A micro laser Doppler velocimeter designed for a wafer-level packaging process

N. Morita, T. Akiyama, H. Nogami, Y. Hayashida, E. Higurashi, T. Ito, R. Sawada

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Fingerprint Dive into the research topics of 'A micro laser Doppler velocimeter designed for a wafer-level packaging process'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science