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Fingerprint Fingerprint is based on mining the text of the person's scientific documents to create an index of weighted terms, which defines the key subjects of each individual researcher.

  • 2 Similar Profiles
Chemical mechanical polishing Engineering & Materials Science
Polishing Engineering & Materials Science
Gears Engineering & Materials Science
polishing Physics & Astronomy
Abrasives Engineering & Materials Science
Cytidine Monophosphate Chemical Compounds
Gear teeth Engineering & Materials Science
Substrates Engineering & Materials Science

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Research Output 1989 2018

Gears
Machine vibrations
Vibrations (mechanical)
Gear teeth

Investigation of Surface Excitation Effect for Ablation of 4H-SiC Substrate Using Double-Pulse Beam

Matsunaga, K., Hayashi, T., Kurokawa, S., Yokoo, H., Hasegawa, N., Nishikino, M., Kumada, T., Otobe, T., Matsukawa, Y. & Takaya, Y., Jan 1 2018, X-Ray Lasers 2016 - Proceedings of the 15th International Conference on X-Ray Lasers. Springer Science and Business Media, LLC, Vol. 202. p. 321-326 6 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

ablation
fluence
pulses
excitation
energy absorption

Polishing Characteristics of MnO 2 Polishing Slurry on the Si-face of SiC Wafer

Yin, T., Doi, T., Kurokawa, S., Zhou, Z. Z. & Feng, K. P., Dec 1 2018, In : International Journal of Precision Engineering and Manufacturing. 19, 12, p. 1773-1780 8 p.

Research output: Contribution to journalArticle

Polishing
Ions
Chemical mechanical polishing
Surface morphology
1 Citation (Scopus)

Study of femtosecond laser ablation effect on micro-processing for 4H-SiC substrate

Wang, C., Kurokawa, S., Yuan, J., Fan, L., Lu, H., Wu, Z., Yao, W., Zhang, K., Zhang, Y. & Doi, T., Jan 1 2018, In : International Journal of Automation Technology. 12, 2, p. 187-198 12 p.

Research output: Contribution to journalArticle

Laser ablation
Ultrashort pulses
Scanning
Substrates
Processing
Semiconductor materials
Data storage equipment