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2019

Impact of heterointerface properties of crystalline germanium heterojunction solar cells

Nakano, S. & Shiratani, M., Sep 1 2019, In : Thin Solid Films. 685, p. 225-233 9 p.

Research output: Contribution to journalArticle

Germanium
surface treatment
Surface treatment
Heterojunctions
heterojunctions

Local supply of reactive oxygen species into a tissue model by atmospheric-pressure plasma-jet exposure

Kawasaki, T., Mitsugi, F., Koga, K. & Shiratani, M., Jun 7 2019, In : Journal of Applied Physics. 125, 21, 213303.

Research output: Contribution to journalArticle

Open Access
plasma jets
atmospheric pressure
oxygen
starches
reagents
2018
28 Citations (Scopus)

Current status and future prospects of agricultural applications using atmospheric-pressure plasma technologies

Ito, M., Oh, J. S., Ohta, T., Shiratani, M. & Hori, M., Feb 1 2018, In : Plasma Processes and Polymers. 15, 2, 1700073.

Research output: Contribution to journalReview article

Microorganisms
Agriculture
Atmospheric pressure
atmospheric pressure
Plasmas
Open Access
vapor deposition
gases
plasma jets
hollow
deposits

Effects of sputtering pressure on (Zno)x(inn)1-x crystal film growth at 450ºc

Itagaki, N., Takeuchi, K., Miyahara, N., Imoto, K., Seo, H., Koga, K. & Shiratani, M., Jan 1 2018, THERMEC 2018. Shabadi, R., Chandra, T., Ionescu, M., Jeandin, M. & Richard, C. (eds.). Trans Tech Publications Ltd, p. 2093-2098 6 p. (Materials Science Forum; vol. 941 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Film growth
Crystal growth
Sputtering
sputtering
crystals
9 Citations (Scopus)

Impact of Gamma rays and DBD plasma treatments on wastewater treatment

Attri, P., Tochikubo, F., Park, J. H., Choi, E. H., Koga, K. & Shiratani, M., Dec 1 2018, In : Scientific reports. 8, 1, 2926.

Research output: Contribution to journalArticle

plasma jets
dyes
gamma rays
humidity
air

Morphology Evolution of ZnO Thin Films Deposited by Nitrogen Mediated Crystallization Method

Suhariadi, I., Shiratani, M. & Itagaki, N., Mar 30 2018, In : MATEC Web of Conferences. 159, 02031.

Research output: Contribution to journalConference article

Crystallization
Nitrogen
Thin films
Fractals
Surface morphology
Silanes
Film growth
silanes
Plasmas
Quartz crystal microbalances

Photoluminescence of (Zno)0.82(inn)0.18 films: Incident light angle dependence

Miyahara, N., Iwasaki, K., Yamashita, D., Nakamura, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2018, THERMEC 2018. Jeandin, M., Shabadi, R., Ionescu, M., Chandra, T. & Richard, C. (eds.). Trans Tech Publications Ltd, p. 2099-2103 5 p. (Materials Science Forum; vol. 941 MSF).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Photoluminescence
photoluminescence
wurtzite
Energy gap
Crystals
26 Citations (Scopus)

Plasma agriculture: A rapidly emerging field

Puač, N., Gherardi, M. & Shiratani, M., Feb 1 2018, In : Plasma Processes and Polymers. 15, 2, 1700174.

Research output: Contribution to journalArticle

agriculture
food
Agriculture
emerging
Plasmas
3 Citations (Scopus)
Solar cells
solar cells
Charge transfer
Substrates
charge transfer
2 Citations (Scopus)

Special issue: Plasma and agriculture

Gherardi, M., Puač, N. & Shiratani, M., Feb 1 2018, In : Plasma Processes and Polymers. 15, 2, 1877002.

Research output: Contribution to journalEditorial

Agriculture
Plasmas

The effect of the H2/(H2 + Ar) flow-rate ratio on hydrogenated amorphous carbon films grown using Ar/H2/C7H8 plasma chemical vapor deposition

Fang, T., Yamaki, K., Koga, K., Yamashita, D., Seo, H., Itagaki, N., Shiratani, M., Takenaka, K. & Setsuhara, Y., Aug 30 2018, In : Thin Solid Films. 660, p. 891-898 8 p.

