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2012
12 Citations (Scopus)

Combinatorial deposition of microcrystalline silicon films using multihollow discharge plasma chemical vapor deposition

Koga, K., Matsunaga, T., Kim, Y., Nakahara, K., Yamashita, D., Matsuzaki, H., Kamataki, K., Uchida, G., Itagaki, N. & Shiratani, M., Jan 1 2012, In : Japanese Journal of Applied Physics. 51, 1 PART 2, 01AD02.

Research output: Contribution to journalArticle

Microcrystalline silicon
silicon films
plasma jets
Chemical vapor deposition
vapor deposition
2013
28 Citations (Scopus)

Analysis on the effect of polysulfide electrolyte composition for higher performance of Si quantum dot-sensitized solar cells

Seo, H., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Apr 15 2013, In : Electrochimica Acta. 95, p. 43-47 5 p.

Research output: Contribution to journalArticle

Polysulfides
Electrolytes
Semiconductor quantum dots
Redox reactions
Solar cells
2016
1 Citation (Scopus)
Optical band gaps
Composite films
Nanoparticles
plasma jets
Chemical vapor deposition
2012
15 Citations (Scopus)

Effect of nitridation of si nanoparticles on the performance of quantum-dot sensitized solar cells

Uchida, G., Yamamoto, K., Sato, M., Kawashima, Y., Nakahara, K., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2012, In : Japanese journal of applied physics. 51, 1 PART 2, 01AD01.

Research output: Contribution to journalArticle

Nitridation
Semiconductor quantum dots
Solar cells
solar cells
quantum dots
2014
2 Citations (Scopus)

Growth mechanism of ZnO deposited by nitrogen mediated crystallization

Suhariadi, I., Shiratani, M. & Itagaki, N., Sep 1 2014, In : Materials Research Express. 1, 3, 036403.

Research output: Contribution to journalArticle

Crystallization
Nitrogen
Nucleation
Buffer layers
Zinc Oxide
2011
10 Citations (Scopus)

Impacts of amplitude modulation of RF discharge voltage on the growth of nanoparticles in reactive plasmas

Kamataki, K., Miyata, H., Koga, K., Uchida, G., Itagaki, N. & Shiratani, M., Oct 1 2011, In : Applied Physics Express. 4, 10, 105001.

Research output: Contribution to journalArticle

Amplitude modulation
Nanoparticles
Plasmas
nanoparticles
Electric potential
53 Citations (Scopus)

Highly conducting and very thin ZnO: AI films with ZnO buffer layer fabricated by solid phase crystallization from amorphous phase

Itagaki, N., Kuwahara, K., Nakahara, K., Yamashita, D., Uchida, G., Koga, K. & Shiratani, M., Jan 2011, In : Applied Physics Express. 4, 1, 011101.

Research output: Contribution to journalArticle

Buffer layers
solid phases
buffers
Crystallization
crystallization
2013
18 Citations (Scopus)

Characterization of the energy flux toward the substrate during magnetron sputter deposition of ZnO thin films

Bornholdt, S., Itagaki, N., Kuwahara, K., Wulff, H., Shiratani, M. & Kersten, H., Apr 1 2013, In : Plasma Sources Science and Technology. 22, 2, 025019.

Research output: Contribution to journalArticle

thin films
probes
charge carriers
ion impact
energy
8 Citations (Scopus)

Characteristics of photocurrent generation in the near-ultraviolet region in Si quantum-dot sensitized solar cells

Uchida, G., Sato, M., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Oct 1 2013, In : Thin Solid Films. 544, p. 93-98 6 p.

Research output: Contribution to journalArticle

Photocurrents
Semiconductor quantum dots
photocurrents
Solar cells
solar cells
2017

Performance enhancement of quantum dot-sensitized solar cells based on polymer nano-composite catalyst

Seo, H., Gopi, C. V. V. M., Kim, H. J., Itagaki, N., Koga, K. & Shiratani, M., Sep 20 2017, In : Electrochimica Acta. 249, p. 337-342 6 p.

