A highly efficient nanofocusing system for soft x rays

Yoko Takeo; Hiroto Motoyama; Takenori Shimamura; Takashi Kimura; Takehiro Kume; Yusuke Matsuzawa; Takahiro Saito; Yoichi Imamura; Hiroaki Miyashita; Kentaro Hiraguri; Hirokazu Hashizume; Yasunori Senba; Hikaru Kishimoto; Haruhiko Ohashi; Hidekazu Mimura

doi:10.1063/5.0027118

A highly efficient nanofocusing system for soft x rays

Yoko Takeo, Hiroto Motoyama, Takenori Shimamura, Takashi Kimura, Takehiro Kume, Yusuke Matsuzawa, Takahiro Saito, Yoichi Imamura, Hiroaki Miyashita, Kentaro Hiraguri, Hirokazu Hashizume, Yasunori Senba, Hikaru Kishimoto, Haruhiko Ohashi, Hidekazu Mimura

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The focusing of x rays is essential in various types of x-ray microscopy because the size and flux of the illuminating beam determine the spatial resolution and signal intensity, respectively. A system with grazing incidence mirrors allows highly efficient x ray focusing with beam dimensions on the nanometer scale. Tube-shaped mirrors with a large numerical aperture and high demagnification, including ellipsoidal mirrors and Wolter mirrors, have recently been developed for soft x-ray nanofocusing. However, these mirrors have low efficiency because they cannot focus the central part of the illumination beam. Here, we propose a two-stage focusing system, in which a ring-shaped beam formed by a ring-focusing mirror illuminates a quasi-Wolter mirror. A prototype of the system is experimentally constructed at beamline BL25SU-A of SPring-8. Observation of the wavefront error based on ptychography enables efficient alignment of the two mirrors. Using this alignment procedure, we achieve a spot size of less than 200 nm at 300 eV.

Original language	English
Article number	0027118
Journal	Applied Physics Letters
Volume	117
Issue number	15
DOIs	https://doi.org/10.1063/5.0027118
Publication status	Published - Oct 12 2020
Externally published	Yes

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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10.1063/5.0027118

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A highly efficient nanofocusing system for soft x rays. / Takeo, Yoko; Motoyama, Hiroto; Shimamura, Takenori; Kimura, Takashi; Kume, Takehiro; Matsuzawa, Yusuke; Saito, Takahiro; Imamura, Yoichi; Miyashita, Hiroaki; Hiraguri, Kentaro; Hashizume, Hirokazu; Senba, Yasunori; Kishimoto, Hikaru; Ohashi, Haruhiko; Mimura, Hidekazu.

In: Applied Physics Letters, Vol. 117, No. 15, 0027118, 12.10.2020.

Research output: Contribution to journal › Article › peer-review

Takeo, Yoko ; Motoyama, Hiroto ; Shimamura, Takenori ; Kimura, Takashi ; Kume, Takehiro ; Matsuzawa, Yusuke ; Saito, Takahiro ; Imamura, Yoichi ; Miyashita, Hiroaki ; Hiraguri, Kentaro ; Hashizume, Hirokazu ; Senba, Yasunori ; Kishimoto, Hikaru ; Ohashi, Haruhiko ; Mimura, Hidekazu. / A highly efficient nanofocusing system for soft x rays. In: Applied Physics Letters. 2020 ; Vol. 117, No. 15.

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title = "A highly efficient nanofocusing system for soft x rays",

abstract = "The focusing of x rays is essential in various types of x-ray microscopy because the size and flux of the illuminating beam determine the spatial resolution and signal intensity, respectively. A system with grazing incidence mirrors allows highly efficient x ray focusing with beam dimensions on the nanometer scale. Tube-shaped mirrors with a large numerical aperture and high demagnification, including ellipsoidal mirrors and Wolter mirrors, have recently been developed for soft x-ray nanofocusing. However, these mirrors have low efficiency because they cannot focus the central part of the illumination beam. Here, we propose a two-stage focusing system, in which a ring-shaped beam formed by a ring-focusing mirror illuminates a quasi-Wolter mirror. A prototype of the system is experimentally constructed at beamline BL25SU-A of SPring-8. Observation of the wavefront error based on ptychography enables efficient alignment of the two mirrors. Using this alignment procedure, we achieve a spot size of less than 200 nm at 300 eV.",

