Abstract
We present a novel design of comb-driven double-gimbal XY-stage actuators for a 2D optical micro lens scanner, which has been realized for the first time by topologically separating the actuator elements in two layers: all the electrical parts (electrodes and interconnections) are in the SOI (Silicon-on-lnsulator) layer, while the mechanical parts (suspensions, frame, and XY-stage) are in the substrate. The XY-stage moved 19 μm in the X and Y direction independently.
| Original language | English |
|---|---|
| Pages | 2001-2002 |
| Number of pages | 2 |
| Publication status | Published - Dec 1 2005 |
| Event | IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 - Takamatsu, Japan Duration: Dec 6 2005 → Dec 9 2005 |
Other
| Other | IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 |
|---|---|
| Country | Japan |
| City | Takamatsu |
| Period | 12/6/05 → 12/9/05 |
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All Science Journal Classification (ASJC) codes
- Engineering(all)
Cite this
A high fill-factor comb-driven XY-stage with topological layer switch architecture. / Takahashi, Koji; Mita, M.; Fujita, H.; Toshiyoshi, H.
2005. 2001-2002 Paper presented at IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan.Research output: Contribution to conference › Paper
}
TY - CONF
T1 - A high fill-factor comb-driven XY-stage with topological layer switch architecture
AU - Takahashi, Koji
AU - Mita, M.
AU - Fujita, H.
AU - Toshiyoshi, H.
PY - 2005/12/1
Y1 - 2005/12/1
N2 - We present a novel design of comb-driven double-gimbal XY-stage actuators for a 2D optical micro lens scanner, which has been realized for the first time by topologically separating the actuator elements in two layers: all the electrical parts (electrodes and interconnections) are in the SOI (Silicon-on-lnsulator) layer, while the mechanical parts (suspensions, frame, and XY-stage) are in the substrate. The XY-stage moved 19 μm in the X and Y direction independently.
AB - We present a novel design of comb-driven double-gimbal XY-stage actuators for a 2D optical micro lens scanner, which has been realized for the first time by topologically separating the actuator elements in two layers: all the electrical parts (electrodes and interconnections) are in the SOI (Silicon-on-lnsulator) layer, while the mechanical parts (suspensions, frame, and XY-stage) are in the substrate. The XY-stage moved 19 μm in the X and Y direction independently.
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UR - http://www.scopus.com/inward/citedby.url?scp=33644583068&partnerID=8YFLogxK
M3 - Paper
AN - SCOPUS:33644583068
SP - 2001
EP - 2002
ER -