Research output: Contribution to journalArticle

Semiconductor quantum dots
Solar cells
Polymers
Electrodes
Catalysts
2014
7 Citations (Scopus)

Theory for correlation between plasma fluctuation and fluctuation of nanoparticle growth in reactive plasmas

Shiratani, M., Koga, K., Kamataki, K., Iwashita, S., Uchida, G., Seo, H. & Itagaki, N., Jan 1 2014, In : Japanese journal of applied physics. 53, 1, 010201.

Research output: Contribution to journalArticle

Nanoparticles
Plasmas
nanoparticles
nanofabrication
Nanostructures
4 Citations (Scopus)

Preparation of Si nanoparticles by laser ablation in liquid and their application as photovoltaic material in quantum dot sensitized solar cell

Chewchinda, P., Hayashi, K., Ichida, D., Seo, H., Uchida, G., Shiratani, M., Odawara, O. & Wada, H., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012023.

Research output: Contribution to journalConference article

laser ablation
solar cells
quantum dots
nanoparticles
preparation
2018

ZnS/SiO2 passivation layer for high-performance of TiO2/CuInS2 quantum dot sensitized solar cells

Kim, H. J., Bae, J. H., Seo, H., Shiratani, M. & Gopi, C. V. V. M., Aug 2018, In : Energies. 11, 8, 1931.

Research output: Contribution to journalArticle

Passivation
TiO2
SiO2
Solar Cells
Quantum Dots
2012
4 Citations (Scopus)

Evaluation of Crystal Orientation for (K,Na)NbO3 Films Using X-ray Diffraction Reciprocal Space map and relationship between crystal orientation and piezoelectric coefficient

Shibata, K., Suenaga, K., Watanabe, K., Horikiri, F., Mishima, T. & Shiratani, M., Jul 1 2012, In : Japanese Journal of Applied Physics. 51, 7 PART 1, 075502.

Research output: Contribution to journalArticle

Crystal orientation
X ray diffraction
evaluation
coefficients
diffraction
2018

Effects of sputtering pressure on (Zno)x(inn)1-x crystal film growth at 450ºc

Itagaki, N., Takeuchi, K., Miyahara, N., Imoto, K., Seo, H., Koga, K. & Shiratani, M., Jan 1 2018, THERMEC 2018. Shabadi, R., Chandra, T., Ionescu, M., Jeandin, M. & Richard, C. (eds.). Trans Tech Publications Ltd, p. 2093-2098 6 p. (Materials Science Forum; vol. 941 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Film growth
Crystal growth
Sputtering
sputtering
crystals
2012
5 Citations (Scopus)

Control of radial density profile of nano-particles produced in reactive plasma by amplitude modulation of radio frequency discharge voltage

Kamataki, K., Koga, K., Uchida, G., Itagaki, N., Yamashita, D., Matsuzaki, H. & Shiratani, M., Nov 15 2012, In : Thin Solid Films. 523, p. 76-79 4 p.

Research output: Contribution to journalArticle

radio frequency discharge
Amplitude modulation
Plasmas
Electric potential
electric potential
2018

Morphology Evolution of ZnO Thin Films Deposited by Nitrogen Mediated Crystallization Method

Suhariadi, I., Shiratani, M. & Itagaki, N., Mar 30 2018, In : MATEC Web of Conferences. 159, 02031.

Research output: Contribution to journalConference article

Crystallization
Nitrogen
Thin films
Fractals
Surface morphology
2011
7 Citations (Scopus)

Hybrid sensitized solar cells using Si nanoparticles and ruthenium dye

Uchida, G., Kawashima, Y., Yamamoto, K., Sato, M., Nakahara, K., Matsunaga, T., Yamashita, D., Matsuzaki, H., Kamataki, K., Itagaki, N., Koga, K., Kondo, M. & Shiratani, M., Oct 1 2011, In : Physica Status Solidi (C) Current Topics in Solid State Physics. 8, 10, p. 3021-3024 4 p.

