3D nanoarchitecture from ultrathin titania film via surface sol-gel process and photolithography

Shigenori Fujikawa, Toyoki Kunitake

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

We demonstrated the fabrication of 3D nano-architectures composed of ultrathin TiO2-gel (titania) layers. Titania films with a thickness of a few tens nanometers are prepared on lithographically-fabricated line and hole patterns by the surface sol-gel process. Oxygen plasma treatment is employed to remove the template moiety, and gives positive replicas of the template structures.

Original languageEnglish
Pages (from-to)1414-1415
Number of pages2
JournalChemistry Letters
Volume34
Issue number10
DOIs
Publication statusPublished - Oct 5 2005
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Chemistry(all)

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