A micro laser Doppler velocimeter designed for a wafer-level packaging process

N. Morita, T. Akiyama, H. Nogami, Y. Hayashida, E. Higurashi, T. Ito, R. Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

We develop a micro laser Doppler velocimeter (μ-LDV), designed for fabrication via a wafer-level packaging process for small size and mass production. This sensor is only 1/10,000th the volume of typical commercial LDVs. We successfully performed velocity measurement of moving solid plates and a flowing liquid with suspended particles by FFT analyzing signals obtained by our proposed μ-LDV. It can measure the velocity of any material that by itself or by constituent particles - bubbles, cells, emulsion phases, etc. - can scatter irradiated light: examples include solids like aluminum and cardboard or fluids like water, oil, and air.

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages480-483
Number of pages4
ISBN (Electronic)9781479989553
DOIs
Publication statusPublished - Aug 5 2015
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: Jun 21 2015Jun 25 2015

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Other

Other18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
CountryUnited States
CityAnchorage
Period6/21/156/25/15

Fingerprint

laser doppler velocimeters
Laser Doppler velocimeters
packaging
Packaging
wafers
fast Fourier transformations
velocity measurement
Fast Fourier transforms
Velocity measurement
emulsions
Emulsions
bubbles
oils
aluminum
Aluminum
Fabrication
fabrication
Fluids
fluids
sensors

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Morita, N., Akiyama, T., Nogami, H., Hayashida, Y., Higurashi, E., Ito, T., & Sawada, R. (2015). A micro laser Doppler velocimeter designed for a wafer-level packaging process. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 480-483). [7180965] (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7180965

A micro laser Doppler velocimeter designed for a wafer-level packaging process. / Morita, N.; Akiyama, T.; Nogami, H.; Hayashida, Y.; Higurashi, E.; Ito, T.; Sawada, R.

2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 480-483 7180965 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Morita, N, Akiyama, T, Nogami, H, Hayashida, Y, Higurashi, E, Ito, T & Sawada, R 2015, A micro laser Doppler velocimeter designed for a wafer-level packaging process. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7180965, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 480-483, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 6/21/15. https://doi.org/10.1109/TRANSDUCERS.2015.7180965
Morita N, Akiyama T, Nogami H, Hayashida Y, Higurashi E, Ito T et al. A micro laser Doppler velocimeter designed for a wafer-level packaging process. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 480-483. 7180965. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). https://doi.org/10.1109/TRANSDUCERS.2015.7180965
Morita, N. ; Akiyama, T. ; Nogami, H. ; Hayashida, Y. ; Higurashi, E. ; Ito, T. ; Sawada, R. / A micro laser Doppler velocimeter designed for a wafer-level packaging process. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 480-483 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).
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