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Author

  • Taizoh Sadoh
2015

Ultra-low temperature (∼180°C) solid-phase crystallization of GeSn on insulator triggered by laser-anneal seeding

Matsumura, R., Moto, K., Kai, Y., Sadoh, T., Ikenoue, H. & Miyao, M., Jan 1 2015, Semiconductors, Dielectrics, and Metals for Nanoelectronics 13. Kar, S., Misra, D., Kita, K. & Landheer, D. (eds.). 5 ed. Electrochemical Society Inc., p. 301-304 4 p. (ECS Transactions; vol. 69, no. 5).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2011

Lateral-liquid phase epitaxy of (101) Ge-on-insulator from Si template by metal-induced crystallization

Kurosawa, M., Kawabata, N., Kato, R., Sadoh, T. & Miyao, M., Aug 2 2011, Advanced Semiconductor-on-Insulator Technology and Related Physics 15. 5 ed. p. 51-54 4 p. (ECS Transactions; vol. 35, no. 5).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2013

Formation of Ge-on-Insulator Structures on Si platform by SiGe-mixing-triggered rapid-melting growth using RTA technique

Mizushima, I., Sadoh, T. & Miyao, M., 2013, Extended Abstracts of the 13th International Workshop on Junction Technology 2013, IWJT 2013. IEEE Computer Society, p. 30-31 2 p. 6644498

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2011

Preface

Maeda, Y., Terai, Y., Homewood, K. P., Takarabe, K., Yamaguchi, K., Suzuki, M., Sadoh, T. & Nakamura, Y., Oct 3 2011, In : Thin Solid Films. 519, 24, 1 p.

Research output: Contribution to journalEditorial

2 Citations (Scopus)
2016

Low-temperature growth of orientation-controlled large-grain Ge-rich SiGe on insulator at controlled-position for flexible electronics

Sadoh, T., Aoki, R., Tanaka, T., Park, J. H. & Miyao, M., Jan 1 2016, Thin Film Transistors 13, TFT 13. Kuo, Y. (ed.). 10 ed. Electrochemical Society Inc., Vol. 75. p. 95-103 9 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2012

Hybrid-orientation Ge-on-insulator structures on (100) Si platform by Si micro-seed formation combined with rapid-melting growth

Kurosawa, M., Kawabata, N., Sadoh, T. & Miyao, M., Apr 23 2012, In : Applied Physics Letters. 100, 17, 172107.

Research output: Contribution to journalArticle

28 Citations (Scopus)
2011

Chip-size formation of high-mobility Ge strips on SiN films by cooling rate controlled rapid-melting growth

Toko, K., Ohta, Y., Tanaka, T., Sadoh, T. & Miyao, M., Jul 18 2011, In : Applied Physics Letters. 99, 3, 032103.

Research output: Contribution to journalArticle

48 Citations (Scopus)

Atom-migration effect during crystallization of a-SiGe films by SR soft x-ray irradiation

Kino, S., Nonomura, Y., Heya, A., Matsuo, N., Kanda, K., Miyamoto, S., Amano, S., Mochizuki, T., Toko, K., Sadoh, T. & Miyao, M., 2011, Society for Information Display - 18th International Display Workshops 2011, IDW'11. Vol. 1. p. 659-662 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
2012

Enhanced interfacial-nucleation in al-induced crystallization for (111) Oriented Si1-xGex (0 ≤ x ≤ 1) films on insulating substrates

Kurosawa, M., Kawabata, N., Sadoh, T. & Miyao, M., Dec 1 2012, In : ECS Journal of Solid State Science and Technology. 1, 3, p. P144-P147

Research output: Contribution to journalArticle

48 Citations (Scopus)
2013

Liquid-solid coexisting annealing of a-GeSn/Si(100) structure for low temperature epitaxial growth of SiGe

Chikita, H., Matsumura, R., Sadoh, T. & Miyao, M., Jan 1 2013, In : ECS Transactions. 58, 9, p. 257-262 6 p.

Research output: Contribution to journalArticle

2012

Nano-lithography free formation of high density Ge-on-insulator network for epitaxial template

Yokoyama, H., Toko, K., Sadoh, T. & Miyao, M., Feb 27 2012, In : Applied Physics Letters. 100, 9, 092111.

