A micro laser Doppler velocimeter designed for a wafer-level packaging process

N. Morita, T. Akiyama, H. Nogami, Y. Hayashida, E. Higurashi, T. Ito, R. Sawada

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    2 Citations (Scopus)

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    Physics & Astronomy

    Engineering & Materials Science