A laser Thomson scattering system was constructed to measure the electron properties of capacitively-coupled radio-frequency glow discharges. The system was designed for the detection of the very small Thomson signal against a large background of Rayleigh scattered light. Measurement of electron density of 1015 m-3 order was achieved.
|Number of pages||2|
|Journal||Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers|
|Issue number||3 A|
|Publication status||Published - Mar 2001|
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)