A device for trapping nano-particles formed in processing plasmas for reduction of nano-waste

Research output: Contribution to journalArticle

6 Citations (Scopus)

Abstract

Removal of nano-particles is important from the viewpoint that nano-materials may be hazardous to health when they deposit within the respiratory system. We have developed a method for measuring a sticking probability of nano-particles to a wall. The probability of nano-particles above 2 nm in size to a stainless-steel wall is close to 100% at a low ambient pressure below about 160 Pa. Based on this result, we have developed a device for trapping nano-particles formed in low pressure processing plasmas in order to reduce nano-waste, that is, waste of nm in size. The device traps nano-particles by collision and attachment of nano-particles to its surface. The trapping efficiency of the device for nano-particles above 2 nm in size is more than 99.8% at a low ambient pressure below about 160 Pa.

Original languageEnglish
Pages (from-to)5701-5704
Number of pages4
JournalSurface and Coatings Technology
Volume201
Issue number9-11 SPEC. ISS.
DOIs
Publication statusPublished - Feb 26 2007

Fingerprint

Plasma applications
trapping
Respiratory system
Stainless Steel
Deposits
Stainless steel
Health
respiratory system
health
attachment
stainless steels
low pressure
deposits
traps
collisions

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

A device for trapping nano-particles formed in processing plasmas for reduction of nano-waste. / Iwashita, Shinya; Koga, Kazunori; Shiratani, Masaharu.

In: Surface and Coatings Technology, Vol. 201, No. 9-11 SPEC. ISS., 26.02.2007, p. 5701-5704.

Research output: Contribution to journalArticle

@article{1b2716078478405baa3bcf505848ec25,
title = "A device for trapping nano-particles formed in processing plasmas for reduction of nano-waste",
abstract = "Removal of nano-particles is important from the viewpoint that nano-materials may be hazardous to health when they deposit within the respiratory system. We have developed a method for measuring a sticking probability of nano-particles to a wall. The probability of nano-particles above 2 nm in size to a stainless-steel wall is close to 100{\%} at a low ambient pressure below about 160 Pa. Based on this result, we have developed a device for trapping nano-particles formed in low pressure processing plasmas in order to reduce nano-waste, that is, waste of nm in size. The device traps nano-particles by collision and attachment of nano-particles to its surface. The trapping efficiency of the device for nano-particles above 2 nm in size is more than 99.8{\%} at a low ambient pressure below about 160 Pa.",
author = "Shinya Iwashita and Kazunori Koga and Masaharu Shiratani",
year = "2007",
month = "2",
day = "26",
doi = "10.1016/j.surfcoat.2006.07.060",
language = "English",
volume = "201",
pages = "5701--5704",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier",
number = "9-11 SPEC. ISS.",

}

TY - JOUR

T1 - A device for trapping nano-particles formed in processing plasmas for reduction of nano-waste

AU - Iwashita, Shinya

AU - Koga, Kazunori

AU - Shiratani, Masaharu

PY - 2007/2/26

Y1 - 2007/2/26

N2 - Removal of nano-particles is important from the viewpoint that nano-materials may be hazardous to health when they deposit within the respiratory system. We have developed a method for measuring a sticking probability of nano-particles to a wall. The probability of nano-particles above 2 nm in size to a stainless-steel wall is close to 100% at a low ambient pressure below about 160 Pa. Based on this result, we have developed a device for trapping nano-particles formed in low pressure processing plasmas in order to reduce nano-waste, that is, waste of nm in size. The device traps nano-particles by collision and attachment of nano-particles to its surface. The trapping efficiency of the device for nano-particles above 2 nm in size is more than 99.8% at a low ambient pressure below about 160 Pa.

AB - Removal of nano-particles is important from the viewpoint that nano-materials may be hazardous to health when they deposit within the respiratory system. We have developed a method for measuring a sticking probability of nano-particles to a wall. The probability of nano-particles above 2 nm in size to a stainless-steel wall is close to 100% at a low ambient pressure below about 160 Pa. Based on this result, we have developed a device for trapping nano-particles formed in low pressure processing plasmas in order to reduce nano-waste, that is, waste of nm in size. The device traps nano-particles by collision and attachment of nano-particles to its surface. The trapping efficiency of the device for nano-particles above 2 nm in size is more than 99.8% at a low ambient pressure below about 160 Pa.

UR - http://www.scopus.com/inward/record.url?scp=33846518161&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=33846518161&partnerID=8YFLogxK

U2 - 10.1016/j.surfcoat.2006.07.060

DO - 10.1016/j.surfcoat.2006.07.060

M3 - Article

AN - SCOPUS:33846518161

VL - 201

SP - 5701

EP - 5704

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

SN - 0257-8972

IS - 9-11 SPEC. ISS.

ER -