A collective laser thomson scattering system for diagnostics of laser-produced plasmas for extreme ultraviolet light sources

Kentaro Tomita, Kazuki Nakayama, Kazuya Inoue, Atsushi Sunahara, Kiichiro Uchino

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

To develop a diagnostic system for laser-produced plasmas for extreme ultraviolet (EUV) light sources, collective laser Thomson scattering (LTS) was applied to laser-produced carbon plasmas to measure plasma parameters such as electron density (ne) and electron temperature (Te). Plasmas having parameters necessary for an EUV light source (ne = 1024{1025m -3, Te = 30{50 eV) were achieved, and these parameters were successfully evaluated by a pilot diagnostic system with errors below 10%. From these results, an LTS system for diagnostics of tin plasmas for real EUV light sources was designed.

Original languageEnglish
Article number076101
JournalApplied Physics Express
Volume6
Issue number7
DOIs
Publication statusPublished - Jul 2013

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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