高傾斜3軸試料ホルダーを用いたSi単結晶中の転位の3D観察

Translated title of the contribution: 3D Observation of Dislocations in Si Single Crystal using a High-angle Triple-axis (HATA) Specimen Holder

波多聰, 宮崎裕也, 田中將己, 東田賢二

Research output: Contribution to journal › Review article › peer-review

Translated title of the contribution	3D Observation of Dislocations in Si Single Crystal using a High-angle Triple-axis (HATA) Specimen Holder
Original language	Japanese
Pages (from-to)	785
Journal	まてりあ : 日本金属学会会報
Volume	46
Issue number	12
DOIs	https://doi.org/10.2320/materia.46.785
Publication status	Published - Dec 1 2007

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title = "高傾斜3軸試料ホルダーを用いたSi単結晶中の転位の3D観察",

author = "聰波多 and 裕也宮崎 and 將己田中 and 賢二東田",

year = "2007",

month = dec,

day = "1",

doi = "10.2320/materia.46.785",

language = "日本語",

volume = "46",

pages = "785",

journal = "まてりあ : 日本金属学会会報",

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TY - JOUR

T1 - 高傾斜3軸試料ホルダーを用いたSi単結晶中の転位の3D観察

AU - 波多, 聰

AU - 宮崎, 裕也

AU - 田中, 將己

AU - 東田, 賢二

PY - 2007/12/1

Y1 - 2007/12/1

U2 - 10.2320/materia.46.785

DO - 10.2320/materia.46.785

M3 - 総説

VL - 46

SP - 785

JO - まてりあ : 日本金属学会会報

JF - まてりあ : 日本金属学会会報

SN - 1340-2625

IS - 12

ER -