Research output: Contribution to journalArticle

10 Citations (Scopus)
2015

Non-thermal equilibrium formation of Ge1-xSnx (0蠆x蠆0.2) crystals on insulator by pulsed laser annealing

Moto, K., Matsumura, R., Chikita, H., Sadoh, T., Ikenoue, H. & Miyao, M., Jan 1 2015, Semiconductors, Dielectrics, and Metals for Nanoelectronics 13. Kar, S., Misra, D., Kita, K. & Landheer, D. (eds.). 5 ed. Electrochemical Society Inc., p. 297-300 4 p. (ECS Transactions; vol. 69, no. 5).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2016

Low-temperature formation of Sn-doped Ge on insulating substrates by metal-induced crystallization

Sakai, T., Matsumura, R., Sadoh, T. & Miyao, M., Jan 1 2016, Thin Film Transistors 13, TFT 13. 10 ed. Electrochemical Society Inc., Vol. 75. p. 105-108 4 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2014
22 Citations (Scopus)
2011

Au-catalyst induced low temperature (∼250 °C) layer exchange crystallization for SiGe on insulator

Park, J. H., Kurosawa, M., Kawabata, N., Miyao, M. & Sadoh, T., Aug 2 2011, Advanced Semiconductor-on-Insulator Technology and Related Physics 15. 5 ed. p. 39-42 4 p. (ECS Transactions; vol. 35, no. 5).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)
2012

Hybrid-formation of Ge-on-insulator structures on Si platform by SiGe-mixing-triggered rapid-melting growth - A road to artificial crystal

Miyao, M., Kurosawa, M., Toko, K., Tojo, Y. & Sadoh, T., Dec 1 2012, High Purity Silicon 12. 5 ed. Vol. 50. p. 59-70 12 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2014

Formation of quasi-single-crystal Ge on plastic by nucleation-controlled Au-induced layer-exchange growth for flexible electronics

Park, J. H., Miyao, M. & Sadoh, T., Jan 1 2014, Proceedings of AM-FPD 2014 - The 21st International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials. IEEE Computer Society, p. 291-294 4 p. 6867200. (Proceedings of AM-FPD 2014 - The 21st International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2019

Lowerature and low-cost excimer laser doping for poly-Si thin-film transistor fabrication

Imokawa, K., Tanaka, N., Suwa, A., Nakamura, D., Sadoh, T., Goto, T. & Ikenoue, H., Jan 1 2019, Laser-Based Micro- and Nanoprocessing XIII. Klotzbach, U., Watanabe, A. & Kling, R. (eds.). SPIE, 109060J. (Proceedings of SPIE - The International Society for Optical Engineering; vol. 10906).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2017

Novel growth techniques of group-IV based semiconductors on insulator for next-generation electronics

Miyao, M. & Sadoh, T., May 2017, In : Japanese Journal of Applied Physics. 56, 05DA06.

Research output: Contribution to journalReview article

16 Citations (Scopus)
2011

Strained single-crystal GOI (Ge on Insulator) arrays by rapid-melting growth from Si (1 1 1) micro-seeds

Sakane, T., Toko, K., Tanaka, T., Sadoh, T. & Miyao, M., Jun 1 2011, In : Solid-State Electronics. 60, 1, p. 22-25 4 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

Mesh-shape-and-size controlled rapid-melting growth for the formation of single-crystalline (100), (110), and (111) Ge networks on insulators

Mizushima, I., Toko, K., Ohta, Y., Sakane, T., Sadoh, T. & Miyao, M., May 2 2011, In : Applied Physics Letters. 98, 18, 182107.

Research output: Contribution to journalArticle

22 Citations (Scopus)

Al-Induced oriented-crystallization of Si films on quartz and its application to epitaxial template for Ge growth

Kurosawa, M., Toko, K., Kawabata, N., Sadoh, T. & Miyao, M., Jun 1 2011, In : Solid-State Electronics. 60, 1, p. 7-12 6 p.

Research output: Contribution to journalArticle

25 Citations (Scopus)
2018

Characterization of Excimer-Laser Doping of a Poly-Si Thin Film with a Phosphoric-Acid Coating for Thin-Film-Transistor Fabrication

Imokawa, K., Tanaka, N., Suwa, A., Nakamura, D., Sadoh, T., Goto, T. & Ikenoue, H., Aug 15 2018, AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings. Institute of Electrical and Electronics Engineers Inc., 8437343. (AM-FPD 2018 - 25th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2012

S iG e ミキシング誘起溶融成長によるG OI(G e on Ins ulator)の形成: 人工単結晶への道

Translated title of the contribution: SiGe-mixing-triggered rapid-melting growth for Ge-on-insulator formation: A road to artificial crystalMiyao, M., Sadoh, T., Toko, K. & Kurosawa, M., May 2012, In : OYOBUTURI. 81, p. 410 5 p., 5.

