A laser Thomson scattering system for low density glow discharge plasmas

M. A.M. ElSabbagh, H. Koyama, M. D. Bowden, K. Uchino, K. Muraoka

Research output: Contribution to journalArticle

13 Citations (Scopus)

Abstract

A laser Thomson scattering system was constructed to measure the electron properties of capacitively-coupled radio-frequency glow discharges. The system was designed for the detection of the very small Thomson signal against a large background of Rayleigh scattered light. Measurement of electron density of 1015 m-3 order was achieved.

Original languageEnglish
Pages (from-to)1465-1466
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume40
Issue number3 A
DOIs
Publication statusPublished - Mar 2001

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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