A method of reducing micropipes in thin films by using sublimation growth

Naoki Oyanagi; Shin Ichi Nishizawa; Kazuo Arai

doi:10.4028/www.scientific.net/msf.389-393.107

A method of reducing micropipes in thin films by using sublimation growth

Naoki Oyanagi, Shin Ichi Nishizawa, Kazuo Arai

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

The micropipe termination by using a W or Pt thin film was demonstrated. A SiC single crystal was grown on the modified-Lely seed with W or Pt mask, by the sublimation method. The optical micrograph made it clear that a micropipe contained in seed crystal was terminated at the metal deposited interface. The effect of metal mask thickness on the termination efficiency was also studied.

Original language	English
Pages (from-to)	107-110
Number of pages	4
Journal	Materials Science Forum
Volume	389-393
Issue number	1
DOIs	https://doi.org/10.4028/www.scientific.net/msf.389-393.107
Publication status	Published - Jan 1 2002
Externally published	Yes

All Science Journal Classification (ASJC) codes

Materials Science(all)
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.4028/www.scientific.net/msf.389-393.107

Cite this

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title = "A method of reducing micropipes in thin films by using sublimation growth",

abstract = "The micropipe termination by using a W or Pt thin film was demonstrated. A SiC single crystal was grown on the modified-Lely seed with W or Pt mask, by the sublimation method. The optical micrograph made it clear that a micropipe contained in seed crystal was terminated at the metal deposited interface. The effect of metal mask thickness on the termination efficiency was also studied.",

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N2 - The micropipe termination by using a W or Pt thin film was demonstrated. A SiC single crystal was grown on the modified-Lely seed with W or Pt mask, by the sublimation method. The optical micrograph made it clear that a micropipe contained in seed crystal was terminated at the metal deposited interface. The effect of metal mask thickness on the termination efficiency was also studied.

AB - The micropipe termination by using a W or Pt thin film was demonstrated. A SiC single crystal was grown on the modified-Lely seed with W or Pt mask, by the sublimation method. The optical micrograph made it clear that a micropipe contained in seed crystal was terminated at the metal deposited interface. The effect of metal mask thickness on the termination efficiency was also studied.

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A method of reducing micropipes in thin films by using sublimation growth

Abstract

All Science Journal Classification (ASJC) codes

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