A method of reducing micropipes in thin films by using sublimation growth

Naoki Oyanagi, Shin Ichi Nishizawa, Kazuo Arai

Research output: Contribution to journalArticlepeer-review

1 Citation (Scopus)

Abstract

The micropipe termination by using a W or Pt thin film was demonstrated. A SiC single crystal was grown on the modified-Lely seed with W or Pt mask, by the sublimation method. The optical micrograph made it clear that a micropipe contained in seed crystal was terminated at the metal deposited interface. The effect of metal mask thickness on the termination efficiency was also studied.

Original languageEnglish
Pages (from-to)107-110
Number of pages4
JournalMaterials Science Forum
Volume389-393
Issue number1
DOIs
Publication statusPublished - Jan 1 2002
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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