Research output: Contribution to journalReview article

2011

Dehydrogenation-enhanced large strain (∼1.6%) in Si pillars covered by Si3N4 stress liners

Kurosawa, M., Sadoh, T. & Miyao, M., 2011, In : Electrochemical and Solid-State Letters. 14, 4

Research output: Contribution to journalArticle

2 Citations (Scopus)
2019
Open Access
2017

Low-temperature (<200 oC) solid-phase crystallization of high substitutional Sn concentration (∼ 10%) GeSn on insulator enhanced by weak laser irradiation

Moto, K., Sugino, T., Matsumura, R., Ikenoue, H., Miyao, M. & Sadoh, T., Jul 1 2017, In : AIP Advances. 7, 7, 075204.

Research output: Contribution to journalArticle

1 Citation (Scopus)
2012

Low temperature (∼250°C) layer exchange crystallization of Si 1 - XGe x (x = 1-0) on insulator for advanced flexible devices

Park, J. H., Kurosawa, M., Kawabata, N., Miyao, M. & Sadoh, T., Feb 1 2012, In : Thin Solid Films. 520, 8, p. 3293-3295 3 p.

Research output: Contribution to journalArticle

26 Citations (Scopus)
2014

Large-grain SiGe-on-insulator with uniform Si concentration by segregation-free rapid-melting growth

Matsumura, R., Kato, R., Sadoh, T. & Miyao, M., Sep 8 2014, In : Applied Physics Letters. 105, 10, 102106.

Research output: Contribution to journalArticle

7 Citations (Scopus)
2011

Open-gated pH sensor fabricated on an undoped-AlGaN/GaN HEMT structure

Abidin, M. S. Z., Hashim, A. M., Sharifabad, M. E., Abd Rahman, S. F. & Sadoh, T., Mar 2011, In : Sensors. 11, 3, p. 3067-3077 11 p.

Research output: Contribution to journalArticle

24 Citations (Scopus)
2017

Thickness-dependent substitutional-Sn-Concentration in GeSn-on-Insulator by weak-laser-irradiation-enhanced solid-phase crystallization at low-Temperature (180°C)

Sugino, T., Moto, K., Ikenoue, H., Miyao, M. & Sadoh, T., Aug 8 2017, AM-FPD 2017 - 24th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings. Institute of Electrical and Electronics Engineers Inc., p. 241-243 3 p. 8006137

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2014

Formation of large grain Ge single crystal on insulating substrate by liquid-solid coexisting annealing of a-Ge(Sn)

Matsumura, R., Kai, Y., Chikita, H., Sadoh, T. & Miyao, M., Jan 1 2014, In : ECS Transactions. 61, 3, p. 97-100 4 p.

Research output: Contribution to journalConference article

2011

Magnetooptical properties of iron based Heusler alloy epitaxial films on Ge(111)

Maeda, Y., Ikeda, T., Ichikawa, T., Nakajima, T., Matsukura, B., Sadoh, T. & Miyao, M., Jan 1 2011, In : Physics Procedia. 11, p. 200-203 4 p.

Research output: Contribution to journalArticle

7 Citations (Scopus)
2013

Nucleation-controlled gold-induced-crystallization for selective formation of Ge(100) and (111) on insulator at low-temperature (∼250 °c)

Park, J. H., Suzuki, T., Kurosawa, M., Miyao, M. & Sadoh, T., Aug 19 2013, In : Applied Physics Letters. 103, 8, 082102.

Research output: Contribution to journalArticle

57 Citations (Scopus)
2014

Giant-lateral-growth of SiGe stripes on insulating-substrate by self-organized-seeding and rapid-melting-growth in solid-liquid coexisting region

Matsumura, R., Kato, R., Tojo, Y., Kurosawa, M., Sadoh, T. & Miyao, M., Jan 1 2014, In : ECS Solid State Letters. 3, 5, p. P61-P64

Research output: Contribution to journalArticle

6 Citations (Scopus)
2020

Fabrication of CMOS Invertors in Si Thin-Film-Transistors by Laser Doping Using a Chemical Solution Coating

Imokawa, K., Kurashige, T., Suwa, A., Nakamura, D., Sadoh, T., Goto, T. & Ikenoue, H., Jan 1 2020, In : IEEE Journal of the Electron Devices Society. 8, p. 27-32 6 p., 8918252.

Research output: Contribution to journalArticle

Open Access
2014

Self-organized travelling-zone-melting growth of a-Ge/Sn/c-Ge stacked-structures for high-quality GeSn

Matsumura, R., Kinoshita, Y., Tojo, Y., Sadoh, T., Nishimura, T. & Miyao, M., 2014, In : ECS Journal of Solid State Science and Technology. 3, 10, p. P340-P343

Research output: Contribution to journalArticle

1 Citation (Scopus)
2012

Self organization of FeGe/FeSi/FeGe layered structures on Ge and their electrical conduction properties

Matsukura, B., Hiraiwa, Y., Nakajima, T., Narumi, K., Sakai, S., Sadoh, T., Miyao, M. & Maeda, Y., Jan 1 2012, In : Physics Procedia. 23, p. 21-24 4 p.

