Abstract
Removal of nano-particles is important from the viewpoint that nano-materials may be hazardous to health when they deposit within the respiratory system. We have developed a method for measuring a sticking probability of nano-particles to a wall. The probability of nano-particles above 2 nm in size to a stainless-steel wall is close to 100% at a low ambient pressure below about 160 Pa. Based on this result, we have developed a device for trapping nano-particles formed in low pressure processing plasmas in order to reduce nano-waste, that is, waste of nm in size. The device traps nano-particles by collision and attachment of nano-particles to its surface. The trapping efficiency of the device for nano-particles above 2 nm in size is more than 99.8% at a low ambient pressure below about 160 Pa.
| Original language | English |
|---|---|
| Pages (from-to) | 5701-5704 |
| Number of pages | 4 |
| Journal | Surface and Coatings Technology |
| Volume | 201 |
| Issue number | 9-11 SPEC. ISS. |
| DOIs | |
| Publication status | Published - Feb 26 2007 |
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All Science Journal Classification (ASJC) codes
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry
Cite this
A device for trapping nano-particles formed in processing plasmas for reduction of nano-waste. / Iwashita, Shinya; Koga, Kazunori; Shiratani, Masaharu.
In: Surface and Coatings Technology, Vol. 201, No. 9-11 SPEC. ISS., 26.02.2007, p. 5701-5704.Research output: Contribution to journal › Article
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TY - JOUR
T1 - A device for trapping nano-particles formed in processing plasmas for reduction of nano-waste
AU - Iwashita, Shinya
AU - Koga, Kazunori
AU - Shiratani, Masaharu
PY - 2007/2/26
Y1 - 2007/2/26
N2 - Removal of nano-particles is important from the viewpoint that nano-materials may be hazardous to health when they deposit within the respiratory system. We have developed a method for measuring a sticking probability of nano-particles to a wall. The probability of nano-particles above 2 nm in size to a stainless-steel wall is close to 100% at a low ambient pressure below about 160 Pa. Based on this result, we have developed a device for trapping nano-particles formed in low pressure processing plasmas in order to reduce nano-waste, that is, waste of nm in size. The device traps nano-particles by collision and attachment of nano-particles to its surface. The trapping efficiency of the device for nano-particles above 2 nm in size is more than 99.8% at a low ambient pressure below about 160 Pa.
AB - Removal of nano-particles is important from the viewpoint that nano-materials may be hazardous to health when they deposit within the respiratory system. We have developed a method for measuring a sticking probability of nano-particles to a wall. The probability of nano-particles above 2 nm in size to a stainless-steel wall is close to 100% at a low ambient pressure below about 160 Pa. Based on this result, we have developed a device for trapping nano-particles formed in low pressure processing plasmas in order to reduce nano-waste, that is, waste of nm in size. The device traps nano-particles by collision and attachment of nano-particles to its surface. The trapping efficiency of the device for nano-particles above 2 nm in size is more than 99.8% at a low ambient pressure below about 160 Pa.
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UR - http://www.scopus.com/inward/citedby.url?scp=33846518161&partnerID=8YFLogxK
U2 - 10.1016/j.surfcoat.2006.07.060
DO - 10.1016/j.surfcoat.2006.07.060
M3 - Article
AN - SCOPUS:33846518161
VL - 201
SP - 5701
EP - 5704
JO - Surface and Coatings Technology
JF - Surface and Coatings Technology
SN - 0257-8972
IS - 9-11 SPEC. ISS.
ER -