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Fingerprint Dive into the research topics where Terutake Hayashi is active. These topic labels come from the works of this person. Together they form a unique fingerprint.

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Lasers Engineering & Materials Science
Microspheres Engineering & Materials Science
Polarization Engineering & Materials Science
Coordinate measuring machines Engineering & Materials Science
Fluorescence Engineering & Materials Science
Nanoparticles Engineering & Materials Science
trapping Physics & Astronomy
Abrasives Engineering & Materials Science

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Research Output 1997 2019

CMP characteristics of quartz glass substrate by aggregated colloidal ceria slurry

Wakamatsu, K., Kurokawa, S., Toyama, T. & Hayashi, T., Nov 1 2019, In : Precision Engineering. 60, p. 458-464 7 p.

Research output: Contribution to journalArticle

Cerium compounds
Quartz
Glass
Substrates
Polishing
Abrasives
Viscosity
Nanoparticles
Shear viscosity
Compensation and Redress

Dynamics of photo-excitation for the ablation of 4H-SiC substrate using femtosecond laser

Matsunaga, K., Hayashi, T., Kurokawa, S., Yokoo, H., Hasegawa, N., Nishikino, M. & Matsukawa, Y., Nov 13 2017.

Research output: Contribution to conferencePaper

Photoexcitation
Ablation
Ultrashort pulses
Substrates
Ultrafast lasers

Effect of plasma formation on the double pulse laser excitation of cubic silicon carbide

Otobe, T., Hayashi, T. & Nishikino, M., Oct 23 2017, In : Applied Physics Letters. 111, 17, 171107.

Research output: Contribution to journalArticle

silicon carbides
pulses
excitation
lasers
energy absorption

Brownian diffusion analysis for nano-abrasives in CMP slurry by using fluorescence polarization method

Hayashi, T., Toshiki, S. & Kurokawa, S., Feb 17 2016, 2015 International Conference on Planarization/CMP Technology, ICPT 2015. Institute of Electrical and Electronics Engineers Inc., 7411985. (2015 International Conference on Planarization/CMP Technology, ICPT 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Cytidine Monophosphate
Abrasives
Fluorescence
Polarization
Particle size analysis