A 3D metallic structure array for refractive index sensing with optical vortex

E. Maeda, Y. Lee, Y. L. Ho, S. Fujikawa, J. J. Delaunay

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    A simple and large-scale fabrication technique for three dimensional structure arrays using a photolithography process was applied to realize an array of high-aspect-ratio metallic fins. The fin array enables light confinement between the high-aspect-ratio fins, thus generating optical vortices. The light confinement between the fins produces sharp dips in the reflection spectrum of the array. We show that the position of the dip wavelength is sensitive to change in the refractive index of the surrounding medium. Sensitivity to change in the refractive index was quantified by optical simulation and experimental measurements.

    Original languageEnglish
    Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
    Pages973-976
    Number of pages4
    DOIs
    Publication statusPublished - 2013
    EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
    Duration: Jan 20 2013Jan 24 2013

    Publication series

    NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
    ISSN (Print)1084-6999

    Other

    OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
    CountryTaiwan, Province of China
    CityTaipei
    Period1/20/131/24/13

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Condensed Matter Physics
    • Mechanical Engineering
    • Electrical and Electronic Engineering

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