A character size optimization technique for throughput enhancement of character projection lithography

Makoto Sugihara, Taiga Takata, Kenta Nakamura, Ryoichi Inanami, Hiroaki Hayashi, Katsumi Kishimoto, Tetsuya Hasebe, Yukihiro Kawano, Yusuke Matsunaga, Kazuaki Murakam, Katsuya Okumura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

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Engineering & Materials Science