Abstract
Deep ultraviolet light source using passively Q-switch Nd:YAG laser was proposed and designed for soft laser ablation on scanning electron microscopic application. Design wavelength is from 193 nm to 196.7 nm that exceeds 6.3 eV in photon energy for chemical dissociation of organic sample. Frequency mixing of 4th harmonic beam and optical parametric generated red beam are adopted by using flux-less BBO crystal. Initial design of BBO and PPLN-OPG has been performed.
| Original language | English |
|---|---|
| Title of host publication | Laser Ignition Conference, LIC 2017 |
| Publisher | OSA - The Optical Society |
| ISBN (Electronic) | 9781557528209 |
| DOIs | |
| Publication status | Published - Jan 1 2017 |
| Event | Laser Ignition Conference, LIC 2017 - Bucharest, Romania Duration: Jul 20 2017 → Jul 23 2017 |
Publication series
| Name | Optics InfoBase Conference Papers |
|---|---|
| Volume | Part F67-LIC 2017 |
Conference
| Conference | Laser Ignition Conference, LIC 2017 |
|---|---|
| Country | Romania |
| City | Bucharest |
| Period | 7/20/17 → 7/23/17 |
Fingerprint
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
Cite this
6.3 eV duv generation based on microchip Nd : YAG laser. / Oki, Yuji; Ohe, Takashi; Yoshioka, Hiroaki; Kosaka, Koji; Kanemaru, Takaaki.
Laser Ignition Conference, LIC 2017. OSA - The Optical Society, 2017. (Optics InfoBase Conference Papers; Vol. Part F67-LIC 2017).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - 6.3 eV duv generation based on microchip Nd
T2 - YAG laser
AU - Oki, Yuji
AU - Ohe, Takashi
AU - Yoshioka, Hiroaki
AU - Kosaka, Koji
AU - Kanemaru, Takaaki
PY - 2017/1/1
Y1 - 2017/1/1
N2 - Deep ultraviolet light source using passively Q-switch Nd:YAG laser was proposed and designed for soft laser ablation on scanning electron microscopic application. Design wavelength is from 193 nm to 196.7 nm that exceeds 6.3 eV in photon energy for chemical dissociation of organic sample. Frequency mixing of 4th harmonic beam and optical parametric generated red beam are adopted by using flux-less BBO crystal. Initial design of BBO and PPLN-OPG has been performed.
AB - Deep ultraviolet light source using passively Q-switch Nd:YAG laser was proposed and designed for soft laser ablation on scanning electron microscopic application. Design wavelength is from 193 nm to 196.7 nm that exceeds 6.3 eV in photon energy for chemical dissociation of organic sample. Frequency mixing of 4th harmonic beam and optical parametric generated red beam are adopted by using flux-less BBO crystal. Initial design of BBO and PPLN-OPG has been performed.
UR - http://www.scopus.com/inward/record.url?scp=85035132517&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85035132517&partnerID=8YFLogxK
U2 - 10.1364/LIC.2017.LWA5.10
DO - 10.1364/LIC.2017.LWA5.10
M3 - Conference contribution
AN - SCOPUS:85035132517
T3 - Optics InfoBase Conference Papers
BT - Laser Ignition Conference, LIC 2017
PB - OSA - The Optical Society
ER -