Research output: Contribution to journalArticle

Carbon films
Amorphous carbon
Amorphous films
Chemical vapor deposition
flow velocity
1 Citation (Scopus)

Transportation of reactive oxygen species in a tissue phantom after plasma irradiation

Kawasaki, T., Kuroeda, G., Sei, R., Yamaguchi, M., Yoshinaga, R., Yamashita, R., Tasaki, H., Koga, K. & Shiratani, M., Jan 1 2018, In : Japanese Journal of Applied Physics. 57, 1, 01AG01.

Research output: Contribution to journalArticle

Irradiation
Tissue
Plasmas
irradiation
Oxygen

ZnS/SiO2 passivation layer for high-performance of TiO2/CuInS2 quantum dot sensitized solar cells

Kim, H. J., Bae, J. H., Seo, H., Shiratani, M. & Gopi, C. V. V. M., Aug 2018, In : Energies. 11, 8, 1931.

Research output: Contribution to journalArticle

Passivation
TiO2
SiO2
Solar Cells
Quantum Dots
2017
76 Citations (Scopus)

Biogenic reductive preparation of magnetic inverse spinel iron oxide nanoparticles for the adsorption removal of heavy metals

Lingamdinne, L. P., Chang, Y. Y., Yang, J. K., Singh, J., Choi, E. H., Shiratani, M., Koduru, J. R. & Attri, P., Jan 1 2017, In : Chemical Engineering Journal. 307, p. 74-84 11 p.

Research output: Contribution to journalArticle

Heavy Metals
Iron oxides
spinel
iron oxide
Heavy metals
2 Citations (Scopus)

Blue Photoluminescence of (ZnO)0.92(InN)0.08

Matsushima, K., Iwasaki, K., Miyahara, N., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2017, In : MRS Advances. 2, 5, p. 277-282 6 p.

Research output: Contribution to journalArticle

Photoluminescence
photoluminescence
Lattice constants
lattice parameters
room temperature
4 Citations (Scopus)

Densities and Surface Reaction Probabilities of Oxygen and Nitrogen Atoms during Sputter Deposition of ZnInON on ZnO

Matsushima, K., Ide, T., Takeda, K., Hori, M., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Feb 1 2017, In : IEEE Transactions on Plasma Science. 45, 2, p. 323-327 5 p., 7828157.

Research output: Contribution to journalArticle

nitrogen atoms
surface reactions
oxygen atoms
gas flow
atoms
2 Citations (Scopus)

Effects of sputtering gas pressure dependence of surface morphology of ZnO films fabricated via nitrogen mediated crystallization

Iwasaki, K., Matsushima, K., Yamashita, D., Seo, H., Koga, K., Shiratani, M. & Itagaki, N., Jan 1 2017, In : MRS Advances. 2, 5, p. 265-270 6 p.

Research output: Contribution to journalArticle

Crystallization
pressure dependence
gas pressure
Surface morphology
Sputtering
10 Citations (Scopus)

Enhanced light harvesting and charge recombination control with TiO2/PbCdS/CdS based quantum dot-sensitized solar cells

Kim, H. J., Xu, G. C., Gopi, C. V. V. M., Seo, H., Venkata-Haritha, M. & Shiratani, M., Mar 1 2017, In : Journal of Electroanalytical Chemistry. 788, p. 131-136 6 p.

Research output: Contribution to journalArticle

Semiconductor quantum dots
Solar cells
Conversion efficiency
Electron injection
Photocurrents
31 Citations (Scopus)

