A comparative study of air and nitrogen thermal plasmas for PFCs decomposition

Sooseok Choi, Sang Hee Hong, Hyun Seok Lee, Takayuki Watanabe

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Air and nitrogen thermal plasmas were generated from a plasma torch with hollow electrodes to abate CF 4 which is a serious non-degradable greenhouse gas exhausted from the semiconductor manufacturing process. Numerical analysis and experimental demonstration have been carried out to compare effects of plasma forming gas on the decomposition process at the same electric input power of 60kW and waste gas flow rate of 200L/min. Higher temperature and longer residence time were expected in nitrogen thermal plasma than air thermal plasma, because relatively low flow rate of nitrogen plasma gas is required at fixed input power compared with air plasma gas. Although small quantity of NF 3 was produced in nitrogen thermal plasma process with hydrogen reactant gas, high destruction and removal efficiency of 99.6% was achievable along with suppression of unwanted NOx generation.

Original languageEnglish
Pages (from-to)193-200
Number of pages8
JournalChemical Engineering Journal
Volume185-186
DOIs
Publication statusPublished - Mar 15 2012
Externally publishedYes

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All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Environmental Chemistry
  • Chemical Engineering(all)
  • Industrial and Manufacturing Engineering

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