• 4205 Citations
  • 34 h-Index
1986 …2020

Research output per year

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Research Output

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Conference article
2018

Morphology Evolution of ZnO Thin Films Deposited by Nitrogen Mediated Crystallization Method

Suhariadi, I., Shiratani, M. & Itagaki, N., Mar 30 2018, In : MATEC Web of Conferences. 159, 02031.

Research output: Contribution to journalConference article

2015

Effects of morphology of buffer layers on ZnO/sapphire heteroepitaxial growth by RF magnetron sputtering

Ide, T., Matsushima, K., Shimizu, R., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2015, In : Materials Research Society Symposium Proceedings. 1741, January, p. 41-46 6 p.

Research output: Contribution to journalConference article

2 Citations (Scopus)

Fabrication of p-i-n solar cells utilizing ZnlnON by RF magnetron sputtering

Matsushima, K., Shimizu, R., Ide, T., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2015, In : Materials Research Society Symposium Proceedings. 1741, January, p. 53-57 5 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)
2014

Contribution of H2 plasma etching to radial profile of amount of dust particles in a divertor simulator

Tateishi, M., Koga, K., Yamashita, D., Kamataki, K., Seo, H., Itagaki, N., Shiratani, M., Ashikawa, N., Masuzaki, S., Nishimura, K. & Sagara, A., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012009.

Research output: Contribution to journalConference article

Contribution of ionic precursors to deposition rate of a-Si:H films fabricated by plasma CVD

Toko, S., Hashimoto, Y., Kanemitu, Y., Torigoe, Y., Seo, H., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 2014, In : Journal of Physics: Conference Series. 518, 1, 012008.

Research output: Contribution to journalConference article

1 Citation (Scopus)

Control of the area irradiated by the sheet-type plasma jet in atmospheric pressure

Kawasaki, T., Kawano, K., Mizoguchi, H., Yano, Y., Yamashita, K., Sakai, M., Uchida, G., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012016.

Research output: Contribution to journalConference article

4 Citations (Scopus)

Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method

Ichida, D., Uchida, G., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012002.

Research output: Contribution to journalConference article

3 Citations (Scopus)

Effects of filter gap of cluster-eliminating filter on cluster eliminating efficiency

Hashimoto, Y., Toko, S., Yamashita, D., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., 2014, In : Journal of Physics: Conference Series. 518, 1, 012007.

Research output: Contribution to journalConference article

3 Citations (Scopus)

Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence

Dong, X., Koga, K., Yamashita, D., Seo, H., Itagaki, N., Shiratani, M., Setsuhara, Y., Sekine, M. & Hori, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012010.

Research output: Contribution to journalConference article

1 Citation (Scopus)

Formation of carbon nanoparticle using Ar+CH4 high pressure nanosecond discharges

Koga, K., Dong, X., Iwashita, S., Czarnetzki, U. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012020.

Research output: Contribution to journalConference article

3 Citations (Scopus)

Growth enhancement effects of radish sprouts: Atmospheric pressure plasma irradiation vs. heat shock

Sarinont, T., Amano, T., Kitazaki, S., Koga, K., Uchida, G., Shiratani, M. & Hayashi, N., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012017.

Research output: Contribution to journalConference article

12 Citations (Scopus)

Plasma etching of single fine particle trapped in Ar plasma by optical tweezers

Ito, T., Koga, K., Yamashita, D., Kamataki, K., Itagaki, N., Uchida, G. & Shiratani, M., 2014, In : Journal of Physics: Conference Series. 518, 1, 012014.

Research output: Contribution to journalConference article

3 Citations (Scopus)

Preparation of Si nanoparticles by laser ablation in liquid and their application as photovoltaic material in quantum dot sensitized solar cell

Chewchinda, P., Hayashi, K., Ichida, D., Seo, H., Uchida, G., Shiratani, M., Odawara, O. & Wada, H., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012023.

Research output: Contribution to journalConference article

4 Citations (Scopus)

SiC nanoparticle composite anode for Li-Ion batteries

Shiratani, M., Kamataki, K., Uchida, G., Koga, K., Seo, H., Itagaki, N. & Ishihara, T., Jan 1 2014, In : Materials Research Society Symposium Proceedings. 1678

Research output: Contribution to journalConference article

1 Citation (Scopus)
2013

Growth control of ZnO nano-rod with various seeds and photovoltaic application

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2013, In : Journal of Physics: Conference Series. 441, 1, 012029.

Research output: Contribution to journalConference article

Investigations on plasma-biomolecules interactions as fundamental process for plasma medicine

Takenaka, K., Cho, K., Setsuhara, Y., Shiratani, M., Sekine, M. & Hori, M., Jan 1 2013, In : Journal of Physics: Conference Series. 441, 1, 012001.

Research output: Contribution to journalConference article

9 Citations (Scopus)
2003

Anisotropic plasma chemical vapor deposition of copper films in trenches

Takenaka, K., Onishi, M., Takenshita, M., Kinoshita, T., Koga, K., Shiratani, M. & Watanabe, Y., 2003, In : Materials Research Society Symposium - Proceedings. 766, p. 465-470 6 p.

Research output: Contribution to journalConference article

1 Citation (Scopus)

Cluster-suppressed plasma CVD for deposition of high quality a-Si:H films

Shiratani, M., Koga, K. & Watanabe, Y., Mar 3 2003, In : Thin Solid Films. 427, 1-2, p. 1-5 5 p.

Research output: Contribution to journalConference article

19 Citations (Scopus)

Dust Formation due to Interaction between H2 Plasma and Carbon Wall

Koga, K., Uehara, R., Shiratani, M., Watanabe, Y. & Komori, A., Oct 17 2003, In : IEEE International Conference on Plasma Science. 1 p.

Research output: Contribution to journalConference article

2002

Nucleation and subsequent growth of clusters in reactive plasmas

Watanabe, Y., Shiratani, M. & Koga, K., Aug 2002, In : Plasma Sources Science and Technology. 11, 3 A, p. A229-A233

Research output: Contribution to journalConference article

24 Citations (Scopus)
2001
2 Citations (Scopus)
2000

Deposition of smooth thin Cu films in deep submicron trench by plasma CVD reactor with H atom source

Shiratani, M., Hong Jie Jin, J. J., Nakatake, Y., Koga, K., Kinoshita, T. & Watanabe, Y., 2000, In : Materials Research Society Symposium - Proceedings. 612, p. D921-D926

Research output: Contribution to journalConference article

1 Citation (Scopus)

Methods of suppressing cluster growth in silane RF discharges

Shiratani, M., Maeda, S., Matsuoka, Y., Tanaka, K., Koga, K. & Watanabe, Y., Dec 1 2000, In : Materials Research Society Symposium - Proceedings. 609, p. A561-A566

Research output: Contribution to journalConference article