A novel particle sizing method for nano abrasives in CMP slurry by using fluorescent nano probe

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Abstract

In this study, a novel particle sizing method is proposed based on Brownian diffusion analysis for abrasive particles using fluorescent probing. A fluorescent probe is used to measure the average dynamic viscosity of the nanoparticle dispersion in a solvent. By measuring both the average dynamic viscosity and the size of the nanoscale abrasive particles simultaneously, the uncertainty of the particle sizing is considered to be improved based on the viscosity compensation for the Brownian diffusion of nanoparticles. In this research, the authors investigate the difference between the nanoviscosity and the shear viscosity of the solvent to verify the efficacy in using viscosity compensation for nanoparticle sizing.

Original languageEnglish
Pages (from-to)754-760
Number of pages7
JournalInternational Journal of Automation Technology
Volume11
Issue number5
DOIs
Publication statusPublished - Jan 1 2017

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

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