Extension of the operational regime of the LHD towards a deuterium experiment

Takeiri, Y., Morisaki, T., Osakabe, M., Yokoyama, M., Sakakibara, S., Takahashi, H., Nakamura, Y., Oishi, T., Motojima, G., Murakami, S., Ito, K., Ejiri, A., Imagawa, S., Inagaki, S., Isobe, M., Kubo, S., Masamune, S., Mito, T., Murakami, I., Nagaoka, K. & 167 others, Nagasaki, K., Nishimura, K., Sakamoto, M., Sakamoto, R., Shimozuma, T., Shinohara, K., Sugama, H., Watanabe, K. Y., Ahn, J. W., Akata, N., Akiyama, T., Ashikawa, N., Baldzuhn, J., Bando, T., Bernard, E., Castejón, F., Chikaraishi, H., Emoto, M., Evans, T., Ezumi, N., Fujii, K., Funaba, H., Goto, M., Goto, T., Gradic, D., Gunsu, Y., Hamaguchi, S., Hasegawa, H., Hayashi, Y., Hidalgo, C., Higashiguchi, T., Hirooka, Y., Hishinuma, Y., Horiuchi, R., Ichiguchi, K., Ida, K., Ido, T., Igami, H., Ikeda, K., Ishiguro, S., Ishizaki, R., Ishizawa, A., Ito, A., Ito, Y., Iwamoto, A., Kamio, S., Kamiya, K., Kaneko, O., Kanno, R., Kasahara, H., Kato, D., Kato, T., Kawahata, K., Kawamura, G., Kisaki, M., Kitajima, S., Ko, W. H., Kobayashi, M., Kobayashi, S., Kobayashi, T., Koga, K., Kohyama, A., Kumazawa, R., Lee, J. H., López-Bruna, D., Makino, R., Masuzaki, S., Matsumoto, Y., Matsuura, H., Mitarai, O., Miura, H., Miyazawa, J., Mizuguchi, N., Moon, C., Morita, S., Moritaka, T., Mukai, K., Muroga, T., Muto, S., Mutoh, T., Nagasaka, T., Nagayama, Y., Nakajima, N., Nakamura, Y., Nakanishi, H., Nakano, H., Nakata, M., Narushima, Y., Nishijima, D., Nishimura, A., Nishimura, S., Nishitani, T., Nishiura, M., Nobuta, Y., Noto, H., Nunami, M., Obana, T., Ogawa, K., Ohdachi, S., Ohno, M., Ohno, N., Ohtani, H., Okamoto, M., Oya, Y., Ozaki, T., Peterson, B. J., Preynas, M., Sagara, S., Saito, K., Sakaue, H., Sanpei, A., Satake, S., Sato, M., Saze, T., Schmitz, O., Seki, R., Seki, T., Sharov, I., Shimizu, A., Shiratani, M., Shoji, M., Skinner, C., Soga, R., Stange, T., Suzuki, C., Suzuki, Y., Takada, S., Takahata, K., Takayama, A., Takayama, S., Takemura, Y., Takeuchi, Y., Tamura, H., Tamura, N., Tanaka, H., Tanaka, K., Tanaka, M., Tanaka, T., Tanaka, Y., Toda, S., Todo, Y., Toi, K., Toida, M., Tokitani, M., Tokuzawa, T., Tsuchiya, H., Tsujimura, T., Tsumori, K., Usami, S., Velasco, J. L., Wang, H., Watanabe, T. H., Watanabe, T., Yagi, J., Yajima, M., Yamada, H., Yamada, I., Yamagishi, O., Yamaguchi, N., Yamamoto, Y., Yanagi, N., Yasuhara, R., Yatsuka, E., Yoshida, N., Yoshinuma, M., Yoshimura, S. & Yoshimura, Y., Aug 21 2017, In : Nuclear Fusion. 57, 10, 102023.

Research output: Contribution to journalArticle

deuterium
ion temperature
impurities
heating
beam injection
2 Citations (Scopus)

Fluctuation of position and energy of a fine particle in plasma nanofabrication

Shiratani, M., Soejima, M., Seo, H., Itagaki, N. & Koga, K., Jan 1 2017, THERMEC 2016. Ionescu, M., Mishra, B., Kozeschnik, E., Sommitsch, C., Chandra, T. & Mishra, B. (eds.). Trans Tech Publications Ltd, p. 1772-1777 6 p. (Materials Science Forum; vol. 879).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

nanofabrication
Nanotechnology
Electrostatic force
Plasmas
Optical tweezers
1 Citation (Scopus)

Hysteresis in volume fraction of clusters incorporated into a-Si:H films deposited by SiH4 plasma chemical vapor deposition

Toko, S., Torigoe, Y., Keya, K., Kojima, T., Seo, H., Itagaki, N., Koga, K. & Shiratani, M., Oct 15 2017, In : Surface and Coatings Technology. 326, p. 388-394 7 p.

