A method of reducing micropipes in thin films by using sublimation growth

Naoki Oyanagi, Shinichi Nishizawa, Kazuo Arai

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

The micropipe termination by using a W or Pt thin film was demonstrated. A SiC single crystal was grown on the modified-Lely seed with W or Pt mask, by the sublimation method. The optical micrograph made it clear that a micropipe contained in seed crystal was terminated at the metal deposited interface. The effect of metal mask thickness on the termination efficiency was also studied.

Original languageEnglish
Pages (from-to)107-110
Number of pages4
JournalMaterials Science Forum
Volume389-393
Issue number1
Publication statusPublished - 2002
Externally publishedYes

Fingerprint

Sublimation
sublimation
Masks
seeds
masks
Metals
Thin films
thin films
metals
Seed
Single crystals
Crystals
single crystals
crystals

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

A method of reducing micropipes in thin films by using sublimation growth. / Oyanagi, Naoki; Nishizawa, Shinichi; Arai, Kazuo.

In: Materials Science Forum, Vol. 389-393, No. 1, 2002, p. 107-110.

Research output: Contribution to journalArticle

Oyanagi, Naoki ; Nishizawa, Shinichi ; Arai, Kazuo. / A method of reducing micropipes in thin films by using sublimation growth. In: Materials Science Forum. 2002 ; Vol. 389-393, No. 1. pp. 107-110.
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