A micro gas sensor using TiO2 nanotubes to detect volatile organic compounds

Tetsuya Kida; Min Hyun Seo; Koichi Suematsu; Masayoshi Yuasa; Yuichi Kanmura; Kengo Shimanoe

doi:10.7567/APEX.6.047201

A micro gas sensor using TiO₂ nanotubes to detect volatile organic compounds

Tetsuya Kida, Min Hyun Seo, Koichi Suematsu, Masayoshi Yuasa, Yuichi Kanmura, Kengo Shimanoe

Functional Materials Science

Research output: Contribution to journal › Article

12 Citations (Scopus)

Abstract

To develop a portable gas sensor with low power consumption, we deposited a micro size sensing film (100 × 100 μm2) on a Si substrate with an integrated micro heater and electrodes constructed using micro-electro- mechanical system (MEMS) technology. TiO₂ nanotubes ca. 500nm long with a 50 nm diameter were used to sense and detect volatile organic compounds (VOCs). We demonstrate that the MEMS sensor responded well to ethanol and toluene in air at elevated temperatures, such as 500 °C, which suggests that it is a promising battery-operable micro gas sensor for detecting VOCs.

Original language	English
Article number	047201
Journal	Applied Physics Express
Volume	6
Issue number	4
DOIs	https://doi.org/10.7567/APEX.6.047201
Publication status	Published - Apr 1 2013

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All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy(all)

Cite this

Kida, T., Seo, M. H., Suematsu, K., Yuasa, M., Kanmura, Y., & Shimanoe, K. (2013). A micro gas sensor using TiO₂ nanotubes to detect volatile organic compounds. Applied Physics Express, 6(4), [047201]. https://doi.org/10.7567/APEX.6.047201

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Access to Document

10.7567/APEX.6.047201