A micro gas sensor using TiO2 nanotubes to detect volatile organic compounds

Tetsuya Kida, Min Hyun Seo, Koichi Suematsu, Masayoshi Yuasa, Yuichi Kanmura, Kengo Shimanoe

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12 Citations (Scopus)

Abstract

To develop a portable gas sensor with low power consumption, we deposited a micro size sensing film (100 × 100 μm2) on a Si substrate with an integrated micro heater and electrodes constructed using micro-electro- mechanical system (MEMS) technology. TiO2 nanotubes ca. 500nm long with a 50 nm diameter were used to sense and detect volatile organic compounds (VOCs). We demonstrate that the MEMS sensor responded well to ethanol and toluene in air at elevated temperatures, such as 500 °C, which suggests that it is a promising battery-operable micro gas sensor for detecting VOCs.

Original languageEnglish
Article number047201
JournalApplied Physics Express
Volume6
Issue number4
DOIs
Publication statusPublished - Apr 1 2013

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All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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