If you made any changes in Pure these will be visible here soon.

Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 2 Similar Profiles
Chemical mechanical polishing Engineering & Materials Science
Polishing Engineering & Materials Science
Gears Engineering & Materials Science
polishing Physics & Astronomy
Abrasives Engineering & Materials Science
Cytidine Monophosphate Chemical Compounds
Gear teeth Engineering & Materials Science
Substrates Engineering & Materials Science

Network Recent external collaboration on country level. Dive into details by clicking on the dots.

Research Output 1989 2018

Machine vibrations
Vibrations (mechanical)
Gear teeth

Investigation of Surface Excitation Effect for Ablation of 4H-SiC Substrate Using Double-Pulse Beam

Matsunaga, K., Hayashi, T., Kurokawa, S., Yokoo, H., Hasegawa, N., Nishikino, M., Kumada, T., Otobe, T., Matsukawa, Y. & Takaya, Y., Jan 1 2018, X-Ray Lasers 2016 - Proceedings of the 15th International Conference on X-Ray Lasers. Springer Science and Business Media, LLC, Vol. 202. p. 321-326 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

energy absorption

Polishing Characteristics of MnO 2 Polishing Slurry on the Si-face of SiC Wafer

Yin, T., Doi, T., Kurokawa, S., Zhou, Z. Z. & Feng, K. P., Dec 1 2018, In : International Journal of Precision Engineering and Manufacturing. 19, 12, p. 1773-1780 8 p.

Research output: Contribution to journalArticle

Chemical mechanical polishing
Surface morphology
1 Citation (Scopus)

Study of femtosecond laser ablation effect on micro-processing for 4H-SiC substrate

Wang, C., Kurokawa, S., Yuan, J., Fan, L., Lu, H., Wu, Z., Yao, W., Zhang, K., Zhang, Y. & Doi, T., Jan 1 2018, In : International Journal of Automation Technology. 12, 2, p. 187-198 12 p.

Research output: Contribution to journalArticle

Laser ablation
Ultrashort pulses
Semiconductor materials
Data storage equipment