A 3D metallic structure array for refractive index sensing with optical vortex

E. Maeda, Y. Lee, Y. L. Ho, Shigenori Fujikawa, J. J. Delaunay

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A simple and large-scale fabrication technique for three dimensional structure arrays using a photolithography process was applied to realize an array of high-aspect-ratio metallic fins. The fin array enables light confinement between the high-aspect-ratio fins, thus generating optical vortices. The light confinement between the fins produces sharp dips in the reflection spectrum of the array. We show that the position of the dip wavelength is sensitive to change in the refractive index of the surrounding medium. Sensitivity to change in the refractive index was quantified by optical simulation and experimental measurements.

Original languageEnglish
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages973-976
Number of pages4
DOIs
Publication statusPublished - Apr 2 2013
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: Jan 20 2013Jan 24 2013

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period1/20/131/24/13

Fingerprint

fins
Aspect ratio
Refractive index
Vortex flow
vortices
refractivity
Photolithography
high aspect ratio
Fabrication
Wavelength
photolithography
fabrication
sensitivity
wavelengths
simulation

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Maeda, E., Lee, Y., Ho, Y. L., Fujikawa, S., & Delaunay, J. J. (2013). A 3D metallic structure array for refractive index sensing with optical vortex. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 973-976). [6474409] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474409

A 3D metallic structure array for refractive index sensing with optical vortex. / Maeda, E.; Lee, Y.; Ho, Y. L.; Fujikawa, Shigenori; Delaunay, J. J.

IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 973-976 6474409 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Maeda, E, Lee, Y, Ho, YL, Fujikawa, S & Delaunay, JJ 2013, A 3D metallic structure array for refractive index sensing with optical vortex. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474409, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 973-976, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, Province of China, 1/20/13. https://doi.org/10.1109/MEMSYS.2013.6474409
Maeda E, Lee Y, Ho YL, Fujikawa S, Delaunay JJ. A 3D metallic structure array for refractive index sensing with optical vortex. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 973-976. 6474409. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474409
Maeda, E. ; Lee, Y. ; Ho, Y. L. ; Fujikawa, Shigenori ; Delaunay, J. J. / A 3D metallic structure array for refractive index sensing with optical vortex. IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. pp. 973-976 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).
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