Taizoh Sadoh &ndash; Research Output

2017

Characterization of Si thin films doped by wet-chemical laser processing

Suwa, A., Tanaka, N., Sadoh, T., Nakamura, D. & Ikenoue, H., Jan 1 2017, In : Digest of Technical Papers - SID International Symposium. 48, 1, p. 430-432 3 p.

Research output: Contribution to journal › Conference article

Chemical lasers

Doping (additives)

Thin films

Processing

Ion implantation

2014

Formation of large grain Ge single crystal on insulating substrate by liquid-solid coexisting annealing of a-Ge(Sn)

Matsumura, R., Kai, Y., Chikita, H., Sadoh, T. & Miyao, M., Jan 1 2014, In : ECS Transactions. 61, 3, p. 97-100 4 p.

Research output: Contribution to journal › Conference article

annealing

Single crystals

Annealing

crystal

substrate

2012

2 Citations (Scopus)

Self organization of FeGe/FeSi/FeGe layered structures on Ge and their electrical conduction properties

Matsukura, B., Hiraiwa, Y., Nakajima, T., Narumi, K., Sakai, S., Sadoh, T., Miyao, M. & Maeda, Y., Jan 1 2012, In : Physics Procedia. 23, p. 21-24 4 p.

Research output: Contribution to journal › Conference article

conduction

insulators

decomposition

temperature dependence

microstructure

2006

Low temperature crystallization of a-SiGe on insulating films for thin film transistor application

Miyao, M., Kanno, H., Tsunoda, I. & Sadoh, T., Dec 1 2006, In : ECS Transactions. 3, 7, p. 613-626 14 p.

Research output: Contribution to journal › Conference article

Thin film transistors

Crystallization

Crystal growth

Temperature

Semiconductor materials

2005

17 Citations (Scopus)

Pulsed laser crystallization of silicon-germanium films

Sameshima, T., Watakabe, H., Kanno, H., Sadoh, T. & Miyao, M., Sep 1 2005, In : Thin Solid Films. 487, 1-2, p. 67-71 5 p.

Research output: Contribution to journal › Conference article

Germanium

Silicon

Crystallization

Pulsed lasers

germanium

2004

2 Citations (Scopus)

Enhancement of metal-induced crystallization in Ge/Si/Ni/SiO₂ layered structure

Kanno, H., Kenjo, A., Sadoh, T. & Miyao, M., Mar 22 2004, In : Thin Solid Films. 451-452, p. 324-327 4 p.

Research output: Contribution to journal › Conference article

Crystallization

Metals

Annealing

crystallization

Polysilicon

Formation of polycrystalline-silicon-germanium films by pulsed laser-induced rapid annealing

Watakabe, H., Sameshima, T., Kanno, H., Sadoh, T. & Miyao, M., Dec 1 2004, In : Proceedings of SPIE - The International Society for Optical Engineering. 5662, p. 428-431 4 p., 69.

Research output: Contribution to journal › Conference article

Germanium

Pulsed Laser

Pulsed lasers

Annealing

Polysilicon

1 Citation (Scopus)

Formation of SiGe/β-FeSi₂ superstructures from amorphous Si/FeSiGe layers

Sadoh, T., Owatari, M., Murakami, Y., Kenjo, A., Yoshitake, T., Itakura, M., Enokida, T. & Miyao, M., Aug 2 2004, In : Thin Solid Films. 461, 1, p. 77-80 4 p.

Research output: Contribution to journal › Conference article

Annealing

annealing

agglomeration

Nanocrystals

nanocrystals

2 Citations (Scopus)

Impurity conduction in ion beam synthesized β-FeSi₂/Si

Murakami, Y., Tsukahara, Y., Kenjo, A., Sadoh, T., Maeda, Y. & Miyao, M., Aug 2 2004, In : Thin Solid Films. 461, 1, p. 198-201 4 p.

Research output: Contribution to journal › Conference article

Ion beams

ion beams

Impurities

conduction

impurities

6 Citations (Scopus)

Solid-phase crystallization of high-quality Si films on SiO₂ by local Ge-insertion

Tsunoda, I., Nagatomo, K., Kenjo, A., Sadoh, T. & Miyao, M., Mar 22 2004, In : Thin Solid Films. 451-452, p. 489-492 4 p.

Research output: Contribution to journal › Conference article

Crystallization

solid phases

insertion

crystallization

Nucleation

7 Citations (Scopus)

Solid-phase crystallization of β-FeSi2 thin film in Fe/Si structure

Murakami, Y., Kenjo, A., Sadoh, T., Yoshitake, T. & Miyao, M., Aug 2 2004, In : Thin Solid Films. 461, 1, p. 68-71 4 p.

Research output: Contribution to journal › Conference article

Crystallization

solid phases

crystallization

Thin films

Lattice mismatch

7 Citations (Scopus)

Thin Solid Films: Preface

Maeda, Y. Y., Homewood, K. P., Suemasu, T., Sadoh, T., Udono, H. & Kenji, Y., Aug 2 2004, In : Thin Solid Films. 461, 1, 1 p.

Research output: Contribution to journal › Conference article

2003

5 Citations (Scopus)

Enhanced solid-phase growth of β-FeSi₂ by pre-amorphization

Murakami, Y., Tsunoda, I., Kido, H., Kenjo, A., Sadoh, T., Miyao, M. & Yoshitake, T., May 1 2003, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 206, p. 304-307 4 p.