Research output: Contribution to journalConference article

2 Citations (Scopus)
2013

High-quality formation of multiply stacked SiGe-on-insulator structures by temperature-modulated successive rapid-melting-growth

Tojo, Y., Matsumura, R., Yokoyama, H., Kurosawa, M., Toko, K., Sadoh, T. & Miyao, M., Mar 4 2013, In : Applied Physics Letters. 102, 9, 092102.

Research output: Contribution to journalArticle

15 Citations (Scopus)

Orientation-control of ge-stripes-on-insulator by narrowing in rapid-melting growth from SI(111) seed

Anisuzzaman, M., Muta, S., Takahashi, M., Hashim, A. M. & Sadoh, T., Jul 26 2013, In : ECS Solid State Letters. 2, 9, p. P76-P78

Research output: Contribution to journalArticle

1 Citation (Scopus)

Atomically-coherent-coalescence of two growth-fronts in Ge stripes on insulator by rapid-melting lateral-crystallization

Kurosawa, M., Toko, K., Sadoh, T., Mizushim, I. & Miyao, M., Nov 18 2013, In : ECS Journal of Solid State Science and Technology. 2, 3

Research output: Contribution to journalArticle

4 Citations (Scopus)
2012

Formation of large grain SiGe on insulator by Si segregation in seedless-rapid-melting process

Kato, R., Kurosawa, M., Matsumura, R., Tojo, Y., Sadoh, T. & Miyao, M., Dec 1 2012, SiGe, Ge, and Related Compounds 5: Materials, Processing, and Devices. 9 ed. p. 431-436 6 p. (ECS Transactions; vol. 50, no. 9).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)
2014

Ultra-high-speed lateral solid phase crystallization of GeSn on insulator combined with Sn-melting-induced seeding

Chikita, H., Matsumura, R., Kai, Y., Sadoh, T. & Miyao, M., Nov 17 2014, In : Applied Physics Letters. 105, 20, 202112.

Research output: Contribution to journalArticle

25 Citations (Scopus)
2012

Growth-rate-dependent laterally graded SiGe profiles on insulator by cooling-rate controlled rapid-melting-growth

Matsumura, R., Tojo, Y., Kurosawa, M., Sadoh, T., Mizushima, I. & Miyao, M., Dec 10 2012, In : Applied Physics Letters. 101, 24, 241904.

Research output: Contribution to journalArticle

26 Citations (Scopus)
2016

Low-temperature (≤ 300 °c) formation of orientation-controlled large-grain (≥ 10 μm) Ge-rich SiGe on insulator by gold-induced crystallization

Sadoh, T., Park, J. H., Aoki, R. & Miyao, M., Mar 1 2016, In : Thin Solid Films. 602, p. 3-6 4 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)
2014

Coherent lateral-growth of Ge over insulating film by rapid-melting- crystallization

Sadoh, T., Kurosawa, M., Toko, K. & Miyao, M., Apr 30 2014, In : Thin Solid Films. 557, p. 135-138 4 p.

Research output: Contribution to journalArticle

1 Citation (Scopus)

Ultralow-temperature catalyst-induced-crystallization of SiGe on plastic for flexible electronics

Sadoh, T., Park, J. H., Kurosawa, M. & Miyao, M., Jan 1 2014, 2014 7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014. IEEE Computer Society, p. 47-48 2 p. 6874633. (2014 7th International Silicon-Germanium Technology and Device Meeting, ISTDM 2014).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2013
2011

Growth-direction-dependent characteristics of Ge-on-insulator by Si-Ge mixing triggered melting growth

Ohta, Y., Tanaka, T., Toko, K., Sadoh, T. & Miyao, M., Jun 1 2011, In : Solid-State Electronics. 60, 1, p. 18-21 4 p.

Research output: Contribution to journalArticle

2 Citations (Scopus)

SiGe-mixing-triggered rapid-melting-growth of high-mobility Ge-on-insulator

Sadoh, T., Toko, K., Kurosawa, M., Tanaka, T., Sakane, T., Ohta, Y., Kawabata, N., Yokoyama, H. & Miyao, M., Mar 23 2011, Technology Evolution for Silicon Nano-Electronics. p. 8-13 6 p. (Key Engineering Materials; vol. 470).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)