Research output: Contribution to journalArticle

ruthenium
solar cells
dyes
nanoparticles
silicon
2012
8 Citations (Scopus)
Light Scattering
Light scattering
Nanoparticles
light scattering
Plasma
2014
1 Citation (Scopus)

Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization

Itagaki, N., Matsushima, K., Yamashita, D., Seo, H., Koga, K. & Shiratani, M., Jan 1 2014, Oxide-Based Materials and Devices V. SPIE, 89871A. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 8987).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sputter deposition
Aluminum Oxide
Sapphire
Buffer layers
Crystallization
2017

Synthesis of nanoparticles using low temperature plasmas and its application to solar cells and tracers in living body

Koga, K., Seo, H., Tanaka, A., Itagaki, N. & Shiratani, M., Jan 1 2017, Plasma Nano Science and Technology. Cvelbar, U. & Mascher, P. (eds.). 3 ed. Electrochemical Society Inc., p. 17-24 8 p. (ECS Transactions; vol. 77, no. 3).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Solar cells
Nanoparticles
Plasmas
Temperature
Biotechnology
2015
9 Citations (Scopus)

Effects of cluster incorporation into hydrogenated amorphous silicon films in initial discharge phase on film stability

Toko, S., Torigoe, Y., Chen, W., Yamashita, D., Seo, H., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2015, In : Thin Solid Films. 587, p. 126-131 6 p.

Research output: Contribution to journalArticle

silicon films
Amorphous silicon
amorphous silicon
cells
Degradation
18 Citations (Scopus)

Antioxidative activity and growth regulation of Brassicaceae induced by oxygen radical irradiation

Hayashi, N., Ono, R., Shiratani, M. & Yonesu, A., Jun 1 2015, In : Japanese Journal of Applied Physics. 54, 6, 06GD01.

Research output: Contribution to journalArticle

Irradiation
irradiation
Oxygen
oxygen
inoculation
1 Citation (Scopus)

Multigeneration effects of plasma irradiation to seeds of arabidopsis thaliana and zinnia on their growth

Sarinont, T., Amano, T., Koga, K., Shiratani, M. & Hayashi, N., Jan 1 2015, Plasma Processing and Diagnostics for Life Sciences. Fisher, E. R., Kong, M., Weltmann, K. D. & Shiratani, M. (eds.). Materials Research Society, p. 34-38 5 p. (Materials Research Society Symposium Proceedings; vol. 1723).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Seed
seeds
Irradiation
Plasmas
irradiation
2016
2 Citations (Scopus)

Plant Growth Response to Atmospheric Air Plasma Treatments of Seeds of 5 Plant Species

Shiratani, M., Sarinont, T., Amano, T., Hayashi, N. & Koga, K., Jan 1 2016, In : MRS Advances. 1, 18, p. 1265-1269 5 p.

Research output: Contribution to journalArticle

Seed
seeds
Plasmas
air
rice
2018
1 Citation (Scopus)

Transportation of reactive oxygen species in a tissue phantom after plasma irradiation

Kawasaki, T., Kuroeda, G., Sei, R., Yamaguchi, M., Yoshinaga, R., Yamashita, R., Tasaki, H., Koga, K. & Shiratani, M., Jan 1 2018, In : Japanese Journal of Applied Physics. 57, 1, 01AG01.

Research output: Contribution to journalArticle

Irradiation
Tissue
Plasmas
irradiation
Oxygen
32 Citations (Scopus)

Plasma agriculture: A rapidly emerging field

Puač, N., Gherardi, M. & Shiratani, M., Feb 1 2018, In : Plasma Processes and Polymers. 15, 2, 1700174.

Research output: Contribution to journalArticle

agriculture
food
Agriculture
emerging
Plasmas
2013
8 Citations (Scopus)

High amount cluster incorporation in initial Si film deposition by SiH 4 plasma chemical vapor deposition

Kim, Y., Hatozaki, K., Hashimoto, Y., Uchida, G., Kamataki, K., Itagaki, N., Seo, H., Koga, K. & Shiratani, M., Jan 1 2013, In : Japanese journal of applied physics. 52, 1 PART2, 01AD01.