Research output: Contribution to journal › Conference article

Amorphization

solid phases

Annealing

annealing

room temperature

3 Citations (Scopus)

Enhancement of bulk nucleation in a-Si1-xGex on SiO2 for low-temperature solid-phase crystallization

Sadoh, T., Tsunoda, I., Nagata, T., Kenjo, A. & Miyao, M., Mar 3 2003, In : Thin Solid Films. 427, 1-2, p. 96-100 5 p.

Research output: Contribution to journal › Conference article

Crystallization

solid phases

Nucleation

nucleation

crystallization

9 Citations (Scopus)

Etching characteristics of SiO2 irradiated with focused ion beam

Sadoh, T., Eguchi, H., Kenjo, A. & Miyao, M., May 1 2003, In : Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms. 206, p. 478-481 4 p.

Research output: Contribution to journal › Conference article

Focused ion beams

Etching

ion beams

etching

dosage

9 Citations (Scopus)

Ion-beam irradiation effect on solid-phase growth of β-FeSi₂

Murakami, Y., Kido, H., Kenjo, A., Sadoh, T., Yoshitake, T. & Miyao, M., Mar 1 2003, In : Physica E: Low-Dimensional Systems and Nanostructures. 16, 3-4, p. 505-508 4 p.

Research output: Contribution to journal › Conference article

Ion beams

solid phases

Amorphization

ion beams

Irradiation

Position control of nucleation in solid-phase crystallization of a-Si/SiO₂ by Ge layer insertion

Sadoh, T., Nagatomo, K., Tsunoda, I., Kenjo, A. & Miyao, M., Dec 1 2003, In : Materials Research Society Symposium - Proceedings. 796, p. 39-43 5 p.

Research output: Contribution to journal › Conference article

Position control

Crystallization

solid phases

insertion

Nucleation

Relaxation process of ion irradiation defects in IV-semiconductors

Murakami, Y., Miyata, M., Kenjo, A., Sadoh, T. & Miyao, M., Sep 15 2003, In : Materials Science and Engineering B: Solid-State Materials for Advanced Technology. 102, 1-3, p. 362-365 4 p.

Research output: Contribution to journal › Conference article

Relaxation processes

Ion bombardment

ion irradiation

Semiconductor materials

dosage

2002

500°C formation of poly-Si_1-xGe_x (x ≥ 0.5) on SiO₂ by ion-beam stimulated solid phase crystallization

Tsunoda, I., Kanno, H., Kenjo, A., Sadoh, T. & Miyao, M., Dec 1 2002, In : Materials Research Society Symposium - Proceedings. 744, p. 501-505 5 p.

Research output: Contribution to journal › Conference article

Crystallization

stimulation

Ion beams

solid phases

ion beams

Metal-induced low-temperature crystallization of amorphous SiGe on insulating films

Miyao, M., Kanno, H., Tsunoda, I., Sadoh, T. & Kenjo, A., Dec 1 2002, In : Materials Research Society Symposium - Proceedings. 744, p. 55-59 5 p.

Research output: Contribution to journal › Conference article

Crystallization

Metals

dendrites

crystallization

metals

2001

5 Citations (Scopus)

Dose rate dependence of ion-induced-damage in Si evaluated by spectroscopic ellipsometry

Murakami, Y., Yamauchi, H., Sadoh, T., Kenjo, A. & Miyao, M., Jan 1 2001, In : Solid State Phenomena. 78-79, p. 341-344 4 p.

Research output: Contribution to journal › Conference article

Spectroscopic ellipsometry

ellipsometry

Ions

damage

dosage

2000

1 Citation (Scopus)

ECR plasma oxidation: Dependence on energy of argon ion

Matsuo, S., Yamamoto, M., Sadoh, T., Tsurushima, T., Gao, D. W., Furukawa, K. & Nakashima, H., Dec 1 2000, In : Materials Research Society Symposium - Proceedings. 585, p. 171-176 6 p.

Research output: Contribution to journal › Conference article

Electron cyclotron resonance

Argon

electron cyclotron resonance

argon

Ions

1995

2 Citations (Scopus)

Recombination-enhanced migration of interstitial iron in silicon

Nakashima, H., Sadoh, T. & Tsurushima, T., Dec 1 1995, In : Materials Science Forum. 196-201, pt 3, p. 1351-1356 6 p.

Research output: Contribution to journal › Conference article

Hole traps

Electron traps

Boron

Silicon

Electric space charge

1994

6 Citations (Scopus)

Deep levels of vanadium- and chromium-hydrogen complexes in silicon

Sadoh, T., Watanabe, M., Nakashima, H. & Tsurushima, T., Dec 1 1994, In : Materials Science Forum. 143-4, pt 2, p. 939-944 6 p.

Research output: Contribution to journal › Conference article

Vanadium

Chromium

Silicon

vanadium

Hydrogen

39 Citations (Scopus)

Diffusion and electrical properties of 3d transition-metal impurity series in silicon

Nakashima, H., Sadoh, T., Kitagawa, H. & Hashimoto, K., Dec 1 1994, In : Materials Science Forum. 143-4, pt 2, p. 761-766 6 p.

Research output: Contribution to journal › Conference article

Deep level transient spectroscopy

electrical property

transition element

Silicon

silicon