Research output: Contribution to journalArticle

Hysteresis
Chemical vapor deposition
Volume fraction
hysteresis
vapor deposition
3 Citations (Scopus)

Impact of an ionic liquid on protein thermodynamics in the presence of cold atmospheric plasma and gamma rays

Attri, P., Kim, M., Choi, E. H., Cho, A. E., Koga, K. & Shiratani, M., Jan 1 2017, In : Physical Chemistry Chemical Physics. 19, 37, p. 25277-25288 12 p.

Research output: Contribution to journalArticle

Ionic Liquids
Gamma rays
rays
Thermodynamics
gamma rays

Influence of plasma irradiation on silkworm

Yonesu, A., Koga, K., Shiratani, M. & Hayashi, N., Jan 1 2017, In : Plasma Medicine. 7, 4, p. 313-320 8 p.

Research output: Contribution to journalArticle

silkworms
Irradiation
Plasmas
irradiation
Charged particles

Low temperature rapid formation of Au-induced crystalline Ge films using sputtering deposition

Tanami, S., Ichida, D., Hashimoto, S., Seo, H., Yamashita, D., Itagaki, N., Koga, K. & Shiratani, M., Nov 1 2017, In : Thin Solid Films. 641, p. 59-64 6 p.

Research output: Contribution to journalArticle

Sputtering
sputtering
Crystalline materials
Temperature
Quartz

Performance enhancement of quantum dot-sensitized solar cells based on polymer nano-composite catalyst

Seo, H., Gopi, C. V. V. M., Kim, H. J., Itagaki, N., Koga, K. & Shiratani, M., Sep 20 2017, In : Electrochimica Acta. 249, p. 337-342 6 p.

Research output: Contribution to journalArticle

Semiconductor quantum dots
Solar cells
Polymers
Electrodes
Catalysts
6 Citations (Scopus)

Plant Growth Enhancement of Seeds Immersed in Plasma Activated Water

Sarinont, T., Katayama, R., Wada, Y., Koga, K. & Shiratani, M., Jan 1 2017, In : MRS Advances. 2, 18, p. 995-1000 6 p.

Research output: Contribution to journalArticle

Seed
seeds
Plasmas
Water
augmentation

Preface - Surface Engineering at the International Vacuum Congress-20

Han, J. G., Martinu, L. & Shiratani, M., Oct 15 2017, In : Surface and Coatings Technology. 326, 1 p.

Research output: Contribution to journalArticle

engineering
Vacuum
vacuum

Synthesis of nanoparticles using low temperature plasmas and its application to solar cells and tracers in living body

Koga, K., Seo, H., Tanaka, A., Itagaki, N. & Shiratani, M., Jan 1 2017, Plasma Nano Science and Technology. Cvelbar, U. & Mascher, P. (eds.). 3 ed. Electrochemical Society Inc., Vol. 77. p. 17-24 8 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Solar cells
Nanoparticles
Plasmas
Temperature
Biotechnology
8 Citations (Scopus)

The protective action of osmolytes on the deleterious effects of gamma rays and atmospheric pressure plasma on protein conformational changes

Attri, P., Kim, M., Sarinont, T., Choi, E. H., Seo, H., Cho, A. E., Koga, K. & Shiratani, M., Dec 1 2017, In : Scientific reports. 7, 1, 8698.

Research output: Contribution to journalArticle

atmospheric pressure
plasma jets
myoglobin
gamma rays
proteins
2016
1 Citation (Scopus)

Catalytic improvement on counter electrode of dye-sensitized solar cells using electrospun Pt nano-fibers

Seo, H., Shiratani, M., Seneekatima, K. & Pornprasertsuk, R., Apr 1 2016, In : Journal of nanoscience and nanotechnology. 16, 4, p. 3332-3337 6 p.

Research output: Contribution to journalArticle

Electrodes
counters
Coloring Agents
solar cells
dyes
4 Citations (Scopus)

Correlation between SiH2/SiH and light-induced degradation of p-i-n hydrogenated amorphous silicon solar cells

Keya, K., Kojima, T., Torigoe, Y., Toko, S., Yamashita, D., Seo, H., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2016, In : Japanese Journal of Applied Physics. 55, 7S2, 07LE03.

