A High-Speed Thermoelectric Infrared Sensor Fabricated by CMOS Technology and Micromachining

Research output: Contribution to journalArticle

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)393-396
Number of pages4
JournalIEEJ Transactions on Sensors and Micromachines
Volume126
Issue number8
DOIs
Publication statusPublished - Jan 1 2006
Externally publishedYes

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Micromachining
Infrared radiation
Sensors

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

A High-Speed Thermoelectric Infrared Sensor Fabricated by CMOS Technology and Micromachining. / Hirota, masaki.

In: IEEJ Transactions on Sensors and Micromachines, Vol. 126, No. 8, 01.01.2006, p. 393-396.

Research output: Contribution to journalArticle

@article{70b1b92b30d247179b15db7d223f38cc,
title = "A High-Speed Thermoelectric Infrared Sensor Fabricated by CMOS Technology and Micromachining",
author = "masaki Hirota",
year = "2006",
month = "1",
day = "1",
doi = "10.1541/ieejsmas.126.393",
language = "English",
volume = "126",
pages = "393--396",
journal = "IEEJ Transactions on Sensors and Micromachines",
issn = "1341-8939",
publisher = "The Institute of Electrical Engineers of Japan",
number = "8",

}

TY - JOUR

T1 - A High-Speed Thermoelectric Infrared Sensor Fabricated by CMOS Technology and Micromachining

AU - Hirota, masaki

PY - 2006/1/1

Y1 - 2006/1/1

UR - http://www.scopus.com/inward/record.url?scp=69049096586&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=69049096586&partnerID=8YFLogxK

U2 - 10.1541/ieejsmas.126.393

DO - 10.1541/ieejsmas.126.393

M3 - Article

AN - SCOPUS:69049096586

VL - 126

SP - 393

EP - 396

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

SN - 1341-8939

IS - 8

ER -