A multi-layer stacked all sol-gel fabrication technique for vertical coupled waveguide

Ahmad Syahrin Idris, Sampad Ghosh, Haisong Jiang, Kiichi Hamamoto

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

Abstract

A multi-layer vertically stacked all sol-gel fabrication technique on bulk silicon is proposed to realize vertical coupling from planar waveguides to 3-dimensional structures. The all sol-gel fabrication technique realizes the capability to stack ZnO sol-gel core layer and SiO2 sol-gel cladding and core separation layers. A major issue with sol-gel based fabrication is the appearance of cracks on the sol-gel layer, and these were improved by a slow cooling process of 1°C/min after 500°C temperature annealing in addition to a SiO2 surface cleaning using photoresist remover. As a result, a multi-layer vertically stacked structure with a ZnO core layer thickness of 300 nm and SiO2 cladding/core separation layer thickness of 1.5 μm was successfully fabricated on bulk Si.

Original languageEnglish
Pages (from-to)12-17
Number of pages6
JournalEvergreen
Volume4
Issue number2-3
DOIs
Publication statusPublished - Sep 2017

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Ceramics and Composites
  • Surfaces, Coatings and Films
  • Management, Monitoring, Policy and Law

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