A collective laser thomson scattering system for diagnostics of laser-produced plasmas for extreme ultraviolet light sources

Kentaro Tomita, Kazuki Nakayama, Kazuya Inoue, Atsushi Sunahara, Kiichiro Uchino

Research output: Contribution to journalArticle

7 Citations (Scopus)

Abstract

To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (ne) and electron temperature (Te). Plasmas having parameters necessary for an EUV light source (ne = 10 24 {10 25 m -3 , Te = 30{50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.

Original languageEnglish
Article number076101
JournalApplied Physics Express
Volume6
Issue number7
DOIs
Publication statusPublished - Jul 1 2013

Fingerprint

Laser produced plasmas
Thomson scattering
laser plasmas
ultraviolet radiation
Light sources
light sources
Scattering
Plasmas
Lasers
lasers
carbon lasers
Electron temperature
Tin
Carrier concentration
tin
electron energy
Carbon
Ultraviolet Rays
Temperature
temperature

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

Cite this

A collective laser thomson scattering system for diagnostics of laser-produced plasmas for extreme ultraviolet light sources. / Tomita, Kentaro; Nakayama, Kazuki; Inoue, Kazuya; Sunahara, Atsushi; Uchino, Kiichiro.

In: Applied Physics Express, Vol. 6, No. 7, 076101, 01.07.2013.

Research output: Contribution to journalArticle

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