| Translated title of the contribution | Indentation-Induced Solid-Phase Crystallization of SiGe on Insulator |
|---|---|
| Original language | Japanese |
| Pages (from-to) | 31-34 |
| Number of pages | 4 |
| Journal | 電気学会研究会資料. EFM, 電子材料研究会 |
| Volume | 2008 |
| Issue number | 24 |
| Publication status | Published - Sept 27 2008 |
絶縁膜上における非晶質SiGeのインデント誘起固相成長
都甲 薫, 佐道 泰造, 宮尾 正信
Research output: Contribution to journal › Article › peer-review