Research output: Contribution to journalArticle

Chemical vapor deposition
Volume fraction
vapor deposition
Plasmas
Quartz crystal microbalances
2015
1 Citation (Scopus)

Comparative study on the pulmonary toxicity of indium hydroxide, indium-tin oxide, and indium oxide following intratracheal instillations into the lungs of rats

Tanaka, A., Hirata, M., Matsumura, N., Koga, K., Shiratani, M. & Kiyohara, Y., Jan 1 2015, Plasma Processing and Diagnostics for Life Sciences. Fisher, E. R., Kong, M., Weltmann, K. D. & Shiratani, M. (eds.). Materials Research Society, p. 8-13 6 p. (Materials Research Society Symposium Proceedings; vol. 1723).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Indium
Tin oxides
toxicity
indium oxides
lungs
2016
1 Citation (Scopus)

DNA microarray analysis of plant seeds irradiated by active oxygen species in oxygen plasma

Hayashi, N., Ono, R., Nakano, R., Shiratani, M., Tashiro, K., Kuhara, S., Yasuda, K. & Hagiwara, H., Jan 1 2016, In : Plasma Medicine. 6, 3-4, p. 459-471 13 p.

Research output: Contribution to journalArticle

oxygen plasma
Microarrays
Seed
seeds
gene expression
2017
2 Citations (Scopus)

Blue Photoluminescence of (ZnO)0.92(InN)0.08

Matsushima, K., Iwasaki, K., Miyahara, N., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2017, In : MRS Advances. 2, 5, p. 277-282 6 p.

Research output: Contribution to journalArticle

Photoluminescence
photoluminescence
Lattice constants
lattice parameters
room temperature
2016
4 Citations (Scopus)

Room Temperature Fabrication of (ZnO)x(InN)1-x films with Step-Terrace Structure by RF Magnetron Sputtering

Matsushima, K., Ide, T., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2016, In : MRS Advances. 1, 2, p. 115-119 5 p.

Research output: Contribution to journalArticle

Magnetron sputtering
magnetron sputtering
Fabrication
fabrication
room temperature
2018
3 Citations (Scopus)
Solar cells
solar cells
Charge transfer
Substrates
charge transfer
11 Citations (Scopus)

Impact of Gamma rays and DBD plasma treatments on wastewater treatment

Attri, P., Tochikubo, F., Park, J. H., Choi, E. H., Koga, K. & Shiratani, M., Dec 1 2018, In : Scientific reports. 8, 1, 2926.

Research output: Contribution to journalArticle

plasma jets
dyes
gamma rays
humidity
air
2017
5 Citations (Scopus)

Impact of an ionic liquid on protein thermodynamics in the presence of cold atmospheric plasma and gamma rays

Attri, P., Kim, M., Choi, E. H., Cho, A. E., Koga, K. & Shiratani, M., Jan 1 2017, In : Physical Chemistry Chemical Physics. 19, 37, p. 25277-25288 12 p.

Research output: Contribution to journalArticle

Ionic Liquids
Gamma rays
rays
Thermodynamics
gamma rays
2015
34 Citations (Scopus)

Influence of ionic liquid and ionic salt on protein against the reactive species generated using dielectric barrier discharge plasma

Attri, P., Sarinont, T., Kim, M., Amano, T., Koga, K., Cho, A. E., Choi, E. H. & Shiratani, M., Dec 10 2015, In : Scientific reports. 5, 17781.

Research output: Contribution to journalArticle

Ionic Liquids
Salts
Hemoglobins
Proteins
Phosphates
2014
16 Citations (Scopus)
Agricultural products
Ultraviolet radiation
Irradiation
Plasmas
irradiation
2016
20 Citations (Scopus)
Polymers
counters
solar cells
dyes
Electrodes
2014
3 Citations (Scopus)

The enhancement of dye adsorption in dye-sensitized solar module by an electrical adsorption method

Seo, H., Son, M. K., Kim, H. J. & Shiratani, M., Mar 3 2014, In : Thin Solid Films. 554, p. 118-121 4 p.

Research output: Contribution to journalArticle

Coloring Agents
Dyes
modules
dyes
Adsorption
2013
11 Citations (Scopus)

Study on the fabrication of paint-type Si quantum dot-sensitized solar cells

Seo, H., Son, M. K., Kim, H. J., Wang, Y., Uchida, G., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Nov 11 2013, In : Japanese journal of applied physics. 52, 10 PART2, 10MB07.

