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Research Output 1991 2019

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Conference article
2017
2 Citations (Scopus)

Characterization of Si thin films doped by wet-chemical laser processing

Suwa, A., Tanaka, N., Sadoh, T., Nakamura, D. & Ikenoue, H., Jan 1 2017, In : Digest of Technical Papers - SID International Symposium. 48, 1, p. 430-432 3 p.

Research output: Contribution to journalConference article

Chemical lasers
Doping (additives)
Thin films
Processing
Ion implantation
2014

Formation of large grain Ge single crystal on insulating substrate by liquid-solid coexisting annealing of a-Ge(Sn)

Matsumura, R., Kai, Y., Chikita, H., Sadoh, T. & Miyao, M., Jan 1 2014, In : ECS Transactions. 61, 3, p. 97-100 4 p.

Research output: Contribution to journalConference article

annealing
Single crystals
Annealing
crystal
substrate
2012
2 Citations (Scopus)

Self organization of FeGe/FeSi/FeGe layered structures on Ge and their electrical conduction properties

Matsukura, B., Hiraiwa, Y., Nakajima, T., Narumi, K., Sakai, S., Sadoh, T., Miyao, M. & Maeda, Y., Jan 1 2012, In : Physics Procedia. 23, p. 21-24 4 p.

Research output: Contribution to journalConference article

conduction
insulators
decomposition
temperature dependence
microstructure
2006

Low temperature crystallization of a-SiGe on insulating films for thin film transistor application

Miyao, M., Kanno, H., Tsunoda, I. & Sadoh, T., Dec 1 2006, In : ECS Transactions. 3, 7, p. 613-626 14 p.

Research output: Contribution to journalConference article

Thin film transistors
Crystallization
Crystal growth
Temperature
Semiconductor materials
2005
17 Citations (Scopus)

Pulsed laser crystallization of silicon-germanium films

Sameshima, T., Watakabe, H., Kanno, H., Sadoh, T. & Miyao, M., Sep 1 2005, In : Thin Solid Films. 487, 1-2, p. 67-71 5 p.

Research output: Contribution to journalConference article

Germanium
Silicon
Crystallization
Pulsed lasers
germanium
2004
2 Citations (Scopus)

Enhancement of metal-induced crystallization in Ge/Si/Ni/SiO2 layered structure

Kanno, H., Kenjo, A., Sadoh, T. & Miyao, M., Mar 22 2004, In : Thin Solid Films. 451-452, p. 324-327 4 p.

Research output: Contribution to journalConference article

Crystallization
Metals
Annealing
crystallization
Polysilicon

Formation of polycrystalline-silicon-germanium films by pulsed laser-induced rapid annealing

Watakabe, H., Sameshima, T., Kanno, H., Sadoh, T. & Miyao, M., Dec 1 2004, In : Proceedings of SPIE - The International Society for Optical Engineering. 5662, p. 428-431 4 p., 69.

Research output: Contribution to journalConference article

Germanium
Pulsed Laser
Pulsed lasers
Annealing
Polysilicon
1 Citation (Scopus)

Formation of SiGe/β-FeSi2 superstructures from amorphous Si/FeSiGe layers

Sadoh, T., Owatari, M., Murakami, Y., Kenjo, A., Yoshitake, T., Itakura, M., Enokida, T. & Miyao, M., Aug 2 2004, In : Thin Solid Films. 461, 1, p. 77-80 4 p.

Research output: Contribution to journalConference article

Annealing
annealing
agglomeration
Nanocrystals
nanocrystals
2 Citations (Scopus)

Impurity conduction in ion beam synthesized β-FeSi2/Si

Murakami, Y., Tsukahara, Y., Kenjo, A., Sadoh, T., Maeda, Y. & Miyao, M., Aug 2 2004, In : Thin Solid Films. 461, 1, p. 198-201 4 p.

Research output: Contribution to journalConference article

Ion beams
ion beams
Impurities
conduction
impurities
6 Citations (Scopus)

Solid-phase crystallization of high-quality Si films on SiO2 by local Ge-insertion

Tsunoda, I., Nagatomo, K., Kenjo, A., Sadoh, T. & Miyao, M., Mar 22 2004, In : Thin Solid Films. 451-452, p. 489-492 4 p.

Research output: Contribution to journalConference article

Crystallization
solid phases
insertion
crystallization
Nucleation
7 Citations (Scopus)

Solid-phase crystallization of β-FeSi2 thin film in Fe/Si structure

Murakami, Y., Kenjo, A., Sadoh, T., Yoshitake, T. & Miyao, M., Aug 2 2004, In : Thin Solid Films. 461, 1, p. 68-71 4 p.

Research output: Contribution to journalConference article

Crystallization
solid phases
crystallization
Thin films
Lattice mismatch
7 Citations (Scopus)

Thin Solid Films: Preface

Maeda, Y. Y., Homewood, K. P., Suemasu, T., Sadoh, T., Udono, H. & Kenji, Y., Aug 2 2004, In : Thin Solid Films. 461, 1, 1 p.

Research output: Contribution to journalConference article

2003
5 Citations (Scopus)

Enhanced solid-phase growth of β-FeSi2 by pre-amorphization

Murakami, Y., Tsunoda, I., Kido, H., Kenjo, A., Sadoh, T., Miyao, M. & Yoshitake, T., May 1 2003, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 206, p. 304-307 4 p.

