A high fill-factor comb-driven XY-stage with topological layer switch architecture

K. Takahashi, M. Mita, H. Fujita, H. Toshiyoshi

Research output: Contribution to conferencePaperpeer-review

Abstract

We present a novel design of comb-driven double-gimbal XY-stage actuators for a 2D optical micro lens scanner, which has been realized for the first time by topologically separating the actuator elements in two layers: all the electrical parts (electrodes and interconnections) are in the SOI (Silicon-on-lnsulator) layer, while the mechanical parts (suspensions, frame, and XY-stage) are in the substrate. The XY-stage moved 19 μm in the X and Y direction independently.

Original languageEnglish
Pages2001-2002
Number of pages2
Publication statusPublished - 2005
Externally publishedYes
EventIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 - Takamatsu, Japan
Duration: Dec 6 2005Dec 9 2005

Other

OtherIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005
Country/TerritoryJapan
CityTakamatsu
Period12/6/0512/9/05

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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