Research output: Contribution to journalArticle

paints
Paint
Semiconductor quantum dots
Solar cells
solar cells
2017
2 Citations (Scopus)

Effects of sputtering gas pressure dependence of surface morphology of ZnO films fabricated via nitrogen mediated crystallization

Iwasaki, K., Matsushima, K., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2017, In : MRS Advances. 2, 5, p. 265-270 6 p.

Research output: Contribution to journalArticle

Crystallization
pressure dependence
gas pressure
Surface morphology
Sputtering
2019
1 Citation (Scopus)

Local supply of reactive oxygen species into a tissue model by atmospheric-pressure plasma-jet exposure

Kawasaki, T., Mitsugi, F., Koga, K. & Shiratani, M., Jun 7 2019, In : Journal of Applied Physics. 125, 21, 213303.

Research output: Contribution to journalArticle

Open Access
plasma jets
atmospheric pressure
oxygen
starches
reagents
2016
27 Citations (Scopus)

Improving the performance of quantum dot sensitized solar cells through CdNiS quantum dots with reduced recombination and enhanced electron lifetime

Gopi, C. V. V. M., Venkata-Haritha, M., Seo, H., Singh, S., Kim, S. K., Shiratani, M. & Kim, H. J., Jan 1 2016, In : Dalton Transactions. 45, 20, p. 8447-8457 11 p.

Research output: Contribution to journalArticle

Semiconductor quantum dots
Solar cells
Conversion efficiency
Electrons
Doping (additives)
24 Citations (Scopus)

Mechanism and comparison of needle-type non-thermal direct and indirect atmospheric pressure plasma jets on the degradation of dyes

Attri, P., Yusupov, M., Park, J. H., Lingamdinne, L. P., Koduru, J. R., Shiratani, M., Choi, E. H. & Bogaerts, A., Oct 6 2016, In : Scientific reports. 6, 34419.

Research output: Contribution to journalArticle

needles
plasma jets
atmospheric pressure
dyes
degradation
2015
4 Citations (Scopus)

Gas Flow Rate Dependence of the Discharge Characteristics of a Plasma Jet Impinging onto the Liquid Surface

Uchida, G., Nakajima, A., Takenaka, K., Koga, K., Shiratani, M. & Setsuhara, Y., Dec 1 2015, In : IEEE Transactions on Plasma Science. 43, 12, p. 4081-4087 7 p., 7308081.

Research output: Contribution to journalArticle

liquid surfaces
plasma jets
gas flow
flow velocity
laminar flow
2011
8 Citations (Scopus)

Combinatorial analyses of plasma-polymer interactions

Setsuhara, Y., Cho, K., Takenaka, K., Shiratani, M., Sekine, M. & Hori, M., Jul 25 2011, In : Surface and Coatings Technology. 205, SUPPL. 2

Research output: Contribution to journalArticle

Beam plasma interactions
Polymers
Plasmas
polymers
Etching
2017
34 Citations (Scopus)

