A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector

Jianxun Hong, Andrew Mark Spring, Feng Qiu, Shiyoshi Yokoyama

Research output: Contribution to journalArticle

Abstract

We propose a high efficiency apodized grating coupler with a bottom reflector for silicon nitride photonic integrated circuits. The reflector consists of a stack of alternate silicon nitride and silicon dioxide quarter-wave films. The design, fabrication and optical characterization of the couplers has been presented. The measured fiber to detector insertion loss was −3.5 dB which corresponds to a peak coupling efficiency of −1.75 dB. A 3 dB wavelength bandwidth of 76.34 nm was demonstrated for the grating coupler with a 20-layer reflector. The fabrication process is CMOS-compatible and requires only a single etching step.

Original languageEnglish
Article number12988
JournalScientific reports
Volume9
Issue number1
DOIs
Publication statusPublished - Dec 1 2019

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Optics and Photonics
Silicon Dioxide
silicon nitride

All Science Journal Classification (ASJC) codes

  • General

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A high efficiency silicon nitride waveguide grating coupler with a multilayer bottom reflector. / Hong, Jianxun; Spring, Andrew Mark; Qiu, Feng; Yokoyama, Shiyoshi.

In: Scientific reports, Vol. 9, No. 1, 12988, 01.12.2019.

Research output: Contribution to journalArticle

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