TY - JOUR
T1 - A micro gas sensor using TiO2 nanotubes to detect volatile organic compounds
AU - Kida, Tetsuya
AU - Seo, Min Hyun
AU - Suematsu, Koichi
AU - Yuasa, Masayoshi
AU - Kanmura, Yuichi
AU - Shimanoe, Kengo
PY - 2013/4
Y1 - 2013/4
N2 - To develop a portable gas sensor with low power consumption, we deposited a micro size sensing film (100 × 100 μm2) on a Si substrate with an integrated micro heater and electrodes constructed using micro-electro- mechanical system (MEMS) technology. TiO2 nanotubes ca. 500nm long with a 50 nm diameter were used to sense and detect volatile organic compounds (VOCs). We demonstrate that the MEMS sensor responded well to ethanol and toluene in air at elevated temperatures, such as 500 °C, which suggests that it is a promising battery-operable micro gas sensor for detecting VOCs.
AB - To develop a portable gas sensor with low power consumption, we deposited a micro size sensing film (100 × 100 μm2) on a Si substrate with an integrated micro heater and electrodes constructed using micro-electro- mechanical system (MEMS) technology. TiO2 nanotubes ca. 500nm long with a 50 nm diameter were used to sense and detect volatile organic compounds (VOCs). We demonstrate that the MEMS sensor responded well to ethanol and toluene in air at elevated temperatures, such as 500 °C, which suggests that it is a promising battery-operable micro gas sensor for detecting VOCs.
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U2 - 10.7567/APEX.6.047201
DO - 10.7567/APEX.6.047201
M3 - Article
AN - SCOPUS:84880910406
VL - 6
JO - Applied Physics Express
JF - Applied Physics Express
SN - 1882-0778
IS - 4
M1 - 047201
ER -