabricated by multi-hollow discharge plasma chemical vapor deposition

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Nov 28 2012, Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2012. p. 313-318 6 p. (Materials Research Society Symposium Proceedings; vol. 1426).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
2011

Generation and surface modification of Si nano-particles using SiH 4/H2 and N2 multi-hollow discharges and their application to the third generation photovoltaics

Koga, K., Uchida, G., Yamamoto, K., Sato, M., Kawashima, Y., Kamataki, K., Itagaki, N. & Shiratani, M., 2011, International Conference on Advances in Condensed and Nano Materials, ICACNM-2011. p. 27-30 4 p. (AIP Conference Proceedings; vol. 1393).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2010

Cluster-free B-doped a-Si:H films deposited using SiH4 + B 10H14 multi-hollow discharges

Nakahara, K., Kawashima, Y., Sato, M., Matsunaga, T., Yamamoto, K., Nakamura, W. M., Yamashita, D., Matsuzaki, H., Uchida, G., Itagaki, N., Koga, K. & Shiratani, M., Dec 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2216-2218 3 p. 5686686

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Deposition of cluster-free P-doped A-Si:H films using a multi-hollow discharge plasma CVD method

Nakahara, K., Kawashima, Y., Sato, M., Matsunaga, T., Yamamoto, K., Nakamura, W. M., Yamashita, D., Matsuzaki, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Dec 20 2010, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. p. 3722-3725 4 p. 5616514. (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Deposition profile control of carbon films on patterned substrates using a hydrogen-assisted plasma CVD method

Nomura, T., Koga, K., Shiratani, M., Setsuhara, Y., Sekine, M. & Hori, M., 2010, Microelectromechanical Systems - Materials and Devices III. p. 203-207 5 p. (Materials Research Society Symposium Proceedings; vol. 1222).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Deposition profiles of microcrystalline silicon films using multi-hollow discharge plasma CVD

Matsunaga, T., Kawashima, Y., Koga, K., Nakahara, K., Nakamura, W. M., Uchida, G., Itagaki, N., Yamashita, D., Matsuzaki, H. & Shiratani, M., Dec 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2219-2221 3 p. 5686679. (IEEE Region 10 Annual International Conference, Proceedings/TENCON).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Development of a combinatorial plasma process analyzer for advanced R&D of next generation nanodevice fabrication

Takenaka, K., Cho, K., Setsuhara, Y., Shiratani, M., Sekine, M. & Hon, M., 2010, Characterization and Control of Interfaces for High Quality Advanced Materials III - Proc. 3rd Int. Conf. on Characterization and Control of Interfaces for High Quality Advanced Materials,ICCCI2009. American Ceramic Society, p. 279-284 6 p. (Ceramic Transactions; vol. 219).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Effects of amplitude modulation of rf discharge voltage on growth of nano-particles in reactive plasmas

Kamataki, K., Miyata, H., Koga, K., Uchida, G., Itagaki, N., Yamashita, D., Matsuzaki, H. & Shiratani, M., 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 1943-1947 5 p. 5686456

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Effects of Ar addition on breakdown voltage in a Si(CH3) 2(OCH3)2 RF discharge

Uchida, G., Nunomutra, S., Miyata, H., Iwashita, S., Yamashita, D., Matsuzaki, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2199-2201 3 p. 5686704. (IEEE Region 10 Annual International Conference, Proceedings/TENCON).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Effects of hydrogen dilution on electron density in multi-hollow discharges with magnetic field for A-Si:H film deposition

Koga, K., Kawashima, Y., Nakahara, K., Matsunaga, T., Nakamura, W. M. & Shiratani, M., Dec 20 2010, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. p. 3718-3721 4 p. 5616502. (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Growth stimulation of radish sprouts using discharge plasmas

Kitazaki, S., Yamashita, D., Matsuzaki, H., Uchida, G., Koga, K., Shiratani, M. & Hayashi, N., Dec 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 1960-1963 4 p. 5686474. (IEEE Region 10 Annual International Conference, Proceedings/TENCON).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Hard X-ray photoelectron spectroscopy analysis for organic-inorganic hybrid materials formation

Cho, K., Takenaka, K., Setsuhara, Y., Shiratani, M., Sekine, M., Hori, M., Ikenaga, E., Kondo, H., Nakatsuka, O. & Zaima, S., Sep 1 2010, Characterization and Control of Interfaces for High Quality Advanced Materials III - Proc. 3rd Int. Conf. on Characterization and Control of Interfaces for High Quality Advanced Materials,ICCCI2009. p. 183-188 6 p. (Ceramic Transactions; vol. 219).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

High rate deposition of cluster-suppressed amorphous silicon films deposited using a multi-hollow discharge plasma CVD

