A high fill-factor comb-driven XY-stage with topological layer switch architecture

K. Takahashi; M. Mita; H. Fujita; H. Toshiyoshi

A high fill-factor comb-driven XY-stage with topological layer switch architecture

K. Takahashi, M. Mita, H. Fujita, H. Toshiyoshi

Research output: Contribution to conference › Paper › peer-review

Abstract

We present a novel design of comb-driven double-gimbal XY-stage actuators for a 2D optical micro lens scanner, which has been realized for the first time by topologically separating the actuator elements in two layers: all the electrical parts (electrodes and interconnections) are in the SOI (Silicon-on-lnsulator) layer, while the mechanical parts (suspensions, frame, and XY-stage) are in the substrate. The XY-stage moved 19 μm in the X and Y direction independently.

Original language	English
Pages	2001-2002
Number of pages	2
Publication status	Published - 2005
Externally published	Yes
Event	IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 - Takamatsu, Japan Duration: Dec 6 2005 → Dec 9 2005

Other

Other	IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005
Country/Territory	Japan
City	Takamatsu
Period	12/6/05 → 12/9/05

All Science Journal Classification (ASJC) codes

Engineering(all)

Cite this

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title = "A high fill-factor comb-driven XY-stage with topological layer switch architecture",

abstract = "We present a novel design of comb-driven double-gimbal XY-stage actuators for a 2D optical micro lens scanner, which has been realized for the first time by topologically separating the actuator elements in two layers: all the electrical parts (electrodes and interconnections) are in the SOI (Silicon-on-lnsulator) layer, while the mechanical parts (suspensions, frame, and XY-stage) are in the substrate. The XY-stage moved 19 μm in the X and Y direction independently.",

author = "K. Takahashi and M. Mita and H. Fujita and H. Toshiyoshi",

note = "Copyright: Copyright 2008 Elsevier B.V., All rights reserved.; IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 ; Conference date: 06-12-2005 Through 09-12-2005",

year = "2005",

language = "English",

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AU - Takahashi, K.

AU - Mita, M.

AU - Fujita, H.

AU - Toshiyoshi, H.

PY - 2005

Y1 - 2005

N2 - We present a novel design of comb-driven double-gimbal XY-stage actuators for a 2D optical micro lens scanner, which has been realized for the first time by topologically separating the actuator elements in two layers: all the electrical parts (electrodes and interconnections) are in the SOI (Silicon-on-lnsulator) layer, while the mechanical parts (suspensions, frame, and XY-stage) are in the substrate. The XY-stage moved 19 μm in the X and Y direction independently.

AB - We present a novel design of comb-driven double-gimbal XY-stage actuators for a 2D optical micro lens scanner, which has been realized for the first time by topologically separating the actuator elements in two layers: all the electrical parts (electrodes and interconnections) are in the SOI (Silicon-on-lnsulator) layer, while the mechanical parts (suspensions, frame, and XY-stage) are in the substrate. The XY-stage moved 19 μm in the X and Y direction independently.

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M3 - Paper

AN - SCOPUS:33644583068

SP - 2001

EP - 2002

T2 - IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005

Y2 - 6 December 2005 through 9 December 2005

ER -

A high fill-factor comb-driven XY-stage with topological layer switch architecture

Abstract

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All Science Journal Classification (ASJC) codes

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