Abstract
Deep ultraviolet light source using passively Q-switch Nd:YAG laser was proposed and designed for soft laser ablation on scanning electron microscopic application. Design wavelength is from 193 nm to 196.7 nm that exceeds 6.3 eV in photon energy for chemical dissociation of organic sample. Frequency mixing of 4th harmonic beam and optical parametric generated red beam are adopted by using flux-less BBO crystal. Initial design of BBO and PPLN-OPG has been performed.
| Original language | English |
|---|---|
| Title of host publication | Laser Ignition Conference, LIC 2017 |
| Publisher | OSA - The Optical Society |
| ISBN (Electronic) | 9781557528209 |
| DOIs | |
| Publication status | Published - Jan 1 2017 |
| Event | Laser Ignition Conference, LIC 2017 - Bucharest, Romania Duration: Jul 20 2017 → Jul 23 2017 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| Volume | Part F67-LIC 2017 |
Conference
| Conference | Laser Ignition Conference, LIC 2017 |
|---|---|
| Country | Romania |
| City | Bucharest |
| Period | 7/20/17 → 7/23/17 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
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Oki, Y., Ohe, T., Yoshioka, H., Kosaka, K., & Kanemaru, T. (2017). 6.3 eV duv generation based on microchip Nd: YAG laser. In Laser Ignition Conference, LIC 2017 (Optics InfoBase Conference Papers; Vol. Part F67-LIC 2017). OSA - The Optical Society. https://doi.org/10.1364/LIC.2017.LWA5.10