Koga, K., Sato, H., Kawashima, Y., Nakamura, W. M. & Shiratani, M., Dec 24 2010, Photovoltaic Materials and Manufacturing Issues II. p. 217-222 6 p. (Materials Research Society Symposium Proceedings; vol. 1210).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Keynote speech I: Fluctuation control for plasma nanotechnologies

Shiratani, M., Koga, K., Uchida, G., Itagaki, N. & Kamataki, K., Dec 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. 5685920. (IEEE Region 10 Annual International Conference, Proceedings/TENCON).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Photoluminescence of Si nanoparticles synthesized using multi-hollow discharge plasma CVD

Kawashima, Y., Yamamoto, K., Sato, M., Matsunaga, T., Nakahara, K., Yamashita, D., Matsuzaki, H., Uchida, G., Koga, K., Shiratani, M. & Kondo, M., Dec 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2222-2224 3 p. 5686677. (IEEE Region 10 Annual International Conference, Proceedings/TENCON).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Redox characteristics of amino acids using low pressure water vapor RF plasma

Akiyoshi, Y., Nakahigashi, A., Hayashi, N., Kitazaki, S., Iwao, T., Koga, K. & Shiratani, M., Dec 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 1957-1959 3 p. 5686467. (IEEE Region 10 Annual International Conference, Proceedings/TENCON).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Si quantum dot-sensitized solar cells using Si nanoparticles produced by plasma CVD

Kawashima, Y., Yamamoto, K., Sato, M., Nakahara, K., Matsunaga, T., Nakamura, W. M., Yamashita, D., Matsuzaki, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K., Shiratani, M. & Kondo, M., Dec 20 2010, Program - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010. p. 3347-3351 5 p. 5617205. (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Substrate temperature dependence of feature profile of carbon films on substrate with submicron trenches

Nomura, T., Urakawa, T., Korenaga, Y., Yamashita, D., Matsuzaki, H., Koga, K., Shiratani, M., Setsuhara, Y., Sekine, M. & Hori, M., Dec 1 2010, TENCON 2010 - 2010 IEEE Region 10 Conference. p. 2213-2215 3 p. 5686688. (IEEE Region 10 Annual International Conference, Proceedings/TENCON).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2006

Incorporation of higher-order silane radicals into A-SI:H films of high stability against light exposure

Shiratani, M., Iwashita, S., Bando, K., Inoue, T. & Koga, K., Jan 1 2006, Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4. IEEE Computer Society, p. 1596-1599 4 p. 4059957. (Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Low erosion tungsten CMP process with high productivity

Shiratani, M. & Kumazawa, K., Dec 1 2006, ISSM 2006 Conference Proceedings - Fifteenth International Symposium on Semiconductor Manufacturing. p. 149-151 3 p. 4493046. (IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Plasma CVD for producing Si quantum dot films

Iwashita, S., Miyahara, H., Koga, K., Shiratani, M., Nunomura, S. & Kondo, M., Dec 1 2006, Proceedings of the 22nd International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV. p. 558-560 3 p. 4194943. (Proceedings - International Symposium on Discharges and Electrical Insulation in Vacuum, ISDEIV; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Properties of nano-crystalline silicon films for top solar cells

Iwasita, S., Inoue, T., Koga, K., Shiratani, M., Nunomura, S. & Kondo, M., Jan 1 2006, Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4. IEEE Computer Society, p. 1664-1667 4 p. 4059975. (Conference Record of the 2006 IEEE 4th World Conference on Photovoltaic Energy Conversion, WCPEC-4; vol. 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2005

Deposition of high-quality a-Si:H by suppressing growth of a-Si clusters in SiH4 plasmas

Watanabe, Y., Shiratani, M. & Koga, K., Oct 31 2005, NEW VISTAS IN DUSTY PLASMAS: Fourth International Conference on the Physics of Dusty Plasmas. p. 105-114 10 p. (AIP Conference Proceedings; vol. 799).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2003

High-quality a-Si:H films deposited at 0.7 NM/S by cluster suppressed plasma CVD method

Shiratani, M., Koga, K., Harikai, A., Ogata, T. & Watanabe, Y., Dec 1 2003, Proceddings of the 3rd World Conference on Photovoltaic Energy Conversion. Kurokawa, K., Kazmerski, L. L., McNeils, B., Yamaguchi, M. & Wronski, C. (eds.). p. 1635-1638 4 p. (Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion; vol. B).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Light-soaking stability of nano-structure tailored silicon thin film solar cells

Ito, M., Myojin, N., Kondo, K., Matsuda, A., Shiratani, M. & Watanabe, Y., Dec 1 2003, Proceddings of the 3rd World Conference on Photovoltaic Energy Conversion. Kurokawa, K., Kazmerski, L. L., McNeils, B., Yamaguchi, M. & Wronski, C. (eds.). p. 1592-1595 4 p. (Proceedings of the 3rd World Conference on Photovoltaic Energy Conversion; vol. B).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)