Research output: Contribution to journalConference article

Amorphization
solid phases
Annealing
annealing
room temperature
3 Citations (Scopus)

Enhancement of bulk nucleation in a-Si1-xGex on SiO2 for low-temperature solid-phase crystallization

Sadoh, T., Tsunoda, I., Nagata, T., Kenjo, A. & Miyao, M., Mar 3 2003, In : Thin Solid Films. 427, 1-2, p. 96-100 5 p.

Research output: Contribution to journalConference article

Crystallization
solid phases
Nucleation
nucleation
crystallization
9 Citations (Scopus)

Etching characteristics of SiO2 irradiated with focused ion beam

Sadoh, T., Eguchi, H., Kenjo, A. & Miyao, M., May 1 2003, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 206, p. 478-481 4 p.

Research output: Contribution to journalConference article

Focused ion beams
Etching
ion beams
etching
dosage
9 Citations (Scopus)

Ion-beam irradiation effect on solid-phase growth of β-FeSi2

Murakami, Y., Kido, H., Kenjo, A., Sadoh, T., Yoshitake, T. & Miyao, M., Mar 1 2003, In : Physica E: Low-Dimensional Systems and Nanostructures. 16, 3-4, p. 505-508 4 p.

Research output: Contribution to journalConference article

Ion beams
solid phases
Amorphization
ion beams
Irradiation

Position control of nucleation in solid-phase crystallization of a-Si/SiO2 by Ge layer insertion

Sadoh, T., Nagatomo, K., Tsunoda, I., Kenjo, A. & Miyao, M., Dec 1 2003, In : Materials Research Society Symposium - Proceedings. 796, p. 39-43 5 p.

Research output: Contribution to journalConference article

Position control
Crystallization
solid phases
insertion
Nucleation

Relaxation process of ion irradiation defects in IV-semiconductors

Murakami, Y., Miyata, M., Kenjo, A., Sadoh, T. & Miyao, M., Sep 15 2003, In : Materials Science and Engineering B: Solid-State Materials for Advanced Technology. 102, 1-3, p. 362-365 4 p.

Research output: Contribution to journalConference article

Relaxation processes
Ion bombardment
ion irradiation
Semiconductor materials
dosage
2002

500°C formation of poly-Si1-xGex (x ≥ 0.5) on SiO2 by ion-beam stimulated solid phase crystallization

Tsunoda, I., Kanno, H., Kenjo, A., Sadoh, T. & Miyao, M., Dec 1 2002, In : Materials Research Society Symposium - Proceedings. 744, p. 501-505 5 p.

Research output: Contribution to journalConference article

Crystallization
stimulation
Ion beams
solid phases
ion beams

Metal-induced low-temperature crystallization of amorphous SiGe on insulating films

Miyao, M., Kanno, H., Tsunoda, I., Sadoh, T. & Kenjo, A., Dec 1 2002, In : Materials Research Society Symposium - Proceedings. 744, p. 55-59 5 p.

Research output: Contribution to journalConference article

Crystallization
Metals
dendrites
crystallization
metals
2001
5 Citations (Scopus)

Dose rate dependence of ion-induced-damage in Si evaluated by spectroscopic ellipsometry

Murakami, Y., Yamauchi, H., Sadoh, T., Kenjo, A. & Miyao, M., Jan 1 2001, In : Solid State Phenomena. 78-79, p. 341-344 4 p.

Research output: Contribution to journalConference article

Spectroscopic ellipsometry
ellipsometry
Ions
damage
dosage
2000
1 Citation (Scopus)

ECR plasma oxidation: Dependence on energy of argon ion

Matsuo, S., Yamamoto, M., Sadoh, T., Tsurushima, T., Gao, D. W., Furukawa, K. & Nakashima, H., Dec 1 2000, In : Materials Research Society Symposium - Proceedings. 585, p. 171-176 6 p.

Research output: Contribution to journalConference article

Electron cyclotron resonance
Argon
electron cyclotron resonance
argon
Ions
1995
2 Citations (Scopus)

Recombination-enhanced migration of interstitial iron in silicon

Nakashima, H., Sadoh, T. & Tsurushima, T., Dec 1 1995, In : Materials Science Forum. 196-201, pt 3, p. 1351-1356 6 p.

Research output: Contribution to journalConference article

Hole traps
Electron traps
Boron
Silicon
Electric space charge
1994
6 Citations (Scopus)

Deep levels of vanadium- and chromium-hydrogen complexes in silicon

Sadoh, T., Watanabe, M., Nakashima, H. & Tsurushima, T., Dec 1 1994, In : Materials Science Forum. 143-4, pt 2, p. 939-944 6 p.

Research output: Contribution to journalConference article

Vanadium
Chromium
Silicon
vanadium
Hydrogen
39 Citations (Scopus)

Diffusion and electrical properties of 3d transition-metal impurity series in silicon

Nakashima, H., Sadoh, T., Kitagawa, H. & Hashimoto, K., Dec 1 1994, In : Materials Science Forum. 143-4, pt 2, p. 761-766 6 p.

Research output: Contribution to journalConference article

Deep level transient spectroscopy
electrical property
transition element
Silicon
silicon