Abstract
Removal of nano-particles is important from the viewpoint that nano-materials may be hazardous to health when they deposit within the respiratory system. We have developed a method for measuring a sticking probability of nano-particles to a wall. The probability of nano-particles above 2 nm in size to a stainless-steel wall is close to 100% at a low ambient pressure below about 160 Pa. Based on this result, we have developed a device for trapping nano-particles formed in low pressure processing plasmas in order to reduce nano-waste, that is, waste of nm in size. The device traps nano-particles by collision and attachment of nano-particles to its surface. The trapping efficiency of the device for nano-particles above 2 nm in size is more than 99.8% at a low ambient pressure below about 160 Pa.
| Original language | English |
|---|---|
| Pages (from-to) | 5701-5704 |
| Number of pages | 4 |
| Journal | Surface and Coatings Technology |
| Volume | 201 |
| Issue number | 9-11 SPEC. ISS. |
| DOIs | |
| Publication status | Published - Feb 26 2007 |
All Science Journal Classification (ASJC) codes
- Chemistry(all)
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Materials Chemistry