author = "Yoko Takeo and Hiroto Motoyama and Takenori Shimamura and Takashi Kimura and Takehiro Kume and Yusuke Matsuzawa and Takahiro Saito and Yoichi Imamura and Hiroaki Miyashita and Kentaro Hiraguri and Hirokazu Hashizume and Yasunori Senba and Hikaru Kishimoto and Haruhiko Ohashi and Hidekazu Mimura",

note = "Funding Information: The present study was supported by Grants-in-Aid for Scientific Research (A) (Grant No. 19H00736), Scientific Research (B) (Grant No. 20H04451), JSPS Fellows (Grant No. 17J04201), and Young Scientists (A) (Grant No. 16H05989), from the Ministry of Education, Sports, Culture, Science and Technology, Japan (MEXT). This work was also supported by JST, PRESTO (Grant No. JPMJPR1772), Japan. The experiment was carried out under SPring-8 Proposal Nos. 2019A2070 and 2019B1758.",

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doi = "10.1063/5.0027118",

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AU - Takeo, Yoko

AU - Motoyama, Hiroto

AU - Shimamura, Takenori

AU - Kimura, Takashi

AU - Kume, Takehiro

AU - Matsuzawa, Yusuke

AU - Saito, Takahiro

AU - Imamura, Yoichi

AU - Miyashita, Hiroaki

AU - Hiraguri, Kentaro

AU - Hashizume, Hirokazu

AU - Senba, Yasunori

AU - Kishimoto, Hikaru

AU - Ohashi, Haruhiko

AU - Mimura, Hidekazu

N1 - Funding Information: The present study was supported by Grants-in-Aid for Scientific Research (A) (Grant No. 19H00736), Scientific Research (B) (Grant No. 20H04451), JSPS Fellows (Grant No. 17J04201), and Young Scientists (A) (Grant No. 16H05989), from the Ministry of Education, Sports, Culture, Science and Technology, Japan (MEXT). This work was also supported by JST, PRESTO (Grant No. JPMJPR1772), Japan. The experiment was carried out under SPring-8 Proposal Nos. 2019A2070 and 2019B1758.

PY - 2020/10/12

Y1 - 2020/10/12

N2 - The focusing of x rays is essential in various types of x-ray microscopy because the size and flux of the illuminating beam determine the spatial resolution and signal intensity, respectively. A system with grazing incidence mirrors allows highly efficient x ray focusing with beam dimensions on the nanometer scale. Tube-shaped mirrors with a large numerical aperture and high demagnification, including ellipsoidal mirrors and Wolter mirrors, have recently been developed for soft x-ray nanofocusing. However, these mirrors have low efficiency because they cannot focus the central part of the illumination beam. Here, we propose a two-stage focusing system, in which a ring-shaped beam formed by a ring-focusing mirror illuminates a quasi-Wolter mirror. A prototype of the system is experimentally constructed at beamline BL25SU-A of SPring-8. Observation of the wavefront error based on ptychography enables efficient alignment of the two mirrors. Using this alignment procedure, we achieve a spot size of less than 200 nm at 300 eV.

AB - The focusing of x rays is essential in various types of x-ray microscopy because the size and flux of the illuminating beam determine the spatial resolution and signal intensity, respectively. A system with grazing incidence mirrors allows highly efficient x ray focusing with beam dimensions on the nanometer scale. Tube-shaped mirrors with a large numerical aperture and high demagnification, including ellipsoidal mirrors and Wolter mirrors, have recently been developed for soft x-ray nanofocusing. However, these mirrors have low efficiency because they cannot focus the central part of the illumination beam. Here, we propose a two-stage focusing system, in which a ring-shaped beam formed by a ring-focusing mirror illuminates a quasi-Wolter mirror. A prototype of the system is experimentally constructed at beamline BL25SU-A of SPring-8. Observation of the wavefront error based on ptychography enables efficient alignment of the two mirrors. Using this alignment procedure, we achieve a spot size of less than 200 nm at 300 eV.

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A highly efficient nanofocusing system for soft x rays

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