Research output: Contribution to journalArticle

Silicon solar cells
Amorphous silicon
amorphous silicon
Solar cells
solar cells
1 Citation (Scopus)

DNA microarray analysis of plant seeds irradiated by active oxygen species in oxygen plasma

Hayashi, N., Ono, R., Nakano, R., Shiratani, M., Tashiro, K., Kuhara, S., Yasuda, K. & Hagiwara, H., Jan 1 2016, In : Plasma Medicine. 6, 3-4, p. 459-471 13 p.

Research output: Contribution to journalArticle

oxygen plasma
Microarrays
Seed
seeds
gene expression
5 Citations (Scopus)

Effect of sulfur doped TiO2 on photovoltaic properties of dye-sensitized solar cells

Seo, H., Nam, S. H., Itagaki, N., Koga, K., Shiratani, M. & Boo, J. H., Jul 1 2016, In : Electronic Materials Letters. 12, 4, p. 530-536 7 p.

Research output: Contribution to journalArticle

Sulfur
Photocurrents
Charge transfer
Doping (additives)
Open circuit voltage
4 Citations (Scopus)

Effects of deposition rate and ion bombardment on properties of a-C:H films deposited by H-assisted plasma CVD method

Dong, X., Koga, K., Yamashita, D., Seo, H., Itagaki, N., Shiratani, M., Setsuhara, Y., Sekine, M. & Hori, M., Jan 1 2016, In : Japanese Journal of Applied Physics. 55, 1, 01AA11.

Research output: Contribution to journalArticle

Plasma CVD
Ion bombardment
Deposition rates
bombardment
vapor deposition
5 Citations (Scopus)

Effects of gas flow rate on deposition rate and number of Si clusters incorporated into a-Si:H films

Toko, S., Torigoe, Y., Keya, K., Seo, H., Itagaki, N., Koga, K. & Shiratani, M., Jan 1 2016, In : Japanese Journal of Applied Physics. 55, 1, 01AA19.

Research output: Contribution to journalArticle

Deposition rates
gas flow
Flow of gases
flow velocity
Flow rate
17 Citations (Scopus)

Effects of irradiation distance on supply of reactive oxygen species to the bottom of a Petri dish filled with liquid by an atmospheric O2/He plasma jet

Kawasaki, T., Kusumegi, S., Kudo, A., Sakanoshita, T., Tsurumaru, T., Sato, A., Uchida, G., Koga, K. & Shiratani, M., May 7 2016, In : Journal of Applied Physics. 119, 17, 173301.

Research output: Contribution to journalArticle

parabolic reflectors
plasma jets
irradiation
oxygen
liquids
21 Citations (Scopus)

Effects of nonthermal plasma jet irradiation on the selective production of H2O2 and NO2- in liquid water

Uchida, G., Nakajima, A., Ito, T., Takenaka, K., Kawasaki, T., Koga, K., Shiratani, M. & Setsuhara, Y., Nov 28 2016, In : Journal of Applied Physics. 120, 20, 203302.

Research output: Contribution to journalArticle

plasma jets
liquid surfaces
irradiation
liquids
water
21 Citations (Scopus)

Effects of plasma irradiation using various feeding gases on growth of Raphanus sativus L.

Sarinont, T., Amano, T., Attri, P., Koga, K., Hayashi, N. & Shiratani, M., Sep 1 2016, In : Archives of Biochemistry and Biophysics. 605, p. 129-140 12 p.

Research output: Contribution to journalArticle

Raphanus
Gases
Irradiation
Plasma Gases
Plasmas

Foreword: Advanced plasma science and its applications for nitride and nanomaterials

Wakahara, A., Nakatsuka, O., Sasaki, M., Terashima, K., Amano, H., Egawa, T., Fujiwara, Y., Hiramatsu, M., Ichino, R., Inoue, Y., Ito, M., Kasu, M., Kondo, H., Miyazaki, S., Sawada, K., Sekine, M., Setsuhara, Y., Shiratani, M., Takikawa, H. & Watanabe, Y., Jan 1 2016, In : Japanese Journal of Applied Physics. 55, 1, 016501.

