3-D conical microchannel fabricated by wet etching using Ti/Au sacrificial layer

Hirotaka Sugiura, Shinya Sakuma, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose a method to fabricate conical microchannel in the glass microfluidic chip. The method is based on wet etching technique with different undercut ratio of the mask materials. By using this technique, we can fabricate the microchannel having the conical nozzle functions. The fabricated structure had highly reproducible shape. In addition, the process itself was relatively easy. The key point was to prepare an optimal sacrificial layer fabricated of Ti/Au alloy with a certain condition. The fabricated conical nozzle were utilized to transported cells smoothly from the bold channel to the narrow channel. This was because the conical nozzle had a preferable flow profiles to center cells on the cross section of the channel by the lifting force. This technology solves the problem of cell clogging at the entrance of narrow microchannel.

Original languageEnglish
Title of host publication22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
PublisherChemical and Biological Microsystems Society
Pages525-527
Number of pages3
ISBN (Electronic)9781510897571
Publication statusPublished - 2018
Externally publishedYes
Event22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 - Kaohsiung, Taiwan, Province of China
Duration: Nov 11 2018Nov 15 2018

Publication series

Name22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Volume1

Conference

Conference22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Country/TerritoryTaiwan, Province of China
CityKaohsiung
Period11/11/1811/15/18

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Bioengineering
  • Chemical Engineering (miscellaneous)
  • Control and Systems Engineering

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