A high fill-factor comb-driven XY-stage with topological layer switch architecture

Koji Takahashi, M. Mita, H. Fujita, H. Toshiyoshi

Research output: Contribution to conferencePaper

Abstract

We present a novel design of comb-driven double-gimbal XY-stage actuators for a 2D optical micro lens scanner, which has been realized for the first time by topologically separating the actuator elements in two layers: all the electrical parts (electrodes and interconnections) are in the SOI (Silicon-on-lnsulator) layer, while the mechanical parts (suspensions, frame, and XY-stage) are in the substrate. The XY-stage moved 19 μm in the X and Y direction independently.

Original languageEnglish
Pages2001-2002
Number of pages2
Publication statusPublished - Dec 1 2005
EventIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005 - Takamatsu, Japan
Duration: Dec 6 2005Dec 9 2005

Other

OtherIDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005
CountryJapan
CityTakamatsu
Period12/6/0512/9/05

Fingerprint

Actuators
Switches
Lenses
Silicon
Electrodes
Substrates

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Takahashi, K., Mita, M., Fujita, H., & Toshiyoshi, H. (2005). A high fill-factor comb-driven XY-stage with topological layer switch architecture. 2001-2002. Paper presented at IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan.

A high fill-factor comb-driven XY-stage with topological layer switch architecture. / Takahashi, Koji; Mita, M.; Fujita, H.; Toshiyoshi, H.

2005. 2001-2002 Paper presented at IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan.

Research output: Contribution to conferencePaper

Takahashi, K, Mita, M, Fujita, H & Toshiyoshi, H 2005, 'A high fill-factor comb-driven XY-stage with topological layer switch architecture' Paper presented at IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan, 12/6/05 - 12/9/05, pp. 2001-2002.
Takahashi K, Mita M, Fujita H, Toshiyoshi H. A high fill-factor comb-driven XY-stage with topological layer switch architecture. 2005. Paper presented at IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan.
Takahashi, Koji ; Mita, M. ; Fujita, H. ; Toshiyoshi, H. / A high fill-factor comb-driven XY-stage with topological layer switch architecture. Paper presented at IDW/AD'05 - 12th International Display Workshops in Conjunction with Asia Display 2005, Takamatsu, Japan.2 p.
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