Extension of the operational regime of the LHD towards a deuterium experiment

Takeiri, Y., Morisaki, T., Osakabe, M., Yokoyama, M., Sakakibara, S., Takahashi, H., Nakamura, Y., Oishi, T., Motojima, G., Murakami, S., Ito, K., Ejiri, A., Imagawa, S., Inagaki, S., Isobe, M., Kubo, S., Masamune, S., Mito, T., Murakami, I., Nagaoka, K. & 167 others, Nagasaki, K., Nishimura, K., Sakamoto, M., Sakamoto, R., Shimozuma, T., Shinohara, K., Sugama, H., Watanabe, K. Y., Ahn, J. W., Akata, N., Akiyama, T., Ashikawa, N., Baldzuhn, J., Bando, T., Bernard, E., Castejón, F., Chikaraishi, H., Emoto, M., Evans, T., Ezumi, N., Fujii, K., Funaba, H., Goto, M., Goto, T., Gradic, D., Gunsu, Y., Hamaguchi, S., Hasegawa, H., Hayashi, Y., Hidalgo, C., Higashiguchi, T., Hirooka, Y., Hishinuma, Y., Horiuchi, R., Ichiguchi, K., Ida, K., Ido, T., Igami, H., Ikeda, K., Ishiguro, S., Ishizaki, R., Ishizawa, A., Ito, A., Ito, Y., Iwamoto, A., Kamio, S., Kamiya, K., Kaneko, O., Kanno, R., Kasahara, H., Kato, D., Kato, T., Kawahata, K., Kawamura, G., Kisaki, M., Kitajima, S., Ko, W. H., Kobayashi, M., Kobayashi, S., Kobayashi, T., Koga, K., Kohyama, A., Kumazawa, R., Lee, J. H., López-Bruna, D., Makino, R., Masuzaki, S., Matsumoto, Y., Matsuura, H., Mitarai, O., Miura, H., Miyazawa, J., Mizuguchi, N., Moon, C., Morita, S., Moritaka, T., Mukai, K., Muroga, T., Muto, S., Mutoh, T., Nagasaka, T., Nagayama, Y., Nakajima, N., Nakamura, Y., Nakanishi, H., Nakano, H., Nakata, M., Narushima, Y., Nishijima, D., Nishimura, A., Nishimura, S., Nishitani, T., Nishiura, M., Nobuta, Y., Noto, H., Nunami, M., Obana, T., Ogawa, K., Ohdachi, S., Ohno, M., Ohno, N., Ohtani, H., Okamoto, M., Oya, Y., Ozaki, T., Peterson, B. J., Preynas, M., Sagara, S., Saito, K., Sakaue, H., Sanpei, A., Satake, S., Sato, M., Saze, T., Schmitz, O., Seki, R., Seki, T., Sharov, I., Shimizu, A., Shiratani, M., Shoji, M., Skinner, C., Soga, R., Stange, T., Suzuki, C., Suzuki, Y., Takada, S., Takahata, K., Takayama, A., Takayama, S., Takemura, Y., Takeuchi, Y., Tamura, H., Tamura, N., Tanaka, H., Tanaka, K., Tanaka, M., Tanaka, T., Tanaka, Y., Toda, S., Todo, Y., Toi, K., Toida, M., Tokitani, M., Tokuzawa, T., Tsuchiya, H., Tsujimura, T., Tsumori, K., Usami, S., Velasco, J. L., Wang, H., Watanabe, T. H., Watanabe, T., Yagi, J., Yajima, M., Yamada, H., Yamada, I., Yamagishi, O., Yamaguchi, N., Yamamoto, Y., Yanagi, N., Yasuhara, R., Yatsuka, E., Yoshida, N., Yoshinuma, M., Yoshimura, S. & Yoshimura, Y., Aug 21 2017, In : Nuclear Fusion. 57, 10, 102023.

Research output: Contribution to journalArticle

deuterium
ion temperature
impurities
heating
beam injection
2018

The effect of the H2/(H2 + Ar) flow-rate ratio on hydrogenated amorphous carbon films grown using Ar/H2/C7H8 plasma chemical vapor deposition

Fang, T., Yamaki, K., Koga, K., Yamashita, D., Seo, H., Itagaki, N., Shiratani, M., Takenaka, K. & Setsuhara, Y., Aug 30 2018, In : Thin Solid Films. 660, p. 891-898 8 p.

Research output: Contribution to journalArticle

Carbon films
Amorphous carbon
Amorphous films
Chemical vapor deposition
flow velocity
2014
3 Citations (Scopus)

Deposition of crystalline Ge nanoparticle films by high-pressure RF magnetron sputtering method

Ichida, D., Uchida, G., Seo, H., Kamataki, K., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2014, In : Journal of Physics: Conference Series. 518, 1, 012002.

Research output: Contribution to journalConference article

magnetron sputtering
nanoparticles
frequency shift
gas mixtures
crystallinity
2013
2 Citations (Scopus)

H2/N2 plasma etching rate of carbon films deposited by H-assisted plasma chemical vapor deposition

Urakawa, T., Torigoe, R., Matsuzaki, H., Yamashita, D., Uchida, G., Koga, K., Shiratani, M., Setsuhara, Y., Takeda, K., Sekine, M. & Hori, M., Jan 1 2013, In : Japanese journal of applied physics. 52, 1 PART2, 01AB01.

Research output: Contribution to journalArticle

Plasma etching
Carbon films
plasma etching
Chemical vapor deposition
vapor deposition