A method to measure displacement of microscale structures with high resolution and large stroke for cellular characterization

Hirotaka Sugiura, Shinya Sakuma, Makoto Kaneko, Fumihito Arai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We propose a method to measure displacement of microscale structures with high sensing resolution and large stroke on focal plane of microscopy. Using this method, measurable displacement become approximately 10 times larger than that of the conventional method, and the resolution is kept as small as tens nm order.

Original languageEnglish
Title of host publication2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781479966783
DOIs
Publication statusPublished - Mar 21 2016
Externally publishedYes
EventInternational Symposium on Micro-NanoMechatronics and Human Science, MHS 2015 - Nagoya, Japan
Duration: Nov 23 2015Nov 25 2015

Publication series

Name2015 International Symposium on Micro-NanoMechatronics and Human Science, MHS 2015

Other

OtherInternational Symposium on Micro-NanoMechatronics and Human Science, MHS 2015
CountryJapan
CityNagoya
Period11/23/1511/25/15

All Science Journal Classification (ASJC) codes

  • Biomedical Engineering
  • Electrical and Electronic Engineering
  • Biotechnology
  • Education

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