Research output: Contribution to journalEditorial

Nanostructured materials
Nitrides
nitrides
Plasmas
6 Citations (Scopus)

Growth enhancement and gene expression of Arabidopsis thaliana irradiated with active oxygen species

Watanabe, S., Ono, R., Hayashi, N., Shiratani, M., Tashiro, K., Kuhara, S., Inoue, A., Yasuda, K. & Hagiwara, H., Jan 1 2016, In : Japanese Journal of Applied Physics. 55, 7S2, 07LG10.

Research output: Contribution to journalArticle

gene expression
Gene expression
Plasmas
Oxygen
augmentation

Improvement of charge transportation in Si quantum dot-sensitized solar cells using vanadium doped TiO2

Seo, H., Ichida, D., Hashimoto, S., Itagaki, N., Koga, K., Shiratani, M., Nam, S. H. & Boo, J. H., May 1 2016, In : Journal of nanoscience and nanotechnology. 16, 5, p. 4875-4879 5 p.

Research output: Contribution to journalArticle

Quantum Dots
Vanadium
Electric Impedance
Electrons
Particle Size
23 Citations (Scopus)

Improving the performance of quantum dot sensitized solar cells through CdNiS quantum dots with reduced recombination and enhanced electron lifetime

Gopi, C. V. V. M., Venkata-Haritha, M., Seo, H., Singh, S., Kim, S. K., Shiratani, M. & Kim, H. J., Jan 1 2016, In : Dalton Transactions. 45, 20, p. 8447-8457 11 p.

Research output: Contribution to journalArticle

Semiconductor quantum dots
Solar cells
Conversion efficiency
Electrons
Doping (additives)

Inter-particle potential fluctuation of two fine particles suspended in Ar plasmas

Soejima, M., Koga, K. & Shiratani, M., Nov 21 2016, 16th International Conference on Nanotechnology - IEEE NANO 2016. Institute of Electrical and Electronics Engineers Inc., p. 671-673 3 p. 7751376. (16th International Conference on Nanotechnology - IEEE NANO 2016).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Plasma sheaths
Plasmas
plasma potentials
plasma sheaths
collisions
11 Citations (Scopus)

Low temperature synthesis of silicon quantum dots with plasma chemistry control in dual frequency non-thermal plasmas

Sahu, B. B., Yin, Y., Han, J. G. & Shiratani, M., Jan 1 2016, In : Physical Chemistry Chemical Physics. 18, 23, p. 15697-15710 14 p.

Research output: Contribution to journalArticle

plasma chemistry
Silicon
Semiconductor quantum dots
quantum dots
Plasmas
19 Citations (Scopus)

Mechanism and comparison of needle-type non-thermal direct and indirect atmospheric pressure plasma jets on the degradation of dyes

Attri, P., Yusupov, M., Park, J. H., Lingamdinne, L. P., Koduru, J. R., Shiratani, M., Choi, E. H. & Bogaerts, A., Oct 6 2016, In : Scientific reports. 6, 34419.

Research output: Contribution to journalArticle

needles
plasma jets
atmospheric pressure
dyes
degradation
1 Citation (Scopus)
Optical band gaps
Composite films
Nanoparticles
plasma jets
Chemical vapor deposition
2 Citations (Scopus)

Plant Growth Response to Atmospheric Air Plasma Treatments of Seeds of 5 Plant Species

Shiratani, M., Sarinont, T., Amano, T., Hayashi, N. & Koga, K., Jan 1 2016, In : MRS Advances. 1, 18, p. 1265-1269 5 p.

Research output: Contribution to journalArticle

Seed
seeds
Plasmas
air
rice
3 Citations (Scopus)

Plasma diagnostic approach for the low-temperature deposition of silicon quantum dots using dual frequency PECVD

Sahu, B. B., Yin, Y., Lee, J. S., Han, J. G. & Shiratani, M., Sep 2 2016, In : Journal of Physics D: Applied Physics. 49, 39, 395203.

Research output: Contribution to journalArticle

Plasma diagnostics
plasma diagnostics
Silicon
plasma frequencies
Plasma enhanced chemical vapor deposition