A simple amorphous molecule, tri(3,5-di-tert-butoxycarbonyloxybenzyl) 1,3,5- benzenetetracarboxylate (4) was prepared from 1,3,5-benzenetricarbonyl trichloride (3) and 3,5-di(tert-butoxycarbonyloxy)benzyl alcohol (2). Compound 4 can form an uniform transparent film by spin-casting on silicone wafer and the film has a good transparency above 300 nm wavelength. The chemically amplified photoresist system based on 4 containing 5 wt% of diphenyliodonium 9,10-dimethoxyanthracene-2-sulfonate (DIAS) showed a sensitivity of 19 mJ/cm2 and a contrast of 17 with 365 nm light.
All Science Journal Classification (ASJC) codes
- Polymers and Plastics
- Organic Chemistry
- Materials Chemistry